Plasma electron source for the generation of wide-aperture pulsed beam at forevacuum pressures

E. Oks, V. Burdovitsin, A. Medovnik, Yu Yushkov

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10 Citations (Scopus)


This article reports on design and application of wide-aperture pulsed beam source, based on hollow cathode discharge. The source is intended for electron beam generation in pressure range 2-15 Pa. Multi-aperture extraction system, used in a source, provided beam cross-section uniformity of 10% on diameter 40 mm. The limiting values of the current density, pulse duration, and accelerating voltage are 350 mA/cm2, 250 μs, and 10 kV, respectively. These parameters are sufficient for surface modification of various materials, including non-conducting matters.

Original languageEnglish
Article number023301
JournalReview of Scientific Instruments
Issue number2
Publication statusPublished - Feb 2013


ASJC Scopus subject areas

  • Instrumentation

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