Reliability and lifetime of UV excilamps pumped by glow, barrier and capacitive discharges

Abstract

In the recent years, great progress in development of spontaneous UV and VUV sources, radiating on the transitions of excimer and exciplex molecules has been achieved. However, practical use of sealed-off excilamps is limited by low lifetime of gas mixture. In this paper, stability of output parameters of the excilamps pumped by glow, barrier and capacitive discharges is studied and the mechanism of chlorine losses in low pressure halogen containing excilamps made of quartz is determined.

Original language	English
Title of host publication	Proceedings of SPIE - The International Society for Optical Engineering
Publisher	Society of Photo-Optical Instrumentation Engineers
Pages	425-432
Number of pages	8
Volume	3618
Publication status	Published - 1999
Event	Proceedings of the 1999 Laser Applications in Microelectronic and Optoelectronic Manufacturing IV (LAMOM-IV) - San Jose, CA, USA Duration: 25 Jan 1999 → 27 Jan 1999

Other

Other	Proceedings of the 1999 Laser Applications in Microelectronic and Optoelectronic Manufacturing IV (LAMOM-IV)
City	San Jose, CA, USA
Period	25.1.99 → 27.1.99

ASJC Scopus subject areas

Electrical and Electronic Engineering
Condensed Matter Physics

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Reliability and lifetime of UV excilamps pumped by glow, barrier and capacitive discharges. / Tarasenko, Victor F.; Chernov, Evgenii B.; Erofeev, Michail V.; Panchenko, Alexei N.; Skakun, Victor S.; Sosnin, Eduard A.

Proceedings of SPIE - The International Society for Optical Engineering. Vol. 3618 Society of Photo-Optical Instrumentation Engineers, 1999. p. 425-432.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Tarasenko, VF, Chernov, EB, Erofeev, MV, Panchenko, AN, Skakun, VS & Sosnin, EA 1999, Reliability and lifetime of UV excilamps pumped by glow, barrier and capacitive discharges. in Proceedings of SPIE - The International Society for Optical Engineering. vol. 3618, Society of Photo-Optical Instrumentation Engineers, pp. 425-432, Proceedings of the 1999 Laser Applications in Microelectronic and Optoelectronic Manufacturing IV (LAMOM-IV), San Jose, CA, USA, 25.1.99.

Tarasenko, Victor F. ; Chernov, Evgenii B. ; Erofeev, Michail V. ; Panchenko, Alexei N. ; Skakun, Victor S. ; Sosnin, Eduard A. / Reliability and lifetime of UV excilamps pumped by glow, barrier and capacitive discharges. Proceedings of SPIE - The International Society for Optical Engineering. Vol. 3618 Society of Photo-Optical Instrumentation Engineers, 1999. pp. 425-432

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abstract = "In the recent years, great progress in development of spontaneous UV and VUV sources, radiating on the transitions of excimer and exciplex molecules has been achieved. However, practical use of sealed-off excilamps is limited by low lifetime of gas mixture. In this paper, stability of output parameters of the excilamps pumped by glow, barrier and capacitive discharges is studied and the mechanism of chlorine losses in low pressure halogen containing excilamps made of quartz is determined.",

author = "Tarasenko, {Victor F.} and Chernov, {Evgenii B.} and Erofeev, {Michail V.} and Panchenko, {Alexei N.} and Skakun, {Victor S.} and Sosnin, {Eduard A.}",

year = "1999",

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volume = "3618",

pages = "425--432",

booktitle = "Proceedings of SPIE - The International Society for Optical Engineering",

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AU - Tarasenko, Victor F.

AU - Chernov, Evgenii B.

AU - Erofeev, Michail V.

AU - Panchenko, Alexei N.

AU - Skakun, Victor S.

AU - Sosnin, Eduard A.

PY - 1999

Y1 - 1999

N2 - In the recent years, great progress in development of spontaneous UV and VUV sources, radiating on the transitions of excimer and exciplex molecules has been achieved. However, practical use of sealed-off excilamps is limited by low lifetime of gas mixture. In this paper, stability of output parameters of the excilamps pumped by glow, barrier and capacitive discharges is studied and the mechanism of chlorine losses in low pressure halogen containing excilamps made of quartz is determined.

AB - In the recent years, great progress in development of spontaneous UV and VUV sources, radiating on the transitions of excimer and exciplex molecules has been achieved. However, practical use of sealed-off excilamps is limited by low lifetime of gas mixture. In this paper, stability of output parameters of the excilamps pumped by glow, barrier and capacitive discharges is studied and the mechanism of chlorine losses in low pressure halogen containing excilamps made of quartz is determined.

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M3 - Conference contribution

AN - SCOPUS:0033362813

VL - 3618

SP - 425

EP - 432

BT - Proceedings of SPIE - The International Society for Optical Engineering

PB - Society of Photo-Optical Instrumentation Engineers

T2 - Proceedings of the 1999 Laser Applications in Microelectronic and Optoelectronic Manufacturing IV (LAMOM-IV)

Y2 - 25 January 1999 through 27 January 1999

ER -

Reliability and lifetime of UV excilamps pumped by glow, barrier and capacitive discharges

Abstract

Other

ASJC Scopus subject areas

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