Process of formation of spheroidal gold particles and of nanophases in AlN-TiB2-TiSi2 coatings after annealing with subsequent implantation

Artem Demianenko, Katerina Smyrnova, Bahyt Zhollybekov, Anatoliy Kupchishin, Yoshihiko Takeda, Hiroshi Amekura, Henryk Komsta, Marek Opielak, Konrad Kierczynski

Research output: Contribution to journalArticle

10 Citations (Scopus)

Abstract

This paper presents new results on investigation of the influence of Au- negative ion beam implantation and thermal annealing at 900°C and 1300°C on the structure and characteristics of AlN-TiB2-TiSi2 coatings prepared by magnetron sputtering. Using a scanning electron microscope (SEM) with microanalysis (EDS), X-ray diffraction (XRD), high-resolution transmission electron microscopy (HRTEM), the crystal structure, surface topography, and the microstructure were characterized.

Original languageEnglish
Pages (from-to)189-200
Number of pages12
JournalHigh Temperature Material Processes
Volume19
Issue number2
DOIs
Publication statusPublished - 1 Jan 2015
Externally publishedYes

Fingerprint

Microanalysis
Surface topography
High resolution transmission electron microscopy
microanalysis
Ion implantation
Gold
negative ions
Magnetron sputtering
Ion beams
Energy dispersive spectroscopy
implantation
magnetron sputtering
topography
Electron microscopes
Negative ions
electron microscopes
Crystal structure
ion beams
Annealing
gold

Keywords

  • Annealing
  • Implantation
  • Magnetron sputtering

ASJC Scopus subject areas

  • Materials Science(all)
  • Condensed Matter Physics
  • Energy Engineering and Power Technology
  • Engineering(all)
  • Spectroscopy
  • Physical and Theoretical Chemistry

Cite this

Process of formation of spheroidal gold particles and of nanophases in AlN-TiB2-TiSi2 coatings after annealing with subsequent implantation. / Demianenko, Artem; Smyrnova, Katerina; Zhollybekov, Bahyt; Kupchishin, Anatoliy; Takeda, Yoshihiko; Amekura, Hiroshi; Komsta, Henryk; Opielak, Marek; Kierczynski, Konrad.

In: High Temperature Material Processes, Vol. 19, No. 2, 01.01.2015, p. 189-200.

Research output: Contribution to journalArticle

Demianenko, Artem ; Smyrnova, Katerina ; Zhollybekov, Bahyt ; Kupchishin, Anatoliy ; Takeda, Yoshihiko ; Amekura, Hiroshi ; Komsta, Henryk ; Opielak, Marek ; Kierczynski, Konrad. / Process of formation of spheroidal gold particles and of nanophases in AlN-TiB2-TiSi2 coatings after annealing with subsequent implantation. In: High Temperature Material Processes. 2015 ; Vol. 19, No. 2. pp. 189-200.
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