Plasma-immersion formation of high-intensity gaseous ion beams

Research output: Contribution to journalArticle

Abstract

The symbiosis of plasma-immersion extraction of ions and their subsequent ballistic focusing in the hemisphere geometry of the focusing system was used to form a high intensity nitrogen, argon, and hydrogen ion beams. The gas-discharge plasma was formed using a hot-cathode-arc discharge source. The regularities of the formation of high-intensity ion beams of various gases from according to the pressures of the working gases, the plasma density depending dependence on the bias potential amplitudes in the range of 0.9–2.4 kV, frequencies in the range of 10–100 kHz and pulse durations in the range of 2–80 μs were investigated. The possibility of the stable forming of axially symmetric gas ion beams with a current density of up to hundreds of mA/cm 2 was shown. Nitrogen ion beams with a maximum current density of 0.7 A/cm 2 at the ion current of 0.6 A were obtained. Studies at nitrogen pressures in the range of 0.3–1.8 Pa revealed that a decrease in the gas pressure during the generation of a gas-discharge plasma caused a significant increase in the ion current amplitude at the collector.

Original languageEnglish
Pages (from-to)127-133
Number of pages7
JournalVacuum
Volume165
DOIs
Publication statusPublished - 1 Jul 2019

Fingerprint

Ion beams
submerging
ion beams
Plasma Gases
Plasmas
Nitrogen
nitrogen ions
Gases
gas discharges
Ions
ion currents
Current density
symbiosis
gases
current density
hot cathodes
Discharge (fluid mechanics)
Argon
Plasma density
arc discharges

Keywords

  • Ballistic focusing
  • Plasma ions acceleration
  • Plasma-immersion extraction
  • Repetitively pulsed high-intensity beam of gas ions

ASJC Scopus subject areas

  • Instrumentation
  • Condensed Matter Physics
  • Surfaces, Coatings and Films

Cite this

Plasma-immersion formation of high-intensity gaseous ion beams. / Ryabchikov, A. I.; Sivin, D. O.; Korneva, O. S.; Ananyin, P. S.; Ivanova, A. I.; Stepanov, I. B.

In: Vacuum, Vol. 165, 01.07.2019, p. 127-133.

Research output: Contribution to journalArticle

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