Physicochemical Study of Ta2O5 and SiO2-Ta2O5 Film Formation from Film-Forming Solutions

Abstract

In order to study physicochemical processes of formation of Ta₂O₅ and SiO₂-Ta₂O₅ films from film-forming solutions, the properties of these solutions, and also the thermal-oxidative breakdown and the properties of the obtained films, were studied.

Original language	English
Pages (from-to)	18-20
Number of pages	3
Journal	Russian Journal of Applied Chemistry
Volume	74
Issue number	1
DOIs	https://doi.org/10.1023/A:1012763009684
Publication status	Published - 2001

ASJC Scopus subject areas

Chemistry (miscellaneous)

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title = "Physicochemical Study of Ta2O5 and SiO2-Ta2O5 Film Formation from Film-Forming Solutions",

abstract = "In order to study physicochemical processes of formation of Ta2O5 and SiO2-Ta2O5 films from film-forming solutions, the properties of these solutions, and also the thermal-oxidative breakdown and the properties of the obtained films, were studied.",

author = "Gryaznov, {R. V.} and Borilo, {L. P.} and Kozik, {V. V.} and Mal'chik, {A. G.}",

year = "2001",

doi = "10.1023/A:1012763009684",

language = "English",

volume = "74",

pages = "18--20",

journal = "Russian Journal of Applied Chemistry",

issn = "1070-4272",

publisher = "Maik Nauka-Interperiodica Publishing",

number = "1",

}

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T1 - Physicochemical Study of Ta2O5 and SiO2-Ta2O5 Film Formation from Film-Forming Solutions

AU - Gryaznov, R. V.

AU - Borilo, L. P.

AU - Kozik, V. V.

AU - Mal'chik, A. G.

PY - 2001

Y1 - 2001

N2 - In order to study physicochemical processes of formation of Ta2O5 and SiO2-Ta2O5 films from film-forming solutions, the properties of these solutions, and also the thermal-oxidative breakdown and the properties of the obtained films, were studied.

AB - In order to study physicochemical processes of formation of Ta2O5 and SiO2-Ta2O5 films from film-forming solutions, the properties of these solutions, and also the thermal-oxidative breakdown and the properties of the obtained films, were studied.

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DO - 10.1023/A:1012763009684

M3 - Article

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VL - 74

SP - 18

EP - 20

JO - Russian Journal of Applied Chemistry

JF - Russian Journal of Applied Chemistry

SN - 1070-4272

IS - 1

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Physicochemical Study of Ta₂O₅ and SiO₂-Ta₂O₅ Film Formation from Film-Forming Solutions

Abstract

ASJC Scopus subject areas

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