Regimes of energy input in the pseudospark discharge in the sources of EUV radiation

Abstract

The paper describes the regimes of energy input in the pseudospark discharge in typical conditions of EUV source operation. It is shown that in a mode of superdense glow discharge the electron temperature in the discharge plasma reaches rather high values without self-magnetic compression of the plasma channel.

Original language	English
Title of host publication	BEAMS 2002 - 14th International Conference on High-Power Particle Beams
Pages	149-152
Number of pages	4
Volume	2
Publication status	Published - 2002
Event	14th International Conference on High-Power Particle Beams, BEAMS 2002 and the 5th International Conference on Dense Z-Pinches, DZP 2002 - Albuquerque, NM, United States Duration: 23 Jun 2002 → 28 Jun 2002

Other

Other	14th International Conference on High-Power Particle Beams, BEAMS 2002 and the 5th International Conference on Dense Z-Pinches, DZP 2002
Country	United States
City	Albuquerque, NM
Period	23.6.02 → 28.6.02

ASJC Scopus subject areas

Nuclear and High Energy Physics

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Regimes of energy input in the pseudospark discharge in the sources of EUV radiation. / Korolev, Yu D.; Frants, O. B.; Geyman, V. G.; Ivashov, R. V.; Landl, N. V.; Shemyakin, I. A.

BEAMS 2002 - 14th International Conference on High-Power Particle Beams. Vol. 2 2002. p. 149-152 6219532.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Korolev, YD, Frants, OB, Geyman, VG, Ivashov, RV, Landl, NV & Shemyakin, IA 2002, Regimes of energy input in the pseudospark discharge in the sources of EUV radiation. in BEAMS 2002 - 14th International Conference on High-Power Particle Beams. vol. 2, 6219532, pp. 149-152, 14th International Conference on High-Power Particle Beams, BEAMS 2002 and the 5th International Conference on Dense Z-Pinches, DZP 2002, Albuquerque, NM, United States, 23.6.02.

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abstract = "The paper describes the regimes of energy input in the pseudospark discharge in typical conditions of EUV source operation. It is shown that in a mode of superdense glow discharge the electron temperature in the discharge plasma reaches rather high values without self-magnetic compression of the plasma channel.",

author = "Korolev, {Yu D.} and Frants, {O. B.} and Geyman, {V. G.} and Ivashov, {R. V.} and Landl, {N. V.} and Shemyakin, {I. A.}",

year = "2002",

language = "English",

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AU - Korolev, Yu D.

AU - Frants, O. B.

AU - Geyman, V. G.

AU - Ivashov, R. V.

AU - Landl, N. V.

AU - Shemyakin, I. A.

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AB - The paper describes the regimes of energy input in the pseudospark discharge in typical conditions of EUV source operation. It is shown that in a mode of superdense glow discharge the electron temperature in the discharge plasma reaches rather high values without self-magnetic compression of the plasma channel.

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BT - BEAMS 2002 - 14th International Conference on High-Power Particle Beams

T2 - 14th International Conference on High-Power Particle Beams, BEAMS 2002 and the 5th International Conference on Dense Z-Pinches, DZP 2002

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