Research of Chain Plasmochemical Synthesis of Superdispersed Silicon Dioxide by Pulsed Electron Beam

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4 Citations (Scopus)

Abstract

The work covers the research results of plasmochemical synthesis of silicon dioxide nanosize powder out of the gas-phase mixture of silicon tetrachloride, hydrogen and oxygen. The process was initiated by the high-current pulsed electron beam. Chain plasmochemical synthesis was carried out at volumetric reaction excitation. Distribution of the particles under size criteria was shown. Particle growth under further influence of pulsed electron beam was discovered. It is shown that the process has an oscillation character similar to cold flame regime at hydrocarbon oxidation.

Original languageEnglish
Pages (from-to)483-486
Number of pages4
JournalThe transactions of the Institute of Electrical Engineers of Japan.A
Volume124
Issue number6
DOIs
Publication statusPublished - 2004

Keywords

  • chain process
  • nanosize powder
  • plasmochemical synthesis
  • silicon dioxide

ASJC Scopus subject areas

  • Electrical and Electronic Engineering

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