Physicochemical state and electrical transport of inorganic dielectric materials after ion-heat modification. 1. Structural phase variations and properties

A. V. Kabyshev, V. V. Lopatin, Yu F. Ivanov

Research output: Contribution to journalArticle

Abstract

The influence of ion-heat modification on structural and phase variations of heat-resistant inorganic dielectrics has been studied. Pronounced phase transformations are shown to occur in the irradiated surface layer under postimplantation annealing. Their evolution is followed. The optimum conditions of modification realizing transition from dielectric to semiconducting state are determined for oxide and nitride compounds. Electrophysical properties of modified surface of dielectrics are studied.

Original languageEnglish
Pages (from-to)775-787
Number of pages13
JournalSurface Investigation X-Ray, Synchrotron and Neutron Techniques
Volume12
Issue number7
Publication statusPublished - 1997

Fingerprint

Ions
heat
ions
Nitrides
Oxides
nitrides
phase transformations
surface layers
Phase transitions
Annealing
annealing
oxides
Hot Temperature

ASJC Scopus subject areas

  • Surfaces and Interfaces

Cite this

@article{35ccb53a0f4641d6813410740b037064,
title = "Physicochemical state and electrical transport of inorganic dielectric materials after ion-heat modification. 1. Structural phase variations and properties",
abstract = "The influence of ion-heat modification on structural and phase variations of heat-resistant inorganic dielectrics has been studied. Pronounced phase transformations are shown to occur in the irradiated surface layer under postimplantation annealing. Their evolution is followed. The optimum conditions of modification realizing transition from dielectric to semiconducting state are determined for oxide and nitride compounds. Electrophysical properties of modified surface of dielectrics are studied.",
author = "Kabyshev, {A. V.} and Lopatin, {V. V.} and Ivanov, {Yu F.}",
year = "1997",
language = "English",
volume = "12",
pages = "775--787",
journal = "Journal of Surface Investigation",
issn = "1027-4510",
publisher = "Maik Nauka-Interperiodica Publishing",
number = "7",

}

TY - JOUR

T1 - Physicochemical state and electrical transport of inorganic dielectric materials after ion-heat modification. 1. Structural phase variations and properties

AU - Kabyshev, A. V.

AU - Lopatin, V. V.

AU - Ivanov, Yu F.

PY - 1997

Y1 - 1997

N2 - The influence of ion-heat modification on structural and phase variations of heat-resistant inorganic dielectrics has been studied. Pronounced phase transformations are shown to occur in the irradiated surface layer under postimplantation annealing. Their evolution is followed. The optimum conditions of modification realizing transition from dielectric to semiconducting state are determined for oxide and nitride compounds. Electrophysical properties of modified surface of dielectrics are studied.

AB - The influence of ion-heat modification on structural and phase variations of heat-resistant inorganic dielectrics has been studied. Pronounced phase transformations are shown to occur in the irradiated surface layer under postimplantation annealing. Their evolution is followed. The optimum conditions of modification realizing transition from dielectric to semiconducting state are determined for oxide and nitride compounds. Electrophysical properties of modified surface of dielectrics are studied.

UR - http://www.scopus.com/inward/record.url?scp=0031388265&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0031388265&partnerID=8YFLogxK

M3 - Article

VL - 12

SP - 775

EP - 787

JO - Journal of Surface Investigation

JF - Journal of Surface Investigation

SN - 1027-4510

IS - 7

ER -