Abstract
Microchemical, microstructural, mechanical and tribe-logical characteristics of alternate TiN/ZrN multilayer coatings were investigated by energy-dispersive X-ray (EDX) spectroscopy, X-ray diffraction (XRD), microhardness and thickness measurements, adhesion and wear resistance tests. The coatings, with various bilayer periods and thicknesses of the individual layers, were deposited on Si and steel substrates by the cathodic arc technique. A comparison with TiN and ZrN monolayer properties was carried out.
| Original language | English |
|---|---|
| Pages (from-to) | 1399-1404 |
| Number of pages | 6 |
| Journal | Journal of Optoelectronics and Advanced Materials |
| Volume | 5 |
| Issue number | 5 |
| Publication status | Published - 1 Jan 2003 |
| Externally published | Yes |
Keywords
- Alternate multilayer coatings
- Cathodic arc method
- TiN and ZrN
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Atomic and Molecular Physics, and Optics
- Condensed Matter Physics
- Electrical and Electronic Engineering