Radio frequency magnetron sputtering of Sr- and Mg-substituted β-tricalcium phosphate: Analysis of the physicochemical properties and deposition rate of coatings

A. I. Kozelskaya, S. E. Kulkova, A. Y. Fedotkin, E. N. Bolbasov, Y. M. Zhukov, L. Stipniece, A. V. Bakulin, A. S. Useinov, E. V. Shesterikov, J. Locs, S. I. Tverdokhlebov

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Abstract

The effect of the sputtered target composition on the deposition rate of coatings formed by radio frequency magnetron sputtering (RFMS) is investigated. Strontium substitution in the sputtered β-tricalcium phosphate (β-TCP) target composition increases the coating deposition rate, whereas magnesium substitution decreases the coating deposition rate. Computer modelling shows that both the unit cell volume and bond lengths increase when strontium is introduced into the crystal lattice, whereas the incorporation of magnesium leads to a decrease in these parameters. A correlation between the change in unit cell volume due to magnesium and strontium substitutions, and the coating deposition rate is also determined.

Original languageEnglish
Article number144763
JournalApplied Surface Science
Volume509
DOIs
Publication statusPublished - 15 Apr 2020

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Keywords

  • Computer simulation
  • Magnesium substitutions
  • Radio frequency magnetron sputtering
  • Strontium substitutions
  • β-tricalcium phosphate

ASJC Scopus subject areas

  • Chemistry(all)
  • Condensed Matter Physics
  • Physics and Astronomy(all)
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films

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