Abstract
A brief review is presented of the "Raduga 1-5" repetitively pulsed vacuum arc ion sources. Their operating principles and functional ranges are described. The Raduga ion sources provide single-and multi-element implantation. These advantages are achieved by using not only pure single-element or mixed ion beams, but also pulsed beam sequences with controllable composition and energy of each ion species. Another feature of the ion sources is their ability to generate a sequence of ion beam and plasma stream pulses. Switching between ion implantation and plasma deposition can be done from pulse to pulse, within each pulse, or after accumulation of a required dose. "Raduga 5" ion and plasma source operates in a d.c. mode of plasma formation and repetitively pulsed mode of ion beam generation. A new simple and effective system for filtering a plasma flux from the microparticle fraction and the neutral component is described.
| Original language | English |
|---|---|
| Pages (from-to) | 9-15 |
| Number of pages | 7 |
| Journal | Surface and Coatings Technology |
| Volume | 96 |
| Issue number | 1 |
| Publication status | Published - 3 Nov 1997 |
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Keywords
- Ion and plasma sources
- Ion implantation
- Plasma deposition of coatings
- Vacuum arc
ASJC Scopus subject areas
- Surfaces, Coatings and Films
- Condensed Matter Physics
- Surfaces and Interfaces
Cite this
Repetitively pulsed vacuum arc ion and plasma sources and new methods of ion and ion-plasma treatment of materials. / Ryabchikov, Alexander I.
In: Surface and Coatings Technology, Vol. 96, No. 1, 03.11.1997, p. 9-15.Research output: Contribution to journal › Article
}
TY - JOUR
T1 - Repetitively pulsed vacuum arc ion and plasma sources and new methods of ion and ion-plasma treatment of materials
AU - Ryabchikov, Alexander I.
PY - 1997/11/3
Y1 - 1997/11/3
N2 - A brief review is presented of the "Raduga 1-5" repetitively pulsed vacuum arc ion sources. Their operating principles and functional ranges are described. The Raduga ion sources provide single-and multi-element implantation. These advantages are achieved by using not only pure single-element or mixed ion beams, but also pulsed beam sequences with controllable composition and energy of each ion species. Another feature of the ion sources is their ability to generate a sequence of ion beam and plasma stream pulses. Switching between ion implantation and plasma deposition can be done from pulse to pulse, within each pulse, or after accumulation of a required dose. "Raduga 5" ion and plasma source operates in a d.c. mode of plasma formation and repetitively pulsed mode of ion beam generation. A new simple and effective system for filtering a plasma flux from the microparticle fraction and the neutral component is described.
AB - A brief review is presented of the "Raduga 1-5" repetitively pulsed vacuum arc ion sources. Their operating principles and functional ranges are described. The Raduga ion sources provide single-and multi-element implantation. These advantages are achieved by using not only pure single-element or mixed ion beams, but also pulsed beam sequences with controllable composition and energy of each ion species. Another feature of the ion sources is their ability to generate a sequence of ion beam and plasma stream pulses. Switching between ion implantation and plasma deposition can be done from pulse to pulse, within each pulse, or after accumulation of a required dose. "Raduga 5" ion and plasma source operates in a d.c. mode of plasma formation and repetitively pulsed mode of ion beam generation. A new simple and effective system for filtering a plasma flux from the microparticle fraction and the neutral component is described.
KW - Ion and plasma sources
KW - Ion implantation
KW - Plasma deposition of coatings
KW - Vacuum arc
UR - http://www.scopus.com/inward/record.url?scp=0031551657&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=0031551657&partnerID=8YFLogxK
M3 - Article
AN - SCOPUS:0031551657
VL - 96
SP - 9
EP - 15
JO - Surface and Coatings Technology
JF - Surface and Coatings Technology
SN - 0257-8972
IS - 1
ER -