Reliability and lifetime of UV excilamps pumped by glow, barrier and capacitive discharges

Victor F. Tarasenko, Evgenii B. Chernov, Michail V. Erofeev, Alexei N. Panchenko, Victor S. Skakun, Eduard A. Sosnin

Research output: Chapter in Book/Report/Conference proceedingConference contribution

3 Citations (Scopus)

Abstract

In the recent years, great progress in development of spontaneous UV and VUV sources, radiating on the transitions of excimer and exciplex molecules has been achieved. However, practical use of sealed-off excilamps is limited by low lifetime of gas mixture. In this paper, stability of output parameters of the excilamps pumped by glow, barrier and capacitive discharges is studied and the mechanism of chlorine losses in low pressure halogen containing excilamps made of quartz is determined.

Original languageEnglish
Title of host publicationProceedings of SPIE - The International Society for Optical Engineering
PublisherSociety of Photo-Optical Instrumentation Engineers
Pages425-432
Number of pages8
Volume3618
Publication statusPublished - 1999
EventProceedings of the 1999 Laser Applications in Microelectronic and Optoelectronic Manufacturing IV (LAMOM-IV) - San Jose, CA, USA
Duration: 25 Jan 199927 Jan 1999

Other

OtherProceedings of the 1999 Laser Applications in Microelectronic and Optoelectronic Manufacturing IV (LAMOM-IV)
CitySan Jose, CA, USA
Period25.1.9927.1.99

Fingerprint

Gas mixtures
glow discharges
Chlorine
Quartz
life (durability)
Molecules
excimers
halogens
chlorine
gas mixtures
quartz
low pressure
output
molecules

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Condensed Matter Physics

Cite this

Tarasenko, V. F., Chernov, E. B., Erofeev, M. V., Panchenko, A. N., Skakun, V. S., & Sosnin, E. A. (1999). Reliability and lifetime of UV excilamps pumped by glow, barrier and capacitive discharges. In Proceedings of SPIE - The International Society for Optical Engineering (Vol. 3618, pp. 425-432). Society of Photo-Optical Instrumentation Engineers.

Reliability and lifetime of UV excilamps pumped by glow, barrier and capacitive discharges. / Tarasenko, Victor F.; Chernov, Evgenii B.; Erofeev, Michail V.; Panchenko, Alexei N.; Skakun, Victor S.; Sosnin, Eduard A.

Proceedings of SPIE - The International Society for Optical Engineering. Vol. 3618 Society of Photo-Optical Instrumentation Engineers, 1999. p. 425-432.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Tarasenko, VF, Chernov, EB, Erofeev, MV, Panchenko, AN, Skakun, VS & Sosnin, EA 1999, Reliability and lifetime of UV excilamps pumped by glow, barrier and capacitive discharges. in Proceedings of SPIE - The International Society for Optical Engineering. vol. 3618, Society of Photo-Optical Instrumentation Engineers, pp. 425-432, Proceedings of the 1999 Laser Applications in Microelectronic and Optoelectronic Manufacturing IV (LAMOM-IV), San Jose, CA, USA, 25.1.99.
Tarasenko VF, Chernov EB, Erofeev MV, Panchenko AN, Skakun VS, Sosnin EA. Reliability and lifetime of UV excilamps pumped by glow, barrier and capacitive discharges. In Proceedings of SPIE - The International Society for Optical Engineering. Vol. 3618. Society of Photo-Optical Instrumentation Engineers. 1999. p. 425-432
Tarasenko, Victor F. ; Chernov, Evgenii B. ; Erofeev, Michail V. ; Panchenko, Alexei N. ; Skakun, Victor S. ; Sosnin, Eduard A. / Reliability and lifetime of UV excilamps pumped by glow, barrier and capacitive discharges. Proceedings of SPIE - The International Society for Optical Engineering. Vol. 3618 Society of Photo-Optical Instrumentation Engineers, 1999. pp. 425-432
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