Abstract
The anode layer of the magnetron discharge plasma is considered within the framework of a hydrodynamic approximation with the electron mobility and collision frequency assumed to be constant. A rigorous solution of the system of equations has been obtained. The solutions of this problem known so far have been shown to be particular cases of the one found in this work. The range of applicability of the anode layer model to the calculation of the main parameters of dc magnetron sputtering systems is discussed.
| Original language | English |
|---|---|
| Pages (from-to) | 1066-1074 |
| Number of pages | 9 |
| Journal | Russian Physics Journal |
| Volume | 45 |
| Issue number | 11 |
| DOIs | |
| Publication status | Published - 1 Jan 2002 |
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ASJC Scopus subject areas
- Physics and Astronomy(all)
Cite this
Plasma physics model of the anode layer of a magnetron discharge. / Rytchkov, D. S.; Krivobokov, V. P.; Marakassov, D. A.
In: Russian Physics Journal, Vol. 45, No. 11, 01.01.2002, p. 1066-1074.Research output: Contribution to journal › Article
}
TY - JOUR
T1 - Plasma physics model of the anode layer of a magnetron discharge
AU - Rytchkov, D. S.
AU - Krivobokov, V. P.
AU - Marakassov, D. A.
PY - 2002/1/1
Y1 - 2002/1/1
N2 - The anode layer of the magnetron discharge plasma is considered within the framework of a hydrodynamic approximation with the electron mobility and collision frequency assumed to be constant. A rigorous solution of the system of equations has been obtained. The solutions of this problem known so far have been shown to be particular cases of the one found in this work. The range of applicability of the anode layer model to the calculation of the main parameters of dc magnetron sputtering systems is discussed.
AB - The anode layer of the magnetron discharge plasma is considered within the framework of a hydrodynamic approximation with the electron mobility and collision frequency assumed to be constant. A rigorous solution of the system of equations has been obtained. The solutions of this problem known so far have been shown to be particular cases of the one found in this work. The range of applicability of the anode layer model to the calculation of the main parameters of dc magnetron sputtering systems is discussed.
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UR - http://www.scopus.com/inward/citedby.url?scp=52649154640&partnerID=8YFLogxK
U2 - 10.1023/A:1023391406689
DO - 10.1023/A:1023391406689
M3 - Article
VL - 45
SP - 1066
EP - 1074
JO - Russian Physics Journal
JF - Russian Physics Journal
SN - 1064-8887
IS - 11
ER -