Abstract

Investigation results of charge state of monocomponent plasma of Ti, Zr, W, and N, as well as that of multicomponent metal plasma of Ti/Zr (50/50 at.%) using plasma-immersion time-of-flight spectrometer are presented in the paper. The case of pressure impact in the working chamber on the ion charge state of combined metal (Ti) and gas-discharge (N) plasma is considered.

Original languageEnglish
Article number4852219
JournalReview of Scientific Instruments
Volume85
Issue number2
DOIs
Publication statusPublished - Feb 2014

Fingerprint

ion charge
Mass spectrometers
submerging
mass spectrometers
spectrometers
Plasmas
Ions
impact loads
time of flight spectrometers
gas discharges
Metals
Discharge (fluid mechanics)
metals
Spectrometers
chambers
Gases

ASJC Scopus subject areas

  • Instrumentation

Cite this

@article{79a5c73466494bc4becdc1bcac86d135,
title = "Plasma immersion ion charge state and mass spectrometer",
abstract = "Investigation results of charge state of monocomponent plasma of Ti, Zr, W, and N, as well as that of multicomponent metal plasma of Ti/Zr (50/50 at.{\%}) using plasma-immersion time-of-flight spectrometer are presented in the paper. The case of pressure impact in the working chamber on the ion charge state of combined metal (Ti) and gas-discharge (N) plasma is considered.",
author = "Stepanov, {Igor B.} and Ryabchikov, {Alexander I.} and Peter Semenovich Anan'in and Dektyarev, {Sergej V.} and Sivin, {Denis Olegovich} and Verigin, {Dan A.}",
year = "2014",
month = "2",
doi = "10.1063/1.4852219",
language = "English",
volume = "85",
journal = "Review of Scientific Instruments",
issn = "0034-6748",
publisher = "American Institute of Physics Publising LLC",
number = "2",

}

TY - JOUR

T1 - Plasma immersion ion charge state and mass spectrometer

AU - Stepanov, Igor B.

AU - Ryabchikov, Alexander I.

AU - Anan'in, Peter Semenovich

AU - Dektyarev, Sergej V.

AU - Sivin, Denis Olegovich

AU - Verigin, Dan A.

PY - 2014/2

Y1 - 2014/2

N2 - Investigation results of charge state of monocomponent plasma of Ti, Zr, W, and N, as well as that of multicomponent metal plasma of Ti/Zr (50/50 at.%) using plasma-immersion time-of-flight spectrometer are presented in the paper. The case of pressure impact in the working chamber on the ion charge state of combined metal (Ti) and gas-discharge (N) plasma is considered.

AB - Investigation results of charge state of monocomponent plasma of Ti, Zr, W, and N, as well as that of multicomponent metal plasma of Ti/Zr (50/50 at.%) using plasma-immersion time-of-flight spectrometer are presented in the paper. The case of pressure impact in the working chamber on the ion charge state of combined metal (Ti) and gas-discharge (N) plasma is considered.

UR - http://www.scopus.com/inward/record.url?scp=84893129118&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=84893129118&partnerID=8YFLogxK

U2 - 10.1063/1.4852219

DO - 10.1063/1.4852219

M3 - Article

VL - 85

JO - Review of Scientific Instruments

JF - Review of Scientific Instruments

SN - 0034-6748

IS - 2

M1 - 4852219

ER -