Properties of Molybdenum Films Produced by High-Power Impulse Magnetron Sputtering

A. N. Zakharov, A. A. Solov’ev, K. V. Oskomov, V. O. Oskirko, V. A. Semenov, M. S. Syrtanov, Yu S. Bordulev

Research output: Contribution to journalArticlepeer-review

5 Citations (Scopus)

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Physics & Astronomy