Process of formation of spheroidal gold particles and of nanophases in AlN-TiB2-TiSi2 coatings after annealing with subsequent implantation

Abstract

This paper presents new results on investigation of the influence of Au- negative ion beam implantation and thermal annealing at 900°C and 1300°C on the structure and characteristics of AlN-TiB₂-TiSi₂ coatings prepared by magnetron sputtering. Using a scanning electron microscope (SEM) with microanalysis (EDS), X-ray diffraction (XRD), high-resolution transmission electron microscopy (HRTEM), the crystal structure, surface topography, and the microstructure were characterized.

Original language	English
Pages (from-to)	189-200
Number of pages	12
Journal	High Temperature Material Processes
Volume	19
Issue number	2
DOIs	https://doi.org/10.1615/HighTempMatProc.2016016017
Publication status	Published - 1 Jan 2015
Externally published	Yes

Keywords

Annealing
Implantation
Magnetron sputtering

ASJC Scopus subject areas

Materials Science(all)
Condensed Matter Physics
Energy Engineering and Power Technology
Engineering(all)
Spectroscopy
Physical and Theoretical Chemistry

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10.1615/HighTempMatProc.2016016017

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Demianenko, A., Smyrnova, K., Zhollybekov, B., Kupchishin, A., Takeda, Y., Amekura, H., Komsta, H., Opielak, M., & Kierczynski, K. (2015). Process of formation of spheroidal gold particles and of nanophases in AlN-TiB₂-TiSi₂ coatings after annealing with subsequent implantation. High Temperature Material Processes, 19(2), 189-200. https://doi.org/10.1615/HighTempMatProc.2016016017

Process of formation of spheroidal gold particles and of nanophases in AlN-TiB₂-TiSi₂ coatings after annealing with subsequent implantation. / Demianenko, Artem; Smyrnova, Katerina; Zhollybekov, Bahyt; Kupchishin, Anatoliy; Takeda, Yoshihiko; Amekura, Hiroshi; Komsta, Henryk; Opielak, Marek; Kierczynski, Konrad.

In: High Temperature Material Processes, Vol. 19, No. 2, 01.01.2015, p. 189-200.

Research output: Contribution to journal › Article › peer-review

Demianenko, A, Smyrnova, K, Zhollybekov, B, Kupchishin, A, Takeda, Y, Amekura, H, Komsta, H, Opielak, M & Kierczynski, K 2015, 'Process of formation of spheroidal gold particles and of nanophases in AlN-TiB₂-TiSi₂ coatings after annealing with subsequent implantation', High Temperature Material Processes, vol. 19, no. 2, pp. 189-200. https://doi.org/10.1615/HighTempMatProc.2016016017

Demianenko, Artem ; Smyrnova, Katerina ; Zhollybekov, Bahyt ; Kupchishin, Anatoliy ; Takeda, Yoshihiko ; Amekura, Hiroshi ; Komsta, Henryk ; Opielak, Marek ; Kierczynski, Konrad. / Process of formation of spheroidal gold particles and of nanophases in AlN-TiB₂-TiSi₂ coatings after annealing with subsequent implantation. In: High Temperature Material Processes. 2015 ; Vol. 19, No. 2. pp. 189-200.

@article{04969af589db411eaaf141c3ecf1be56,

title = "Process of formation of spheroidal gold particles and of nanophases in AlN-TiB2-TiSi2 coatings after annealing with subsequent implantation",

abstract = "This paper presents new results on investigation of the influence of Au- negative ion beam implantation and thermal annealing at 900°C and 1300°C on the structure and characteristics of AlN-TiB2-TiSi2 coatings prepared by magnetron sputtering. Using a scanning electron microscope (SEM) with microanalysis (EDS), X-ray diffraction (XRD), high-resolution transmission electron microscopy (HRTEM), the crystal structure, surface topography, and the microstructure were characterized.",

keywords = "Annealing, Implantation, Magnetron sputtering",

author = "Artem Demianenko and Katerina Smyrnova and Bahyt Zhollybekov and Anatoliy Kupchishin and Yoshihiko Takeda and Hiroshi Amekura and Henryk Komsta and Marek Opielak and Konrad Kierczynski",

year = "2015",

month = jan,

day = "1",

doi = "10.1615/HighTempMatProc.2016016017",

language = "English",

volume = "19",

pages = "189--200",

journal = "High Temperature Materials and Processes",

issn = "1093-3611",

publisher = "Begell House Inc.",

number = "2",

}

TY - JOUR

T1 - Process of formation of spheroidal gold particles and of nanophases in AlN-TiB2-TiSi2 coatings after annealing with subsequent implantation

AU - Demianenko, Artem

AU - Smyrnova, Katerina

AU - Zhollybekov, Bahyt

AU - Kupchishin, Anatoliy

AU - Takeda, Yoshihiko

AU - Amekura, Hiroshi

AU - Komsta, Henryk

AU - Opielak, Marek

AU - Kierczynski, Konrad

PY - 2015/1/1

Y1 - 2015/1/1

N2 - This paper presents new results on investigation of the influence of Au- negative ion beam implantation and thermal annealing at 900°C and 1300°C on the structure and characteristics of AlN-TiB2-TiSi2 coatings prepared by magnetron sputtering. Using a scanning electron microscope (SEM) with microanalysis (EDS), X-ray diffraction (XRD), high-resolution transmission electron microscopy (HRTEM), the crystal structure, surface topography, and the microstructure were characterized.

AB - This paper presents new results on investigation of the influence of Au- negative ion beam implantation and thermal annealing at 900°C and 1300°C on the structure and characteristics of AlN-TiB2-TiSi2 coatings prepared by magnetron sputtering. Using a scanning electron microscope (SEM) with microanalysis (EDS), X-ray diffraction (XRD), high-resolution transmission electron microscopy (HRTEM), the crystal structure, surface topography, and the microstructure were characterized.

KW - Annealing

KW - Implantation

KW - Magnetron sputtering

UR - http://www.scopus.com/inward/record.url?scp=84963631549&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=84963631549&partnerID=8YFLogxK

U2 - 10.1615/HighTempMatProc.2016016017

DO - 10.1615/HighTempMatProc.2016016017

M3 - Article

AN - SCOPUS:84963631549

VL - 19

SP - 189

EP - 200

JO - High Temperature Materials and Processes

JF - High Temperature Materials and Processes

SN - 1093-3611

IS - 2

ER -

Process of formation of spheroidal gold particles and of nanophases in AlN-TiB₂-TiSi₂ coatings after annealing with subsequent implantation

Abstract

Keywords

ASJC Scopus subject areas

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Fingerprint Dive into the research topics of 'Process of formation of spheroidal gold particles and of nanophases in AlN-TiB<sub>2</sub>-TiSi<sub>2</sub> coatings after annealing with subsequent implantation'. Together they form a unique fingerprint.

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