Abstract
In order to study physicochemical processes of formation of Ta2O5 and SiO2-Ta2O5 films from film-forming solutions, the properties of these solutions, and also the thermal-oxidative breakdown and the properties of the obtained films, were studied.
Original language | English |
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Pages (from-to) | 18-20 |
Number of pages | 3 |
Journal | Russian Journal of Applied Chemistry |
Volume | 74 |
Issue number | 1 |
DOIs | |
Publication status | Published - 2001 |
ASJC Scopus subject areas
- Chemistry (miscellaneous)