Abstract
This paper presents new results on investigation of the influence of Au- negative ion beam implantation and thermal annealing at 900°C and 1300°C on the structure and characteristics of AlN-TiB2-TiSi2 coatings prepared by magnetron sputtering. Using a scanning electron microscope (SEM) with microanalysis (EDS), X-ray diffraction (XRD), high-resolution transmission electron microscopy (HRTEM), the crystal structure, surface topography, and the microstructure were characterized.
| Original language | English |
|---|---|
| Pages (from-to) | 189-200 |
| Number of pages | 12 |
| Journal | High Temperature Material Processes |
| Volume | 19 |
| Issue number | 2 |
| DOIs | |
| Publication status | Published - 1 Jan 2015 |
| Externally published | Yes |
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Keywords
- Annealing
- Implantation
- Magnetron sputtering
ASJC Scopus subject areas
- Materials Science(all)
- Condensed Matter Physics
- Energy Engineering and Power Technology
- Engineering(all)
- Spectroscopy
- Physical and Theoretical Chemistry
Cite this
Process of formation of spheroidal gold particles and of nanophases in AlN-TiB2-TiSi2 coatings after annealing with subsequent implantation. / Demianenko, Artem; Smyrnova, Katerina; Zhollybekov, Bahyt; Kupchishin, Anatoliy; Takeda, Yoshihiko; Amekura, Hiroshi; Komsta, Henryk; Opielak, Marek; Kierczynski, Konrad.
In: High Temperature Material Processes, Vol. 19, No. 2, 01.01.2015, p. 189-200.Research output: Contribution to journal › Article
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TY - JOUR
T1 - Process of formation of spheroidal gold particles and of nanophases in AlN-TiB2-TiSi2 coatings after annealing with subsequent implantation
AU - Demianenko, Artem
AU - Smyrnova, Katerina
AU - Zhollybekov, Bahyt
AU - Kupchishin, Anatoliy
AU - Takeda, Yoshihiko
AU - Amekura, Hiroshi
AU - Komsta, Henryk
AU - Opielak, Marek
AU - Kierczynski, Konrad
PY - 2015/1/1
Y1 - 2015/1/1
N2 - This paper presents new results on investigation of the influence of Au- negative ion beam implantation and thermal annealing at 900°C and 1300°C on the structure and characteristics of AlN-TiB2-TiSi2 coatings prepared by magnetron sputtering. Using a scanning electron microscope (SEM) with microanalysis (EDS), X-ray diffraction (XRD), high-resolution transmission electron microscopy (HRTEM), the crystal structure, surface topography, and the microstructure were characterized.
AB - This paper presents new results on investigation of the influence of Au- negative ion beam implantation and thermal annealing at 900°C and 1300°C on the structure and characteristics of AlN-TiB2-TiSi2 coatings prepared by magnetron sputtering. Using a scanning electron microscope (SEM) with microanalysis (EDS), X-ray diffraction (XRD), high-resolution transmission electron microscopy (HRTEM), the crystal structure, surface topography, and the microstructure were characterized.
KW - Annealing
KW - Implantation
KW - Magnetron sputtering
UR - http://www.scopus.com/inward/record.url?scp=84963631549&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=84963631549&partnerID=8YFLogxK
U2 - 10.1615/HighTempMatProc.2016016017
DO - 10.1615/HighTempMatProc.2016016017
M3 - Article
AN - SCOPUS:84963631549
VL - 19
SP - 189
EP - 200
JO - High Temperature Materials and Processes
JF - High Temperature Materials and Processes
SN - 1093-3611
IS - 2
ER -