@inproceedings{885c9aed9284469a85667c2442017350,
title = "Phase composition and thin structure of the Zr-Y-O layer in Zr-Y-O/Si-Al-N multilayer coatings",
abstract = "The deposition of nanostructured coatings based on Zr-Y-O was carried out by pulsed magnetron methods. The fine structure and phase composition of nanostructured coatings were studied using a high-temperature TEM and X-ray method. Using the method of the high-temperature X-ray, it was shown that heating up to 500qC leads to a sharp increase in the size of coherent scattering regions (CSRs). Starting from 750 degrees, the size of the CSR monotonously decreases down to 260 {\AA}. High-temperature electron microscopy (TEM) studies reveal the same trend in the grain size behavior. The maximum grain size increase is observed at a temperature of 500qC. Such behavior of the CSR may indicate the presence of a reversible phase transition of the tetragonal phase to the monoclinic one, which can results in stress relaxation and the closure of surface cracks.",
author = "Fedorischeva, {M. V.} and Kalashnikov, {M. P.} and Bozhko, {I. A.} and Sergeev, {V. P.}",
note = "Funding Information: The work was performed according to the Government research assignment for ISPMS SB RAS, project No. III.23.1.1 and Project No. III.23.1.1 and the presented work is a continuation of the RFBR project No. 16-48-700198 Publisher Copyright: {\textcopyright} 2020 American Institute of Physics Inc.. All rights reserved. Copyright: Copyright 2020 Elsevier B.V., All rights reserved.; International Conference on Physical Mesomechanics. Materials with Multilevel Hierarchical Structure and Intelligent Manufacturing Technology 2020 ; Conference date: 05-10-2020 Through 09-10-2020",
year = "2020",
month = dec,
day = "14",
doi = "10.1063/5.0034431",
language = "English",
series = "AIP Conference Proceedings",
publisher = "American Institute of Physics Inc.",
editor = "Panin, {Victor E.} and Fomin, {Vasily M.}",
booktitle = "Proceedings of the International Conference on Physical Mesomechanics. Materials with Multilevel Hierarchical Structure and Intelligent Manufacturing Technology",
}