Abstract
The distribution and form of the discharge in dual magnetron (DM) depends not only on the polarity of magnets used in both magnetrons but also on the distribution of magnetic field lines. For tilted DM, a naturally created gradient of magnetic field generates a drift of plasma that results in a deflection of the discharge from the plane of symmetry. This deflection of the discharge was observed experimentally. Performed experiments are in a good agreement with the theoretical prediction.
| Original language | English |
|---|---|
| Pages (from-to) | 1412-1413 |
| Number of pages | 2 |
| Journal | IEEE Transactions on Plasma Science |
| Volume | 36 |
| Issue number | 4 PART 1 |
| DOIs | |
| Publication status | Published - 1 Aug 2008 |
Keywords
- Dual magnetron (DM)
- Magnetic field
- Plasma discharge
- Plasma drift
ASJC Scopus subject areas
- Nuclear and High Energy Physics
- Condensed Matter Physics
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Cite this
Baroch, P., & Musil, J. (2008). Plasma drift in dual magnetron discharge. IEEE Transactions on Plasma Science, 36(4 PART 1), 1412-1413. https://doi.org/10.1109/TPS.2008.924483