Process of formation of spheroidal gold particles and of nanophases in AlN-TiB2-TiSi2 coatings after annealing with subsequent implantation

Artem Demianenko, Katerina Smyrnova, Bahyt Zhollybekov, Anatoliy Kupchishin, Yoshihiko Takeda, Hiroshi Amekura, Henryk Komsta, Marek Opielak, Konrad Kierczynski

Research output: Contribution to journalArticlepeer-review

11 Citations (Scopus)


This paper presents new results on investigation of the influence of Au- negative ion beam implantation and thermal annealing at 900°C and 1300°C on the structure and characteristics of AlN-TiB2-TiSi2 coatings prepared by magnetron sputtering. Using a scanning electron microscope (SEM) with microanalysis (EDS), X-ray diffraction (XRD), high-resolution transmission electron microscopy (HRTEM), the crystal structure, surface topography, and the microstructure were characterized.

Original languageEnglish
Pages (from-to)189-200
Number of pages12
JournalHigh Temperature Material Processes
Issue number2
Publication statusPublished - 1 Jan 2015
Externally publishedYes


  • Annealing
  • Implantation
  • Magnetron sputtering

ASJC Scopus subject areas

  • Materials Science(all)
  • Condensed Matter Physics
  • Energy Engineering and Power Technology
  • Engineering(all)
  • Spectroscopy
  • Physical and Theoretical Chemistry

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