Process of formation of spheroidal gold particles and of nanophases in AlN-TiB2-TiSi2 coatings after annealing with subsequent implantation

Abstract

This paper presents new results on investigation of the influence of Au- negative ion beam implantation and thermal annealing at 900°C and 1300°C on the structure and characteristics of AlN-TiB₂-TiSi₂ coatings prepared by magnetron sputtering. Using a scanning electron microscope (SEM) with microanalysis (EDS), X-ray diffraction (XRD), high-resolution transmission electron microscopy (HRTEM), the crystal structure, surface topography, and the microstructure were characterized.

Original language	English
Pages (from-to)	189-200
Number of pages	12
Journal	High Temperature Material Processes
Volume	19
Issue number	2
DOIs	https://doi.org/10.1615/HighTempMatProc.2016016017
Publication status	Published - 1 Jan 2015
Externally published	Yes

Keywords

Annealing
Implantation
Magnetron sputtering

ASJC Scopus subject areas

Materials Science(all)
Condensed Matter Physics
Energy Engineering and Power Technology
Engineering(all)
Spectroscopy
Physical and Theoretical Chemistry

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10.1615/HighTempMatProc.2016016017

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Demianenko, A., Smyrnova, K., Zhollybekov, B., Kupchishin, A., Takeda, Y., Amekura, H., Komsta, H., Opielak, M., & Kierczynski, K. (2015). Process of formation of spheroidal gold particles and of nanophases in AlN-TiB₂-TiSi₂ coatings after annealing with subsequent implantation. High Temperature Material Processes, 19(2), 189-200. https://doi.org/10.1615/HighTempMatProc.2016016017

Process of formation of spheroidal gold particles and of nanophases in AlN-TiB₂-TiSi₂ coatings after annealing with subsequent implantation. / Demianenko, Artem; Smyrnova, Katerina; Zhollybekov, Bahyt; Kupchishin, Anatoliy; Takeda, Yoshihiko; Amekura, Hiroshi; Komsta, Henryk; Opielak, Marek; Kierczynski, Konrad.

In: High Temperature Material Processes, Vol. 19, No. 2, 01.01.2015, p. 189-200.

Research output: Contribution to journal › Article

Demianenko, A, Smyrnova, K, Zhollybekov, B, Kupchishin, A, Takeda, Y, Amekura, H, Komsta, H, Opielak, M & Kierczynski, K 2015, 'Process of formation of spheroidal gold particles and of nanophases in AlN-TiB₂-TiSi₂ coatings after annealing with subsequent implantation', High Temperature Material Processes, vol. 19, no. 2, pp. 189-200. https://doi.org/10.1615/HighTempMatProc.2016016017

Demianenko, Artem ; Smyrnova, Katerina ; Zhollybekov, Bahyt ; Kupchishin, Anatoliy ; Takeda, Yoshihiko ; Amekura, Hiroshi ; Komsta, Henryk ; Opielak, Marek ; Kierczynski, Konrad. / Process of formation of spheroidal gold particles and of nanophases in AlN-TiB₂-TiSi₂ coatings after annealing with subsequent implantation. In: High Temperature Material Processes. 2015 ; Vol. 19, No. 2. pp. 189-200.

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AU - Zhollybekov, Bahyt

AU - Kupchishin, Anatoliy

AU - Takeda, Yoshihiko

AU - Amekura, Hiroshi

AU - Komsta, Henryk

AU - Opielak, Marek

AU - Kierczynski, Konrad

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