Plasma drift in dual magnetron discharge

Pavel Baroch, Jindrich Musil

Research output: Contribution to journalArticle

13 Citations (Scopus)

Abstract

The distribution and form of the discharge in dual magnetron (DM) depends not only on the polarity of magnets used in both magnetrons but also on the distribution of magnetic field lines. For tilted DM, a naturally created gradient of magnetic field generates a drift of plasma that results in a deflection of the discharge from the plane of symmetry. This deflection of the discharge was observed experimentally. Performed experiments are in a good agreement with the theoretical prediction.

Original languageEnglish
Pages (from-to)1412-1413
Number of pages2
JournalIEEE Transactions on Plasma Science
Volume36
Issue number4 PART 1
DOIs
Publication statusPublished - 1 Aug 2008

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Keywords

  • Dual magnetron (DM)
  • Magnetic field
  • Plasma discharge
  • Plasma drift

ASJC Scopus subject areas

  • Nuclear and High Energy Physics
  • Condensed Matter Physics

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