Processes of material surface modification under combined treatment by pulsed ion beams of different power and plasma flows

A. Petrov, A. Ryabchikov, I. Stepanov, V. Struts, V. Tolmacheva, Yury Petrovich Usov, I. Shulepov

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Abstract

The investigations results are presented for some processes occurring at different stages of strong adhesion coatings and modified layers creation with the use of high-dose implantation and deep diffusive doping of elements under pulsed energetic impact. The investigations have been carried out on the installation providing the possibility of combined materials treatment with pulsed ion beams of power density ranged from 10 3 to 10 8 W/cm 2. The facility includes the accelerator of high-power ion beams and the sources of repetitively-pulsed metal ion beams and metal plasma flows.

Original languageEnglish
Title of host publication2000 13th International Conference on High-Power Particle Beams, BEAMS 2000
Pages98-101
Number of pages4
Publication statusPublished - 2000
Event2000 13th International Conference on High-Power Particle Beams, BEAMS 2000 - Nagaoka, Japan
Duration: 25 Jun 200030 Jun 2000

Other

Other2000 13th International Conference on High-Power Particle Beams, BEAMS 2000
CountryJapan
CityNagaoka
Period25.6.0030.6.00

Keywords

  • ion beams
  • materials processing
  • strong adhesion coatings

ASJC Scopus subject areas

  • Nuclear and High Energy Physics

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  • Cite this

    Petrov, A., Ryabchikov, A., Stepanov, I., Struts, V., Tolmacheva, V., Usov, YP., & Shulepov, I. (2000). Processes of material surface modification under combined treatment by pulsed ion beams of different power and plasma flows. In 2000 13th International Conference on High-Power Particle Beams, BEAMS 2000 (pp. 98-101). [6220124]