Recent advances in surface processing with the filtered DC vacuum-arc plasma

Research output: Contribution to journalArticle

21 Citations (Scopus)

Abstract

The paper presents the results of investigation on formation of DC vacuum arc discharge plasma cleaned from macroparticle fraction (MF) using the electromagnetical shutter-type plasma filter (PF). It is shown that application of PFs decreases defects on the surface and in structure of deposited coatings by 102-103 times. The additional defect decrease in the case the processed surface is shifted at the distance exceeding geometric focus of PF electrodes was observed. The efficiency of plasma ion component passing through the filter (η) depends on the form of electrodes, electrode location with respect to direction of plasma flow expansion, electrode potential, and topography of the magnetic field formed near the PF and can be more than 50%. Decrease in surface roughness and friction coefficient, increase in hardness, wear resistance and adhesion strength were registered for TiN and TiAlN coatings formed under plasma cleaning from MF.

Original languageEnglish
Pages (from-to)445-449
Number of pages5
JournalVacuum
Volume78
Issue number2-4
DOIs
Publication statusPublished - 30 May 2005

Fingerprint

plasma jets
direct current
Vacuum
Plasmas
vacuum
Processing
filters
Electrodes
electrodes
coatings
Plasma flow
Coatings
Defects
shutters
Bond strength (materials)
arc discharges
defects
magnetohydrodynamic flow
wear resistance
coefficient of friction

Keywords

  • DC vacuum arc
  • Metal plasma cleaned from macroparticles

ASJC Scopus subject areas

  • Surfaces, Coatings and Films
  • Condensed Matter Physics
  • Surfaces and Interfaces

Cite this

Recent advances in surface processing with the filtered DC vacuum-arc plasma. / Ryabchikov, A. I.; Ryabchikov, I. A.; Stepanov, I. B.; Sivin, Denis Olegovich.

In: Vacuum, Vol. 78, No. 2-4, 30.05.2005, p. 445-449.

Research output: Contribution to journalArticle

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