The paper presents the results of the experimental investigation of the physical and chemical properties of the TixSiyCzOw composite nanopowders, which were first obtained using a pulsed plasma chemical method. The pulsed plasma chemical synthesis was achieved using a technological electron accelerator (TEA-500). The parameters of the electron beam are as follows: 400–450 keV electron energy, 60 ns half-amplitude pulse duration, up to 200 J pulse energy, and 5 cm beam diameter. The main physical and chemical properties of the obtained composites were studied (morphology, chemical, elemental and phase composition). The morphology of the TixSiyCzOw composites is multiform. There are large round particles, with an average size of above 150 nm. Besides, there are small particles (an average size is in the range of 15–40 nm). The morphology of small particles is in the form of crystallites. In the TixSiyCzOw synthesised composite, the peak with a maximum of 946 cm–1 was registered. The presence of IR radiation in this region of the spectrum is typical for the deformation of atomic oscillations in the Si‒О‒Ti bond, which indicates the formation of the solid solution. The composites consist of two crystal phases – anatase and rutile. The prevailing phase of the crystal structure is rutile.
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