Plasma physics model of the anode layer of a magnetron discharge

D. S. Rytchkov, V. P. Krivobokov, D. A. Marakassov

Research output: Contribution to journalArticle

Abstract

The anode layer of the magnetron discharge plasma is considered within the framework of a hydrodynamic approximation with the electron mobility and collision frequency assumed to be constant. A rigorous solution of the system of equations has been obtained. The solutions of this problem known so far have been shown to be particular cases of the one found in this work. The range of applicability of the anode layer model to the calculation of the main parameters of dc magnetron sputtering systems is discussed.

Original languageEnglish
Pages (from-to)1066-1074
Number of pages9
JournalRussian Physics Journal
Volume45
Issue number11
DOIs
Publication statusPublished - 1 Jan 2002

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ASJC Scopus subject areas

  • Physics and Astronomy(all)

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