Plasma deposition of alternate TiN/ZrN multilayer hard coatings

M. Braic, V. Braic, M. Balaceanu, G. Pavelescu, A. Vladescu

Research output: Contribution to journalArticlepeer-review

17 Citations (Scopus)

Abstract

Microchemical, microstructural, mechanical and tribe-logical characteristics of alternate TiN/ZrN multilayer coatings were investigated by energy-dispersive X-ray (EDX) spectroscopy, X-ray diffraction (XRD), microhardness and thickness measurements, adhesion and wear resistance tests. The coatings, with various bilayer periods and thicknesses of the individual layers, were deposited on Si and steel substrates by the cathodic arc technique. A comparison with TiN and ZrN monolayer properties was carried out.

Original languageEnglish
Pages (from-to)1399-1404
Number of pages6
JournalJournal of Optoelectronics and Advanced Materials
Volume5
Issue number5
Publication statusPublished - 1 Jan 2003
Externally publishedYes

Keywords

  • Alternate multilayer coatings
  • Cathodic arc method
  • TiN and ZrN

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Atomic and Molecular Physics, and Optics
  • Condensed Matter Physics
  • Electrical and Electronic Engineering

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