Process of formation of spheroidal gold particles and of nanophases in AlN-TiB₂-TiSi₂ coatings after annealing with subsequent implantation

Artem Demianenko, Katerina Smyrnova, Bahyt Zhollybekov, Anatoliy Kupchishin, Yoshihiko Takeda, Hiroshi Amekura, Henryk Komsta, Marek Opielak, Konrad Kierczynski

Research output: Contribution to journal › Article

11 Citations (Scopus)

Abstract

This paper presents new results on investigation of the influence of Au- negative ion beam implantation and thermal annealing at 900°C and 1300°C on the structure and characteristics of AlN-TiB₂-TiSi₂ coatings prepared by magnetron sputtering. Using a scanning electron microscope (SEM) with microanalysis (EDS), X-ray diffraction (XRD), high-resolution transmission electron microscopy (HRTEM), the crystal structure, surface topography, and the microstructure were characterized.

Original language	English
Pages (from-to)	189-200
Number of pages	12
Journal	High Temperature Material Processes
Volume	19
Issue number	2
DOIs	https://doi.org/10.1615/HighTempMatProc.2016016017
Publication status	Published - 1 Jan 2015
Externally published	Yes

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Keywords

Annealing
Implantation
Magnetron sputtering

ASJC Scopus subject areas

Materials Science(all)
Condensed Matter Physics
Energy Engineering and Power Technology
Engineering(all)
Spectroscopy
Physical and Theoretical Chemistry

Cite this

Demianenko, A., Smyrnova, K., Zhollybekov, B., Kupchishin, A., Takeda, Y., Amekura, H., ... Kierczynski, K. (2015). Process of formation of spheroidal gold particles and of nanophases in AlN-TiB₂-TiSi₂ coatings after annealing with subsequent implantation. High Temperature Material Processes, 19(2), 189-200. https://doi.org/10.1615/HighTempMatProc.2016016017

Process of formation of spheroidal gold particles and of nanophases in AlN-TiB₂-TiSi₂ coatings after annealing with subsequent implantation. / Demianenko, Artem; Smyrnova, Katerina; Zhollybekov, Bahyt; Kupchishin, Anatoliy; Takeda, Yoshihiko; Amekura, Hiroshi; Komsta, Henryk; Opielak, Marek; Kierczynski, Konrad.

In: High Temperature Material Processes, Vol. 19, No. 2, 01.01.2015, p. 189-200.

Research output: Contribution to journal › Article

Demianenko, A, Smyrnova, K, Zhollybekov, B, Kupchishin, A, Takeda, Y, Amekura, H, Komsta, H, Opielak, M & Kierczynski, K 2015, 'Process of formation of spheroidal gold particles and of nanophases in AlN-TiB₂-TiSi₂ coatings after annealing with subsequent implantation', High Temperature Material Processes, vol. 19, no. 2, pp. 189-200. https://doi.org/10.1615/HighTempMatProc.2016016017

Demianenko, Artem ; Smyrnova, Katerina ; Zhollybekov, Bahyt ; Kupchishin, Anatoliy ; Takeda, Yoshihiko ; Amekura, Hiroshi ; Komsta, Henryk ; Opielak, Marek ; Kierczynski, Konrad. / Process of formation of spheroidal gold particles and of nanophases in AlN-TiB₂-TiSi₂ coatings after annealing with subsequent implantation. In: High Temperature Material Processes. 2015 ; Vol. 19, No. 2. pp. 189-200.

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10.1615/HighTempMatProc.2016016017