Physicochemical Study of Ta2O5 and SiO2-Ta2O5 Film Formation from Film-Forming Solutions

R. V. Gryaznov, L. P. Borilo, V. V. Kozik, A. G. Mal'chik

    Research output: Contribution to journalArticle

    4 Citations (Scopus)

    Abstract

    In order to study physicochemical processes of formation of Ta2O5 and SiO2-Ta2O5 films from film-forming solutions, the properties of these solutions, and also the thermal-oxidative breakdown and the properties of the obtained films, were studied.

    Original languageEnglish
    Pages (from-to)18-20
    Number of pages3
    JournalRussian Journal of Applied Chemistry
    Volume74
    Issue number1
    DOIs
    Publication statusPublished - 2001

    ASJC Scopus subject areas

    • Chemistry (miscellaneous)

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