Physicochemical Study of Ta₂O₅ and SiO₂-Ta₂O₅ Film Formation from Film-Forming Solutions

R. V. Gryaznov, L. P. Borilo, V. V. Kozik, A. G. Mal'chik

Research output: Contribution to journal › Article

Abstract

In order to study physicochemical processes of formation of Ta₂O₅ and SiO₂-Ta₂O₅ films from film-forming solutions, the properties of these solutions, and also the thermal-oxidative breakdown and the properties of the obtained films, were studied.

Original language	English
Pages (from-to)	18-20
Number of pages	3
Journal	Russian Journal of Applied Chemistry
Volume	74
Issue number	1
DOIs	https://doi.org/10.1023/A:1012763009684
Publication status	Published - 2001

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ASJC Scopus subject areas

Chemistry (miscellaneous)

Cite this

Gryaznov, R. V., Borilo, L. P., Kozik, V. V., & Mal'chik, A. G. (2001). Physicochemical Study of Ta₂O₅ and SiO₂-Ta₂O₅ Film Formation from Film-Forming Solutions. Russian Journal of Applied Chemistry, 74(1), 18-20. https://doi.org/10.1023/A:1012763009684

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Access to Document

10.1023/A:1012763009684