Plasma physics model of the anode layer of a magnetron discharge

D. S. Rytchkov, V. P. Krivobokov, D. A. Marakassov

Research output: Contribution to journalArticle

Abstract

The anode layer of the magnetron discharge plasma is considered within the framework of a hydrodynamic approximation with the electron mobility and collision frequency assumed to be constant. A rigorous solution of the system of equations has been obtained. The solutions of this problem known so far have been shown to be particular cases of the one found in this work. The range of applicability of the anode layer model to the calculation of the main parameters of dc magnetron sputtering systems is discussed.

Original languageEnglish
Pages (from-to)1066-1074
Number of pages9
JournalRussian Physics Journal
Volume45
Issue number11
DOIs
Publication statusPublished - 1 Jan 2002

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plasma physics
anodes
electron mobility
plasma jets
magnetron sputtering
electron scattering
hydrodynamics
approximation

ASJC Scopus subject areas

  • Physics and Astronomy(all)

Cite this

Plasma physics model of the anode layer of a magnetron discharge. / Rytchkov, D. S.; Krivobokov, V. P.; Marakassov, D. A.

In: Russian Physics Journal, Vol. 45, No. 11, 01.01.2002, p. 1066-1074.

Research output: Contribution to journalArticle

Rytchkov, D. S. ; Krivobokov, V. P. ; Marakassov, D. A. / Plasma physics model of the anode layer of a magnetron discharge. In: Russian Physics Journal. 2002 ; Vol. 45, No. 11. pp. 1066-1074.
@article{719fd1d76ca24780b37c9bca10798578,
title = "Plasma physics model of the anode layer of a magnetron discharge",
abstract = "The anode layer of the magnetron discharge plasma is considered within the framework of a hydrodynamic approximation with the electron mobility and collision frequency assumed to be constant. A rigorous solution of the system of equations has been obtained. The solutions of this problem known so far have been shown to be particular cases of the one found in this work. The range of applicability of the anode layer model to the calculation of the main parameters of dc magnetron sputtering systems is discussed.",
author = "Rytchkov, {D. S.} and Krivobokov, {V. P.} and Marakassov, {D. A.}",
year = "2002",
month = "1",
day = "1",
doi = "10.1023/A:1023391406689",
language = "English",
volume = "45",
pages = "1066--1074",
journal = "Russian Physics Journal",
issn = "1064-8887",
publisher = "Consultants Bureau",
number = "11",

}

TY - JOUR

T1 - Plasma physics model of the anode layer of a magnetron discharge

AU - Rytchkov, D. S.

AU - Krivobokov, V. P.

AU - Marakassov, D. A.

PY - 2002/1/1

Y1 - 2002/1/1

N2 - The anode layer of the magnetron discharge plasma is considered within the framework of a hydrodynamic approximation with the electron mobility and collision frequency assumed to be constant. A rigorous solution of the system of equations has been obtained. The solutions of this problem known so far have been shown to be particular cases of the one found in this work. The range of applicability of the anode layer model to the calculation of the main parameters of dc magnetron sputtering systems is discussed.

AB - The anode layer of the magnetron discharge plasma is considered within the framework of a hydrodynamic approximation with the electron mobility and collision frequency assumed to be constant. A rigorous solution of the system of equations has been obtained. The solutions of this problem known so far have been shown to be particular cases of the one found in this work. The range of applicability of the anode layer model to the calculation of the main parameters of dc magnetron sputtering systems is discussed.

UR - http://www.scopus.com/inward/record.url?scp=52649154640&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=52649154640&partnerID=8YFLogxK

U2 - 10.1023/A:1023391406689

DO - 10.1023/A:1023391406689

M3 - Article

VL - 45

SP - 1066

EP - 1074

JO - Russian Physics Journal

JF - Russian Physics Journal

SN - 1064-8887

IS - 11

ER -