Piezoresistive force sensor and thermal actuators usage as applications to nanosystems manipulation: Design, simulations, technology and experiments

Gianina Schondelmaier, Steffen Hartmann, Daniel May, Alexey Shaporin, Sebastian Voigt, R. D. Rodriguez, O. D. Gordan, D. R.T. Zahn, Jan Mehner, Karla Hiller, Bernhard Wunderle

Research output: Chapter in Book/Report/Conference proceedingConference contribution

3 Citations (Scopus)

Abstract

For properties characterization of nanostructured materials and simultaneously to predict their reliability a tensile testing system consisting of a thermal actuator and a lateral nano-Newton force piezoresistive sensor is presented. The implementation of a piezoresistive load sensor in a MEMS-based tensile testing system can be regarded as an innovative and ultrasensitive method to continuously observe the specimen deformation while simultaneously measuring the applied load electronically with nano-Newton resolution. The primary technique that we have used for the fabrication of these systems is Bonding and Deep Reactive Ion Etching (BDRIE) applied on SOI wafers.

Original languageEnglish
Title of host publication2013 14th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems, EuroSimE 2013
DOIs
Publication statusPublished - 7 Aug 2013
Externally publishedYes
Event2013 14th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems, EuroSimE 2013 - Wroclaw, Poland
Duration: 14 Apr 201317 Apr 2013

Conference

Conference2013 14th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems, EuroSimE 2013
CountryPoland
CityWroclaw
Period14.4.1317.4.13

    Fingerprint

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Modelling and Simulation

Cite this

Schondelmaier, G., Hartmann, S., May, D., Shaporin, A., Voigt, S., Rodriguez, R. D., Gordan, O. D., Zahn, D. R. T., Mehner, J., Hiller, K., & Wunderle, B. (2013). Piezoresistive force sensor and thermal actuators usage as applications to nanosystems manipulation: Design, simulations, technology and experiments. In 2013 14th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems, EuroSimE 2013 [6529967] https://doi.org/10.1109/EuroSimE.2013.6529967