Abstract
In order to study physicochemical processes of formation of Ta2O5 and SiO2-Ta2O5 films from film-forming solutions, the properties of these solutions, and also the thermal-oxidative breakdown and the properties of the obtained films, were studied.
| Original language | English |
|---|---|
| Pages (from-to) | 18-20 |
| Number of pages | 3 |
| Journal | Russian Journal of Applied Chemistry |
| Volume | 74 |
| Issue number | 1 |
| DOIs | |
| Publication status | Published - 2001 |
ASJC Scopus subject areas
- Chemistry (miscellaneous)
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Gryaznov, R. V., Borilo, L. P., Kozik, V. V., & Mal'chik, A. G. (2001). Physicochemical Study of Ta2O5 and SiO2-Ta2O5 Film Formation from Film-Forming Solutions. Russian Journal of Applied Chemistry, 74(1), 18-20. https://doi.org/10.1023/A:1012763009684