Reducing the number of craters on quartz glass surface suffering high-velocity impacts of microparticles by application of SiAlN and TaN protective films

V. P. Sergeev, M. P. Kalashnikov, O. V. Sergeev, A. V. Voronov, V. V. Neyfeld, Yu N. Paraev

Research output: Contribution to journalConference articlepeer-review

Abstract

On the quartz glass specimens, visually transparent single-layer SiAlN and two-layer SiAlN/TaN films were applied to compare their protective properties against shock impact of high-velocity (5-8 km/s) iron microparticles. The tests performed using a two-stage light-gas gun have shown that the most effective coatings are two-layer films. The structure, optical and mechanical properties of the films were determined.

Original languageEnglish
Article number012028
JournalJournal of Physics: Conference Series
Volume1799
Issue number1
DOIs
Publication statusPublished - 11 Mar 2021
Event27th International Conference on Vacuum Technique and Technology, VTT 2020 - Saint Petersburg, Virtual, Russian Federation
Duration: 27 Oct 202029 Oct 2020

ASJC Scopus subject areas

  • Physics and Astronomy(all)

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