Plasma physics model of the anode layer of a magnetron discharge

Abstract

The anode layer of the magnetron discharge plasma is considered within the framework of a hydrodynamic approximation with the electron mobility and collision frequency assumed to be constant. A rigorous solution of the system of equations has been obtained. The solutions of this problem known so far have been shown to be particular cases of the one found in this work. The range of applicability of the anode layer model to the calculation of the main parameters of dc magnetron sputtering systems is discussed.

Original language	English
Pages (from-to)	1066-1074
Number of pages	9
Journal	Russian Physics Journal
Volume	45
Issue number	11
DOIs	https://doi.org/10.1023/A:1023391406689
Publication status	Published - 1 Jan 2002

ASJC Scopus subject areas

Physics and Astronomy(all)

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abstract = "The anode layer of the magnetron discharge plasma is considered within the framework of a hydrodynamic approximation with the electron mobility and collision frequency assumed to be constant. A rigorous solution of the system of equations has been obtained. The solutions of this problem known so far have been shown to be particular cases of the one found in this work. The range of applicability of the anode layer model to the calculation of the main parameters of dc magnetron sputtering systems is discussed.",

author = "Rytchkov, {D. S.} and Krivobokov, {V. P.} and Marakassov, {D. A.}",

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Plasma physics model of the anode layer of a magnetron discharge

Abstract

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