Physicochemical state and electrical transport of inorganic dielectric materials after ion-heat modification. 1. Structural phase variations and properties

A. V. Kabyshev, V. V. Lopatin, Yu F. Ivanov

Research output: Contribution to journalArticle

Abstract

The influence of ion-heat modification on structural and phase variations of heat-resistant inorganic dielectrics has been studied. Pronounced phase transformations are shown to occur in the irradiated surface layer under postimplantation annealing. Their evolution is followed. The optimum conditions of modification realizing transition from dielectric to semiconducting state are determined for oxide and nitride compounds. Electrophysical properties of modified surface of dielectrics are studied.

Original languageEnglish
Pages (from-to)775-787
Number of pages13
JournalSurface Investigation X-Ray, Synchrotron and Neutron Techniques
Volume12
Issue number7
Publication statusPublished - 1997

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ASJC Scopus subject areas

  • Surfaces and Interfaces

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