Abstract
In the recent years, great progress in development of spontaneous UV and VUV sources, radiating on the transitions of excimer and exciplex molecules has been achieved. However, practical use of sealed-off excilamps is limited by low lifetime of gas mixture. In this paper, stability of output parameters of the excilamps pumped by glow, barrier and capacitive discharges is studied and the mechanism of chlorine losses in low pressure halogen containing excilamps made of quartz is determined.
| Original language | English |
|---|---|
| Title of host publication | Proceedings of SPIE - The International Society for Optical Engineering |
| Publisher | Society of Photo-Optical Instrumentation Engineers |
| Pages | 425-432 |
| Number of pages | 8 |
| Volume | 3618 |
| Publication status | Published - 1999 |
| Event | Proceedings of the 1999 Laser Applications in Microelectronic and Optoelectronic Manufacturing IV (LAMOM-IV) - San Jose, CA, USA Duration: 25 Jan 1999 → 27 Jan 1999 |
Other
| Other | Proceedings of the 1999 Laser Applications in Microelectronic and Optoelectronic Manufacturing IV (LAMOM-IV) |
|---|---|
| City | San Jose, CA, USA |
| Period | 25.1.99 → 27.1.99 |
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ASJC Scopus subject areas
- Electrical and Electronic Engineering
- Condensed Matter Physics
Cite this
Reliability and lifetime of UV excilamps pumped by glow, barrier and capacitive discharges. / Tarasenko, Victor F.; Chernov, Evgenii B.; Erofeev, Michail V.; Panchenko, Alexei N.; Skakun, Victor S.; Sosnin, Eduard A.
Proceedings of SPIE - The International Society for Optical Engineering. Vol. 3618 Society of Photo-Optical Instrumentation Engineers, 1999. p. 425-432.Research output: Chapter in Book/Report/Conference proceeding › Conference contribution
}
TY - GEN
T1 - Reliability and lifetime of UV excilamps pumped by glow, barrier and capacitive discharges
AU - Tarasenko, Victor F.
AU - Chernov, Evgenii B.
AU - Erofeev, Michail V.
AU - Panchenko, Alexei N.
AU - Skakun, Victor S.
AU - Sosnin, Eduard A.
PY - 1999
Y1 - 1999
N2 - In the recent years, great progress in development of spontaneous UV and VUV sources, radiating on the transitions of excimer and exciplex molecules has been achieved. However, practical use of sealed-off excilamps is limited by low lifetime of gas mixture. In this paper, stability of output parameters of the excilamps pumped by glow, barrier and capacitive discharges is studied and the mechanism of chlorine losses in low pressure halogen containing excilamps made of quartz is determined.
AB - In the recent years, great progress in development of spontaneous UV and VUV sources, radiating on the transitions of excimer and exciplex molecules has been achieved. However, practical use of sealed-off excilamps is limited by low lifetime of gas mixture. In this paper, stability of output parameters of the excilamps pumped by glow, barrier and capacitive discharges is studied and the mechanism of chlorine losses in low pressure halogen containing excilamps made of quartz is determined.
UR - http://www.scopus.com/inward/record.url?scp=0033362813&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=0033362813&partnerID=8YFLogxK
M3 - Conference contribution
VL - 3618
SP - 425
EP - 432
BT - Proceedings of SPIE - The International Society for Optical Engineering
PB - Society of Photo-Optical Instrumentation Engineers
ER -