Recrystallization and formation of spheroidal gold particles in amorphous-like AlN–TiB2–TiSi2 coatings after annealing and subsequent implantation

A. D. Pogrebnjak, A. A. Dem’yanenko, V. M. Beresnev, O. V. Sobol’, O. M. Ivasishin, K. Oyoshi, Y. Takeda, H. Amekura, A. I. Kupchishin

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The recrystallization of the structure of an X-ray amorphous AlN–TiB2–TiSi2 coating containing short-range order regions with characteristic sizes of 0.8–1.0 nm has been performed using a negative gold ion (Au) beam and high-temperature annealing. Direct measurements using methods of high-resolution transmission electron microscopy (HRTEM) and energy-dispersive X-ray spectral (EDXS) microanalysis have demonstrated that thermal annealing at a temperature of 1300°C in air results in the formation of nanoscale (10–15 nm) phases AlN, AlB2, Al3O3, and TiO2, whereas the ion implantation of negative ions Au leads to a fragmentation (decrease in the size) of nanograins to 2–5 nm with the formation of spheroidal gold nanocrystallites a few nanometers in size, as well as to the formation of an amorphous oxide film in the depth (near-surface layer) of the coating due to ballistic ion mixing and collision cascades.

Original languageEnglish
Pages (from-to)1453-1457
Number of pages5
JournalPhysics of the Solid State
Issue number7
Publication statusPublished - 1 Jul 2016
Externally publishedYes

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics

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