Plasma electron source for the generation of wide-aperture pulsed beam at forevacuum pressures

E. Oks, V. Burdovitsin, A. Medovnik, Yu Yushkov

Research output: Contribution to journalArticle

8 Citations (Scopus)

Abstract

This article reports on design and application of wide-aperture pulsed beam source, based on hollow cathode discharge. The source is intended for electron beam generation in pressure range 2-15 Pa. Multi-aperture extraction system, used in a source, provided beam cross-section uniformity of 10% on diameter 40 mm. The limiting values of the current density, pulse duration, and accelerating voltage are 350 mA/cm2, 250 μs, and 10 kV, respectively. These parameters are sufficient for surface modification of various materials, including non-conducting matters.

Original languageEnglish
Article number023301
JournalReview of Scientific Instruments
Volume84
Issue number2
DOIs
Publication statusPublished - Feb 2013

Fingerprint

Electron sources
electron sources
Surface treatment
Electron beams
Cathodes
Current density
apertures
Plasmas
Electric potential
hollow cathodes
pulse duration
electron beams
current density
cross sections
electric potential

ASJC Scopus subject areas

  • Instrumentation

Cite this

Plasma electron source for the generation of wide-aperture pulsed beam at forevacuum pressures. / Oks, E.; Burdovitsin, V.; Medovnik, A.; Yushkov, Yu.

In: Review of Scientific Instruments, Vol. 84, No. 2, 023301, 02.2013.

Research output: Contribution to journalArticle

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