Plasma immersion ion charge state and mass spectrometer

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11 Citations (Scopus)

Abstract

Investigation results of charge state of monocomponent plasma of Ti, Zr, W, and N, as well as that of multicomponent metal plasma of Ti/Zr (50/50 at.%) using plasma-immersion time-of-flight spectrometer are presented in the paper. The case of pressure impact in the working chamber on the ion charge state of combined metal (Ti) and gas-discharge (N) plasma is considered.

Original languageEnglish
Article number4852219
JournalReview of Scientific Instruments
Volume85
Issue number2
DOIs
Publication statusPublished - Feb 2014

ASJC Scopus subject areas

  • Instrumentation

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