Physical and mechanical properties of sputtered Ta-Si-N films with a high (≥40 at%) content of Si

H. Zeman, J. Musil, P. Zeman

Research output: Contribution to journalArticle

31 Citations (Scopus)

Abstract

The ternary Ta-Si-N films produced by magnetron sputtering using an alloyed TaSi2 were discussed. The effect of partial pressure of nitrogen on mechanical properties of the films was analyzed under specific conditions. It was stated that the films exhibited an X-ray amorphous structure, with increasing electric resistivity with increasing Si3N4 content. It was observed that the films achieved a high value of harness which was considerably higher than that of bulk Si3N4.

Original languageEnglish
Pages (from-to)646-649
Number of pages4
JournalJournal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Volume22
Issue number3
DOIs
Publication statusPublished - 1 May 2004

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Physical properties
physical properties
mechanical properties
Mechanical properties
harnesses
Electric conductivity
Partial pressure
Magnetron sputtering
partial pressure
magnetron sputtering
Nitrogen
nitrogen
X rays
electrical resistivity
x rays
silicon nitride

ASJC Scopus subject areas

  • Condensed Matter Physics
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films

Cite this

Physical and mechanical properties of sputtered Ta-Si-N films with a high (≥40 at%) content of Si. / Zeman, H.; Musil, J.; Zeman, P.

In: Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films, Vol. 22, No. 3, 01.05.2004, p. 646-649.

Research output: Contribution to journalArticle

@article{e329de30dbc246c3b60c305cb5f541a2,
title = "Physical and mechanical properties of sputtered Ta-Si-N films with a high (≥40 at{\%}) content of Si",
abstract = "The ternary Ta-Si-N films produced by magnetron sputtering using an alloyed TaSi2 were discussed. The effect of partial pressure of nitrogen on mechanical properties of the films was analyzed under specific conditions. It was stated that the films exhibited an X-ray amorphous structure, with increasing electric resistivity with increasing Si3N4 content. It was observed that the films achieved a high value of harness which was considerably higher than that of bulk Si3N4.",
author = "H. Zeman and J. Musil and P. Zeman",
year = "2004",
month = "5",
day = "1",
doi = "10.1116/1.1710499",
language = "English",
volume = "22",
pages = "646--649",
journal = "Journal of Vacuum Science and Technology A",
issn = "0734-2101",
publisher = "AVS Science and Technology Society",
number = "3",

}

TY - JOUR

T1 - Physical and mechanical properties of sputtered Ta-Si-N films with a high (≥40 at%) content of Si

AU - Zeman, H.

AU - Musil, J.

AU - Zeman, P.

PY - 2004/5/1

Y1 - 2004/5/1

N2 - The ternary Ta-Si-N films produced by magnetron sputtering using an alloyed TaSi2 were discussed. The effect of partial pressure of nitrogen on mechanical properties of the films was analyzed under specific conditions. It was stated that the films exhibited an X-ray amorphous structure, with increasing electric resistivity with increasing Si3N4 content. It was observed that the films achieved a high value of harness which was considerably higher than that of bulk Si3N4.

AB - The ternary Ta-Si-N films produced by magnetron sputtering using an alloyed TaSi2 were discussed. The effect of partial pressure of nitrogen on mechanical properties of the films was analyzed under specific conditions. It was stated that the films exhibited an X-ray amorphous structure, with increasing electric resistivity with increasing Si3N4 content. It was observed that the films achieved a high value of harness which was considerably higher than that of bulk Si3N4.

UR - http://www.scopus.com/inward/record.url?scp=3142518027&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=3142518027&partnerID=8YFLogxK

U2 - 10.1116/1.1710499

DO - 10.1116/1.1710499

M3 - Article

VL - 22

SP - 646

EP - 649

JO - Journal of Vacuum Science and Technology A

JF - Journal of Vacuum Science and Technology A

SN - 0734-2101

IS - 3

ER -