Preparation of rib channel waveguides on polymer in electric field

Oleksiy Lyutakov, Jiří Tuma, Václav Prajzler, Ivan Huttel, Vladimír Hnatowicz, Václav Švorčík

Research output: Contribution to journalArticlepeer-review

19 Citations (Scopus)


Micro-sized patterns were created on oligomer (Su-8) films by the effect of external electric field, perpendicular to the film surface. Structures with varying parameters were prepared and the growth of continuous or dot-like structures was observed. The mechanism dominating the structure growth was examined and found to be a function of experimental conditions. The dependence of the form and the size of the created patterns on the intensity of the electric field, exposure time and initial distance between mask and polymer surface was investigated. Waveguiding properties of the linear pattern, produced by the above technique, were examined and the following parameters were obtained: propagation loss - 2-3 dB/cm, effective refractive index - 1.6276, number of supported modes - 30).

Original languageEnglish
Pages (from-to)1452-1457
Number of pages6
JournalThin Solid Films
Issue number4
Publication statusPublished - 1 Dec 2010
Externally publishedYes


  • Electric field
  • Epoxy novolak resin
  • Optical properties
  • Pattern formation
  • Spin-coated films
  • Waveguide

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Materials Chemistry

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