Plasma drift in dual magnetron discharge

Abstract

The distribution and form of the discharge in dual magnetron (DM) depends not only on the polarity of magnets used in both magnetrons but also on the distribution of magnetic field lines. For tilted DM, a naturally created gradient of magnetic field generates a drift of plasma that results in a deflection of the discharge from the plane of symmetry. This deflection of the discharge was observed experimentally. Performed experiments are in a good agreement with the theoretical prediction.

Original language	English
Pages (from-to)	1412-1413
Number of pages	2
Journal	IEEE Transactions on Plasma Science
Volume	36
Issue number	4 PART 1
DOIs	https://doi.org/10.1109/TPS.2008.924483
Publication status	Published - 1 Aug 2008

Keywords

Dual magnetron (DM)
Magnetic field
Plasma discharge
Plasma drift

ASJC Scopus subject areas

Nuclear and High Energy Physics
Condensed Matter Physics

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10.1109/TPS.2008.924483

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title = "Plasma drift in dual magnetron discharge",

abstract = "The distribution and form of the discharge in dual magnetron (DM) depends not only on the polarity of magnets used in both magnetrons but also on the distribution of magnetic field lines. For tilted DM, a naturally created gradient of magnetic field generates a drift of plasma that results in a deflection of the discharge from the plane of symmetry. This deflection of the discharge was observed experimentally. Performed experiments are in a good agreement with the theoretical prediction.",

keywords = "Dual magnetron (DM), Magnetic field, Plasma discharge, Plasma drift",

author = "Pavel Baroch and Jindrich Musil",

year = "2008",

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AB - The distribution and form of the discharge in dual magnetron (DM) depends not only on the polarity of magnets used in both magnetrons but also on the distribution of magnetic field lines. For tilted DM, a naturally created gradient of magnetic field generates a drift of plasma that results in a deflection of the discharge from the plane of symmetry. This deflection of the discharge was observed experimentally. Performed experiments are in a good agreement with the theoretical prediction.

KW - Dual magnetron (DM)

KW - Magnetic field

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