Phase composition and thin structure of the Zr-Y-O layer in Zr-Y-O/Si-Al-N multilayer coatings

Abstract

The deposition of nanostructured coatings based on Zr-Y-O was carried out by pulsed magnetron methods. The fine structure and phase composition of nanostructured coatings were studied using a high-temperature TEM and X-ray method. Using the method of the high-temperature X-ray, it was shown that heating up to 500qC leads to a sharp increase in the size of coherent scattering regions (CSRs). Starting from 750 degrees, the size of the CSR monotonously decreases down to 260 Å. High-temperature electron microscopy (TEM) studies reveal the same trend in the grain size behavior. The maximum grain size increase is observed at a temperature of 500qC. Such behavior of the CSR may indicate the presence of a reversible phase transition of the tetragonal phase to the monoclinic one, which can results in stress relaxation and the closure of surface cracks.

Original language	English
Title of host publication	Proceedings of the International Conference on Physical Mesomechanics. Materials with Multilevel Hierarchical Structure and Intelligent Manufacturing Technology
Editors	Victor E. Panin, Vasily M. Fomin
Publisher	American Institute of Physics Inc.
ISBN (Electronic)	9780735440463
DOIs	https://doi.org/10.1063/5.0034431
Publication status	Published - 14 Dec 2020
Event	International Conference on Physical Mesomechanics. Materials with Multilevel Hierarchical Structure and Intelligent Manufacturing Technology 2020 - Tomsk, Russian Federation Duration: 5 Oct 2020 → 9 Oct 2020

Publication series

Name	AIP Conference Proceedings
Volume	2310
ISSN (Print)	0094-243X
ISSN (Electronic)	1551-7616

Conference

Conference	International Conference on Physical Mesomechanics. Materials with Multilevel Hierarchical Structure and Intelligent Manufacturing Technology 2020
Country	Russian Federation
City	Tomsk
Period	5.10.20 → 9.10.20

ASJC Scopus subject areas

Physics and Astronomy(all)

Access to Document

10.1063/5.0034431

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Fedorischeva, M. V., Kalashnikov, M. P., Bozhko, I. A., & Sergeev, V. P. (2020). Phase composition and thin structure of the Zr-Y-O layer in Zr-Y-O/Si-Al-N multilayer coatings. In V. E. Panin, & V. M. Fomin (Eds.), Proceedings of the International Conference on Physical Mesomechanics. Materials with Multilevel Hierarchical Structure and Intelligent Manufacturing Technology [020090] (AIP Conference Proceedings; Vol. 2310). American Institute of Physics Inc.. https://doi.org/10.1063/5.0034431

Phase composition and thin structure of the Zr-Y-O layer in Zr-Y-O/Si-Al-N multilayer coatings. / Fedorischeva, M. V.; Kalashnikov, M. P.; Bozhko, I. A.; Sergeev, V. P.

Proceedings of the International Conference on Physical Mesomechanics. Materials with Multilevel Hierarchical Structure and Intelligent Manufacturing Technology. ed. / Victor E. Panin; Vasily M. Fomin. American Institute of Physics Inc., 2020. 020090 (AIP Conference Proceedings; Vol. 2310).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Fedorischeva, MV, Kalashnikov, MP , Bozhko, IA & Sergeev, VP 2020, Phase composition and thin structure of the Zr-Y-O layer in Zr-Y-O/Si-Al-N multilayer coatings. in VE Panin & VM Fomin (eds), Proceedings of the International Conference on Physical Mesomechanics. Materials with Multilevel Hierarchical Structure and Intelligent Manufacturing Technology., 020090, AIP Conference Proceedings, vol. 2310, American Institute of Physics Inc., International Conference on Physical Mesomechanics. Materials with Multilevel Hierarchical Structure and Intelligent Manufacturing Technology 2020, Tomsk, Russian Federation, 5.10.20. https://doi.org/10.1063/5.0034431

Fedorischeva MV, Kalashnikov MP , Bozhko IA , Sergeev VP. Phase composition and thin structure of the Zr-Y-O layer in Zr-Y-O/Si-Al-N multilayer coatings. In Panin VE, Fomin VM, editors, Proceedings of the International Conference on Physical Mesomechanics. Materials with Multilevel Hierarchical Structure and Intelligent Manufacturing Technology. American Institute of Physics Inc. 2020. 020090. (AIP Conference Proceedings). https://doi.org/10.1063/5.0034431

Fedorischeva, M. V. ; Kalashnikov, M. P. ; Bozhko, I. A. ; Sergeev, V. P. / Phase composition and thin structure of the Zr-Y-O layer in Zr-Y-O/Si-Al-N multilayer coatings. Proceedings of the International Conference on Physical Mesomechanics. Materials with Multilevel Hierarchical Structure and Intelligent Manufacturing Technology. editor / Victor E. Panin ; Vasily M. Fomin. American Institute of Physics Inc., 2020. (AIP Conference Proceedings).

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title = "Phase composition and thin structure of the Zr-Y-O layer in Zr-Y-O/Si-Al-N multilayer coatings",

abstract = "The deposition of nanostructured coatings based on Zr-Y-O was carried out by pulsed magnetron methods. The fine structure and phase composition of nanostructured coatings were studied using a high-temperature TEM and X-ray method. Using the method of the high-temperature X-ray, it was shown that heating up to 500qC leads to a sharp increase in the size of coherent scattering regions (CSRs). Starting from 750 degrees, the size of the CSR monotonously decreases down to 260 {\AA}. High-temperature electron microscopy (TEM) studies reveal the same trend in the grain size behavior. The maximum grain size increase is observed at a temperature of 500qC. Such behavior of the CSR may indicate the presence of a reversible phase transition of the tetragonal phase to the monoclinic one, which can results in stress relaxation and the closure of surface cracks.",

author = "Fedorischeva, {M. V.} and Kalashnikov, {M. P.} and Bozhko, {I. A.} and Sergeev, {V. P.}",

note = "Funding Information: The work was performed according to the Government research assignment for ISPMS SB RAS, project No. III.23.1.1 and Project No. III.23.1.1 and the presented work is a continuation of the RFBR project No. 16-48-700198 Publisher Copyright: {\textcopyright} 2020 American Institute of Physics Inc.. All rights reserved. Copyright: Copyright 2020 Elsevier B.V., All rights reserved.; International Conference on Physical Mesomechanics. Materials with Multilevel Hierarchical Structure and Intelligent Manufacturing Technology 2020 ; Conference date: 05-10-2020 Through 09-10-2020",

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AU - Sergeev, V. P.

N1 - Funding Information: The work was performed according to the Government research assignment for ISPMS SB RAS, project No. III.23.1.1 and Project No. III.23.1.1 and the presented work is a continuation of the RFBR project No. 16-48-700198 Publisher Copyright: © 2020 American Institute of Physics Inc.. All rights reserved. Copyright: Copyright 2020 Elsevier B.V., All rights reserved.

PY - 2020/12/14

Y1 - 2020/12/14

N2 - The deposition of nanostructured coatings based on Zr-Y-O was carried out by pulsed magnetron methods. The fine structure and phase composition of nanostructured coatings were studied using a high-temperature TEM and X-ray method. Using the method of the high-temperature X-ray, it was shown that heating up to 500qC leads to a sharp increase in the size of coherent scattering regions (CSRs). Starting from 750 degrees, the size of the CSR monotonously decreases down to 260 Å. High-temperature electron microscopy (TEM) studies reveal the same trend in the grain size behavior. The maximum grain size increase is observed at a temperature of 500qC. Such behavior of the CSR may indicate the presence of a reversible phase transition of the tetragonal phase to the monoclinic one, which can results in stress relaxation and the closure of surface cracks.

AB - The deposition of nanostructured coatings based on Zr-Y-O was carried out by pulsed magnetron methods. The fine structure and phase composition of nanostructured coatings were studied using a high-temperature TEM and X-ray method. Using the method of the high-temperature X-ray, it was shown that heating up to 500qC leads to a sharp increase in the size of coherent scattering regions (CSRs). Starting from 750 degrees, the size of the CSR monotonously decreases down to 260 Å. High-temperature electron microscopy (TEM) studies reveal the same trend in the grain size behavior. The maximum grain size increase is observed at a temperature of 500qC. Such behavior of the CSR may indicate the presence of a reversible phase transition of the tetragonal phase to the monoclinic one, which can results in stress relaxation and the closure of surface cracks.

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