Properties of Molybdenum Films Produced by High-Power Impulse Magnetron Sputtering

A. N. Zakharov, A. A. Solov’ev, K. V. Oskomov, V. O. Oskirko, V. A. Semenov, M. S. Syrtanov, Yu S. Bordulev

Research output: Contribution to journalArticle

1 Citation (Scopus)

Abstract

Results of experiments on deposition of thin molybdenum films on glass substrates by high-power impulse magnetron sputtering are presented. Two high-current modes with different pulse frequencies and durations are used. Properties of the produced molybdenum films are compared with those of films produced by magnetron sputtering at a direct current. It is shown that this method allows the resistivity of molybdenum films to be decreased and their reflectance in the visible range to be increased.

Original languageEnglish
Pages (from-to)1336-1340
Number of pages5
JournalRussian Physics Journal
Volume60
Issue number8
DOIs
Publication statusPublished - 1 Dec 2017

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molybdenum
impulses
magnetron sputtering
high current
direct current
reflectance
electrical resistivity
glass
pulses

Keywords

  • adhesion
  • magnetron discharge
  • resistivity
  • thin molybdenum films

ASJC Scopus subject areas

  • Physics and Astronomy(all)

Cite this

Properties of Molybdenum Films Produced by High-Power Impulse Magnetron Sputtering. / Zakharov, A. N.; Solov’ev, A. A.; Oskomov, K. V.; Oskirko, V. O.; Semenov, V. A.; Syrtanov, M. S.; Bordulev, Yu S.

In: Russian Physics Journal, Vol. 60, No. 8, 01.12.2017, p. 1336-1340.

Research output: Contribution to journalArticle

Zakharov, A. N. ; Solov’ev, A. A. ; Oskomov, K. V. ; Oskirko, V. O. ; Semenov, V. A. ; Syrtanov, M. S. ; Bordulev, Yu S. / Properties of Molybdenum Films Produced by High-Power Impulse Magnetron Sputtering. In: Russian Physics Journal. 2017 ; Vol. 60, No. 8. pp. 1336-1340.
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