Repetitively pulsed, high-concentration implantation

A. I. Ryabchikov, R. A. Nasyrov

Research output: Contribution to journalArticle

27 Citations (Scopus)

Abstract

We report our work on high dose ion implantation, emphasising the limiting concentration of implanted species that occurs because of surface sputtering. We present experimental results showing that during repetitively pulsed implantation, sputtering of the surface layer can be compensated for by simultaneous neutral atom or low energy ion deposition, thereby arbitrarily high alloying levels can be reached. Experimental data on pulsed implantation of Hf, Tb and Ni into Al, Ti and Fe demonstrate that alloy layers with implanted species concentration of up to 100% can be formed. With implantation of 100 keV Ni into Al and with sputtering compensation and radiation stimulated thermal diffusion conditions, an alloy layer of thickness 0.5 μm and with a Ni concentration of approximately 77 at.% has been obtained. In this paper we review our data on concentration profiles, relating these to the alloy layers and also showing that the layer depth considerably exceeds the ion range. We discuss and generalize our results for high concentration implantation, and consider potential applications of the technique for the modification of surface properties of different materials.

Original languageEnglish
Pages (from-to)48-51
Number of pages4
JournalNuclear Inst. and Methods in Physics Research, B
Volume61
Issue number1
DOIs
Publication statusPublished - 2 Jul 1991

Fingerprint

Ion implantation
Sputtering
implantation
Ions
sputtering
Thermal diffusion
Alloying
Surface properties
Radiation
thermal diffusion
Atoms
neutral atoms
surface properties
alloying
ion implantation
surface layers
ions
dosage
radiation
profiles

ASJC Scopus subject areas

  • Surfaces, Coatings and Films
  • Instrumentation
  • Surfaces and Interfaces

Cite this

Repetitively pulsed, high-concentration implantation. / Ryabchikov, A. I.; Nasyrov, R. A.

In: Nuclear Inst. and Methods in Physics Research, B, Vol. 61, No. 1, 02.07.1991, p. 48-51.

Research output: Contribution to journalArticle

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