Peculiarities of tungsten, molybdenum and carbon pulse-frequency ion implantation with the use of single-element and composite cathodes

L. N. Puchkareva, S. M. Chesnokov, I. A. Shulepov

    Research output: Contribution to journalArticle

    Abstract

    By means of AES and SIMS methods a comparison studies of depth distribution of Mo, W and C atoms implanted in steel have been carried out. The implantation in pulse-frequency mode was made using single element W, Mo, C cathodes as well as composite WC and MoB cathodes. It is shown that implantation with composite cathodes leads to more intensive alloying a steel and decreasing an alloyed layer depth compared to single-element cathode ion implantation. The difference is connected to variety in charge state of ions generated from single-element and composite cathodes. Obtained results are in agreement with known data on charge state of ion fluxes generated under pulse-frequency implantation with the same cathodes.

    Original languageEnglish
    Pages (from-to)11-15
    Number of pages5
    JournalFizika i Khimiya Obrabotki Materialov
    Issue number5
    Publication statusPublished - Sep 1998

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    ASJC Scopus subject areas

    • Materials Science(all)

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