Abstract
The paper describes the regimes of energy input in the pseudospark discharge in typical conditions of EUV source operation. It is shown that in a mode of superdense glow discharge the electron temperature in the discharge plasma reaches rather high values without self-magnetic compression of the plasma channel.
| Original language | English |
|---|---|
| Title of host publication | BEAMS 2002 - 14th International Conference on High-Power Particle Beams |
| Pages | 149-152 |
| Number of pages | 4 |
| Volume | 2 |
| Publication status | Published - 2002 |
| Event | 14th International Conference on High-Power Particle Beams, BEAMS 2002 and the 5th International Conference on Dense Z-Pinches, DZP 2002 - Albuquerque, NM, United States Duration: 23 Jun 2002 → 28 Jun 2002 |
Other
| Other | 14th International Conference on High-Power Particle Beams, BEAMS 2002 and the 5th International Conference on Dense Z-Pinches, DZP 2002 |
|---|---|
| Country | United States |
| City | Albuquerque, NM |
| Period | 23.6.02 → 28.6.02 |
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ASJC Scopus subject areas
- Nuclear and High Energy Physics
Cite this
Korolev, Y. D., Frants, O. B., Geyman, V. G., Ivashov, R. V., Landl, N. V., & Shemyakin, I. A. (2002). Regimes of energy input in the pseudospark discharge in the sources of EUV radiation. In BEAMS 2002 - 14th International Conference on High-Power Particle Beams (Vol. 2, pp. 149-152). [6219532]