Abstract
The distribution and form of the discharge in dual magnetron (DM) depends not only on the polarity of magnets used in both magnetrons but also on the distribution of magnetic field lines. For tilted DM, a naturally created gradient of magnetic field generates a drift of plasma that results in a deflection of the discharge from the plane of symmetry. This deflection of the discharge was observed experimentally. Performed experiments are in a good agreement with the theoretical prediction.
| Original language | English |
|---|---|
| Pages (from-to) | 1412-1413 |
| Number of pages | 2 |
| Journal | IEEE Transactions on Plasma Science |
| Volume | 36 |
| Issue number | 4 PART 1 |
| DOIs | |
| Publication status | Published - 1 Aug 2008 |
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Keywords
- Dual magnetron (DM)
- Magnetic field
- Plasma discharge
- Plasma drift
ASJC Scopus subject areas
- Nuclear and High Energy Physics
- Condensed Matter Physics
Cite this
Plasma drift in dual magnetron discharge. / Baroch, Pavel; Musil, Jindrich.
In: IEEE Transactions on Plasma Science, Vol. 36, No. 4 PART 1, 01.08.2008, p. 1412-1413.Research output: Contribution to journal › Article
}
TY - JOUR
T1 - Plasma drift in dual magnetron discharge
AU - Baroch, Pavel
AU - Musil, Jindrich
PY - 2008/8/1
Y1 - 2008/8/1
N2 - The distribution and form of the discharge in dual magnetron (DM) depends not only on the polarity of magnets used in both magnetrons but also on the distribution of magnetic field lines. For tilted DM, a naturally created gradient of magnetic field generates a drift of plasma that results in a deflection of the discharge from the plane of symmetry. This deflection of the discharge was observed experimentally. Performed experiments are in a good agreement with the theoretical prediction.
AB - The distribution and form of the discharge in dual magnetron (DM) depends not only on the polarity of magnets used in both magnetrons but also on the distribution of magnetic field lines. For tilted DM, a naturally created gradient of magnetic field generates a drift of plasma that results in a deflection of the discharge from the plane of symmetry. This deflection of the discharge was observed experimentally. Performed experiments are in a good agreement with the theoretical prediction.
KW - Dual magnetron (DM)
KW - Magnetic field
KW - Plasma discharge
KW - Plasma drift
UR - http://www.scopus.com/inward/record.url?scp=50249095764&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=50249095764&partnerID=8YFLogxK
U2 - 10.1109/TPS.2008.924483
DO - 10.1109/TPS.2008.924483
M3 - Article
VL - 36
SP - 1412
EP - 1413
JO - IEEE Transactions on Plasma Science
JF - IEEE Transactions on Plasma Science
SN - 0093-3813
IS - 4 PART 1
ER -