Abstract
This article reports on the pecularities of Cr and Cu coatings deposited by magnetron sputtering with hot and evaporative targets. There is shown the role of heat radiation from hot (evaporative) target and sublimated particle flux in energy flux density on the substrate and deposition rates. The Cr and Cu films were investigated by X-ray diffraction, scanning electron microscopy, nanoindentation, electrical conductivity and corrosion tests.
| Original language | English |
|---|---|
| Article number | 032065 |
| Journal | Journal of Physics: Conference Series |
| Volume | 1115 |
| Issue number | 3 |
| DOIs | |
| Publication status | Published - 27 Nov 2018 |
| Event | 6th International Congress on Energy Fluxes and Radiation Effects 2018, EFRE 2018 - Tomsk, Russian Federation Duration: 16 Sep 2018 → 22 Sep 2018 |
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ASJC Scopus subject areas
- Physics and Astronomy(all)
Cite this
Peculiarities of metal coatings deposition using magnetron sputtering systems with hot and evaporative targets. / Bleykher, G. A.; Sidelev, D. V.; Grudinin, V. A.; Krivobokov, V. P.; Yuryeva, A. V.
In: Journal of Physics: Conference Series, Vol. 1115, No. 3, 032065, 27.11.2018.Research output: Contribution to journal › Conference article
}
TY - JOUR
T1 - Peculiarities of metal coatings deposition using magnetron sputtering systems with hot and evaporative targets
AU - Bleykher, G. A.
AU - Sidelev, D. V.
AU - Grudinin, V. A.
AU - Krivobokov, V. P.
AU - Yuryeva, A. V.
PY - 2018/11/27
Y1 - 2018/11/27
N2 - This article reports on the pecularities of Cr and Cu coatings deposited by magnetron sputtering with hot and evaporative targets. There is shown the role of heat radiation from hot (evaporative) target and sublimated particle flux in energy flux density on the substrate and deposition rates. The Cr and Cu films were investigated by X-ray diffraction, scanning electron microscopy, nanoindentation, electrical conductivity and corrosion tests.
AB - This article reports on the pecularities of Cr and Cu coatings deposited by magnetron sputtering with hot and evaporative targets. There is shown the role of heat radiation from hot (evaporative) target and sublimated particle flux in energy flux density on the substrate and deposition rates. The Cr and Cu films were investigated by X-ray diffraction, scanning electron microscopy, nanoindentation, electrical conductivity and corrosion tests.
UR - http://www.scopus.com/inward/record.url?scp=85058238325&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=85058238325&partnerID=8YFLogxK
U2 - 10.1088/1742-6596/1115/3/032065
DO - 10.1088/1742-6596/1115/3/032065
M3 - Conference article
VL - 1115
JO - Journal of Physics: Conference Series
JF - Journal of Physics: Conference Series
SN - 1742-6588
IS - 3
M1 - 032065
ER -