Plasma drift in dual magnetron discharge

Pavel Baroch, Jindrich Musil

Research output: Contribution to journalArticle

12 Citations (Scopus)

Abstract

The distribution and form of the discharge in dual magnetron (DM) depends not only on the polarity of magnets used in both magnetrons but also on the distribution of magnetic field lines. For tilted DM, a naturally created gradient of magnetic field generates a drift of plasma that results in a deflection of the discharge from the plane of symmetry. This deflection of the discharge was observed experimentally. Performed experiments are in a good agreement with the theoretical prediction.

Original languageEnglish
Pages (from-to)1412-1413
Number of pages2
JournalIEEE Transactions on Plasma Science
Volume36
Issue number4 PART 1
DOIs
Publication statusPublished - 1 Aug 2008

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plasma drift
deflection
magnetrons
magnetic fields
polarity
magnets
gradients
symmetry
predictions

Keywords

  • Dual magnetron (DM)
  • Magnetic field
  • Plasma discharge
  • Plasma drift

ASJC Scopus subject areas

  • Nuclear and High Energy Physics
  • Condensed Matter Physics

Cite this

Plasma drift in dual magnetron discharge. / Baroch, Pavel; Musil, Jindrich.

In: IEEE Transactions on Plasma Science, Vol. 36, No. 4 PART 1, 01.08.2008, p. 1412-1413.

Research output: Contribution to journalArticle

Baroch, Pavel ; Musil, Jindrich. / Plasma drift in dual magnetron discharge. In: IEEE Transactions on Plasma Science. 2008 ; Vol. 36, No. 4 PART 1. pp. 1412-1413.
@article{7fe22a09c64c4648bcaa8610a83dc09e,
title = "Plasma drift in dual magnetron discharge",
abstract = "The distribution and form of the discharge in dual magnetron (DM) depends not only on the polarity of magnets used in both magnetrons but also on the distribution of magnetic field lines. For tilted DM, a naturally created gradient of magnetic field generates a drift of plasma that results in a deflection of the discharge from the plane of symmetry. This deflection of the discharge was observed experimentally. Performed experiments are in a good agreement with the theoretical prediction.",
keywords = "Dual magnetron (DM), Magnetic field, Plasma discharge, Plasma drift",
author = "Pavel Baroch and Jindrich Musil",
year = "2008",
month = "8",
day = "1",
doi = "10.1109/TPS.2008.924483",
language = "English",
volume = "36",
pages = "1412--1413",
journal = "IEEE Transactions on Plasma Science",
issn = "0093-3813",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
number = "4 PART 1",

}

TY - JOUR

T1 - Plasma drift in dual magnetron discharge

AU - Baroch, Pavel

AU - Musil, Jindrich

PY - 2008/8/1

Y1 - 2008/8/1

N2 - The distribution and form of the discharge in dual magnetron (DM) depends not only on the polarity of magnets used in both magnetrons but also on the distribution of magnetic field lines. For tilted DM, a naturally created gradient of magnetic field generates a drift of plasma that results in a deflection of the discharge from the plane of symmetry. This deflection of the discharge was observed experimentally. Performed experiments are in a good agreement with the theoretical prediction.

AB - The distribution and form of the discharge in dual magnetron (DM) depends not only on the polarity of magnets used in both magnetrons but also on the distribution of magnetic field lines. For tilted DM, a naturally created gradient of magnetic field generates a drift of plasma that results in a deflection of the discharge from the plane of symmetry. This deflection of the discharge was observed experimentally. Performed experiments are in a good agreement with the theoretical prediction.

KW - Dual magnetron (DM)

KW - Magnetic field

KW - Plasma discharge

KW - Plasma drift

UR - http://www.scopus.com/inward/record.url?scp=50249095764&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=50249095764&partnerID=8YFLogxK

U2 - 10.1109/TPS.2008.924483

DO - 10.1109/TPS.2008.924483

M3 - Article

VL - 36

SP - 1412

EP - 1413

JO - IEEE Transactions on Plasma Science

JF - IEEE Transactions on Plasma Science

SN - 0093-3813

IS - 4 PART 1

ER -