Process stabilization during reactive high power impulse magnetron sputtering of Ce/Gd target

S. V. Rabotkin, V. O. Oskirko, I. V. Ionov, V. A. Semenov, A. V. Shipilova, A. A. Solovyev

    Research output: Contribution to journalConference articlepeer-review

    2 Citations (Scopus)

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    Physics & Astronomy