Properties of Ti coatings deposited by high-power ion beams

V. K. Struts, V. M. Matvienko, A. V. Petrov, A. I. Ryabchikov

Research output: Contribution to journalArticlepeer-review


Titanium coatings are deposited on a Si substrate by their deposition from ablation plasma produced by irradiating a Ti target with high-power ion beams. The dependences of the adhesion, nanohardness, Young's modulus, and friction coefficient on the distance between the sputtered target and the substrate and on the thickness of the coating are studied for thin-film titanium coatings. The formation of a transition layer with an alternating content of Ti is found to increase coating adhesion.

Original languageEnglish
Pages (from-to)220-225
Number of pages6
JournalInorganic Materials: Applied Research
Issue number3
Publication statusPublished - May 2012


  • Ablation plasma
  • Adhesion
  • Friction coefficient
  • High-power ion beams
  • Nanohardness
  • Titanium coating

ASJC Scopus subject areas

  • Materials Science(all)
  • Engineering(all)

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