By means of AES and SIMS methods a comparison studies of depth distribution of Mo, W and C atoms implanted in steel have been carried out. The implantation in pulse-frequency mode was made using single element W, Mo, C cathodes as well as composite WC and MoB cathodes. It is shown that implantation with composite cathodes leads to more intensive alloying a steel and decreasing an alloyed layer depth compared to single-element cathode ion implantation. The difference is connected to variety in charge state of ions generated from single-element and composite cathodes. Obtained results are in agreement with known data on charge state of ion fluxes generated under pulse-frequency implantation with the same cathodes.
|Number of pages||5|
|Journal||Fizika i Khimiya Obrabotki Materialov|
|Publication status||Published - Sep 1998|
ASJC Scopus subject areas
- Materials Science(all)