Abstract
The paper describes the regimes of energy input in the pseudospark discharge in typical conditions of EUV source operation. It is shown that in a mode of superdense glow discharge the electron temperature in the discharge plasma reaches rather high values without self-magnetic compression of the plasma channel.
Original language | English |
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Title of host publication | BEAMS 2002 - 14th International Conference on High-Power Particle Beams |
Pages | 149-152 |
Number of pages | 4 |
Volume | 2 |
Publication status | Published - 2002 |
Event | 14th International Conference on High-Power Particle Beams, BEAMS 2002 and the 5th International Conference on Dense Z-Pinches, DZP 2002 - Albuquerque, NM, United States Duration: 23 Jun 2002 → 28 Jun 2002 |
Other
Other | 14th International Conference on High-Power Particle Beams, BEAMS 2002 and the 5th International Conference on Dense Z-Pinches, DZP 2002 |
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Country | United States |
City | Albuquerque, NM |
Period | 23.6.02 → 28.6.02 |
ASJC Scopus subject areas
- Nuclear and High Energy Physics