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Dive into the research topics of 'Progress in low energy high intensity ion implantation method development'. Together they form a unique fingerprint.
Physics & Astronomy
ion implantation
ions
ion beams
ion extraction
current density
microstructure
energy
research and development
beam currents
metals
submerging
ion currents
micrometers
implantation
fluence
titanium
penetration
nitrogen
aluminum
irradiation
electric potential
gases
temperature
Chemical Compounds
Ion implantation
Ions
Doping (additives)
Current density
Metals
Ion beams
Microstructure
Aluminum
Titanium
Irradiation
Nitrogen
Plasmas
Semiconductor materials
Gases
Materials properties
Direction compound
Chemical analysis
Electric potential
Engineering & Materials Science
Ion implantation
Ions
Doping (additives)
Current density
Ion beams
Microstructure
Metals
Irradiation
Titanium
Nitrogen
Plasmas
Semiconductor materials
Materials properties
Aluminum
Chemical analysis
Gases
Electric potential