PVD of coatings based on plasma filter application

A. I. Ryabchikov, I. B. Stepanov, Ivan Anisimovich Shulepov

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

The paper presents the results of investigating the formation of vacuum-arc plasma flow cleaned from the microparticle fraction. The plasma filter design is based on plasma spread in a channel formed by electrodes located at an angle with the axis of an arc evaporator. The effects of magnetic insulation of the electrodes and the positive near-electrode potential drop on the mechanisms of charged plasma component spread are investigated. The results of the obtained experimental data are discussed.

Original languageEnglish
Title of host publication5th Korea-Russia International Symposium on Science and Technology - Proceedings: KORUS 2001
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages383-386
Number of pages4
Volume1
ISBN (Print)0780370082, 9780780370081
DOIs
Publication statusPublished - 2001
Event5th Korea-Russia International Symposium on Science and Technology, KORUS 2001 - Tomsk, Russian Federation
Duration: 26 Jun 20013 Jul 2001

Other

Other5th Korea-Russia International Symposium on Science and Technology, KORUS 2001
CountryRussian Federation
CityTomsk
Period26.6.013.7.01

Fingerprint

Physical vapor deposition
Plasmas
Coatings
Electrodes
Plasma flow
Evaporators
Insulation
Vacuum

Keywords

  • coatings
  • ion current
  • plasma filter
  • Vacuum-arc

ASJC Scopus subject areas

  • Clinical Biochemistry
  • Computer Networks and Communications
  • Biotechnology
  • Civil and Structural Engineering
  • Mechanics of Materials
  • Electronic, Optical and Magnetic Materials
  • Materials Chemistry
  • Surfaces, Coatings and Films

Cite this

Ryabchikov, A. I., Stepanov, I. B., & Shulepov, I. A. (2001). PVD of coatings based on plasma filter application. In 5th Korea-Russia International Symposium on Science and Technology - Proceedings: KORUS 2001 (Vol. 1, pp. 383-386). [975159] Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/KORUS.2001.975159

PVD of coatings based on plasma filter application. / Ryabchikov, A. I.; Stepanov, I. B.; Shulepov, Ivan Anisimovich.

5th Korea-Russia International Symposium on Science and Technology - Proceedings: KORUS 2001. Vol. 1 Institute of Electrical and Electronics Engineers Inc., 2001. p. 383-386 975159.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Ryabchikov, AI, Stepanov, IB & Shulepov, IA 2001, PVD of coatings based on plasma filter application. in 5th Korea-Russia International Symposium on Science and Technology - Proceedings: KORUS 2001. vol. 1, 975159, Institute of Electrical and Electronics Engineers Inc., pp. 383-386, 5th Korea-Russia International Symposium on Science and Technology, KORUS 2001, Tomsk, Russian Federation, 26.6.01. https://doi.org/10.1109/KORUS.2001.975159
Ryabchikov AI, Stepanov IB, Shulepov IA. PVD of coatings based on plasma filter application. In 5th Korea-Russia International Symposium on Science and Technology - Proceedings: KORUS 2001. Vol. 1. Institute of Electrical and Electronics Engineers Inc. 2001. p. 383-386. 975159 https://doi.org/10.1109/KORUS.2001.975159
Ryabchikov, A. I. ; Stepanov, I. B. ; Shulepov, Ivan Anisimovich. / PVD of coatings based on plasma filter application. 5th Korea-Russia International Symposium on Science and Technology - Proceedings: KORUS 2001. Vol. 1 Institute of Electrical and Electronics Engineers Inc., 2001. pp. 383-386
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