Phase composition and thin structure of the Zr-Y-O layer in Zr-Y-O/Si-Al-N multilayer coatings

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

The deposition of nanostructured coatings based on Zr-Y-O was carried out by pulsed magnetron methods. The fine structure and phase composition of nanostructured coatings were studied using a high-temperature TEM and X-ray method. Using the method of the high-temperature X-ray, it was shown that heating up to 500qC leads to a sharp increase in the size of coherent scattering regions (CSRs). Starting from 750 degrees, the size of the CSR monotonously decreases down to 260 Å. High-temperature electron microscopy (TEM) studies reveal the same trend in the grain size behavior. The maximum grain size increase is observed at a temperature of 500qC. Such behavior of the CSR may indicate the presence of a reversible phase transition of the tetragonal phase to the monoclinic one, which can results in stress relaxation and the closure of surface cracks.

Original languageEnglish
Title of host publicationProceedings of the International Conference on Physical Mesomechanics. Materials with Multilevel Hierarchical Structure and Intelligent Manufacturing Technology
EditorsVictor E. Panin, Vasily M. Fomin
PublisherAmerican Institute of Physics Inc.
ISBN (Electronic)9780735440463
DOIs
Publication statusPublished - 14 Dec 2020
EventInternational Conference on Physical Mesomechanics. Materials with Multilevel Hierarchical Structure and Intelligent Manufacturing Technology 2020 - Tomsk, Russian Federation
Duration: 5 Oct 20209 Oct 2020

Publication series

NameAIP Conference Proceedings
Volume2310
ISSN (Print)0094-243X
ISSN (Electronic)1551-7616

Conference

ConferenceInternational Conference on Physical Mesomechanics. Materials with Multilevel Hierarchical Structure and Intelligent Manufacturing Technology 2020
CountryRussian Federation
CityTomsk
Period5.10.209.10.20

ASJC Scopus subject areas

  • Physics and Astronomy(all)

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