Regimes of energy input in the pseudospark discharge in the sources of EUV radiation

Yu D. Korolev, O. B. Frants, V. G. Geyman, R. V. Ivashov, N. V. Landl, I. A. Shemyakin

    Research output: Chapter in Book/Report/Conference proceedingConference contribution

    1 Citation (Scopus)

    Abstract

    The paper describes the regimes of energy input in the pseudospark discharge in typical conditions of EUV source operation. It is shown that in a mode of superdense glow discharge the electron temperature in the discharge plasma reaches rather high values without self-magnetic compression of the plasma channel.

    Original languageEnglish
    Title of host publicationBEAMS 2002 - 14th International Conference on High-Power Particle Beams
    Pages149-152
    Number of pages4
    Volume2
    Publication statusPublished - 2002
    Event14th International Conference on High-Power Particle Beams, BEAMS 2002 and the 5th International Conference on Dense Z-Pinches, DZP 2002 - Albuquerque, NM, United States
    Duration: 23 Jun 200228 Jun 2002

    Other

    Other14th International Conference on High-Power Particle Beams, BEAMS 2002 and the 5th International Conference on Dense Z-Pinches, DZP 2002
    CountryUnited States
    CityAlbuquerque, NM
    Period23.6.0228.6.02

    ASJC Scopus subject areas

    • Nuclear and High Energy Physics

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  • Cite this

    Korolev, Y. D., Frants, O. B., Geyman, V. G., Ivashov, R. V., Landl, N. V., & Shemyakin, I. A. (2002). Regimes of energy input in the pseudospark discharge in the sources of EUV radiation. In BEAMS 2002 - 14th International Conference on High-Power Particle Beams (Vol. 2, pp. 149-152). [6219532]