Peculiarities of metal coatings deposition using magnetron sputtering systems with hot and evaporative targets

G. A. Bleykher, D. V. Sidelev, V. A. Grudinin, V. P. Krivobokov, A. V. Yuryeva

The Weinberg Research Center

Research output: Contribution to journal › Conference article

Abstract

This article reports on the pecularities of Cr and Cu coatings deposited by magnetron sputtering with hot and evaporative targets. There is shown the role of heat radiation from hot (evaporative) target and sublimated particle flux in energy flux density on the substrate and deposition rates. The Cr and Cu films were investigated by X-ray diffraction, scanning electron microscopy, nanoindentation, electrical conductivity and corrosion tests.

Original language	English
Article number	032065
Journal	Journal of Physics: Conference Series
Volume	1115
Issue number	3
DOIs	https://doi.org/10.1088/1742-6596/1115/3/032065
Publication status	Published - 27 Nov 2018
Event	6th International Congress on Energy Fluxes and Radiation Effects 2018, EFRE 2018 - Tomsk, Russian Federation Duration: 16 Sep 2018 → 22 Sep 2018

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ASJC Scopus subject areas

Physics and Astronomy(all)

Cite this

Bleykher, G. A., Sidelev, D. V., Grudinin, V. A., Krivobokov, V. P., & Yuryeva, A. V. (2018). Peculiarities of metal coatings deposition using magnetron sputtering systems with hot and evaporative targets. Journal of Physics: Conference Series, 1115(3), [032065]. https://doi.org/10.1088/1742-6596/1115/3/032065

@article{14caf0822ea144abb8fffdebc742e327,

title = "Peculiarities of metal coatings deposition using magnetron sputtering systems with hot and evaporative targets",

abstract = "This article reports on the pecularities of Cr and Cu coatings deposited by magnetron sputtering with hot and evaporative targets. There is shown the role of heat radiation from hot (evaporative) target and sublimated particle flux in energy flux density on the substrate and deposition rates. The Cr and Cu films were investigated by X-ray diffraction, scanning electron microscopy, nanoindentation, electrical conductivity and corrosion tests.",

author = "Bleykher, {G. A.} and Sidelev, {D. V.} and Grudinin, {V. A.} and Krivobokov, {V. P.} and Yuryeva, {A. V.}",

year = "2018",

month = "11",

day = "27",

doi = "10.1088/1742-6596/1115/3/032065",

language = "English",

volume = "1115",

journal = "Journal of Physics: Conference Series",

issn = "1742-6588",

publisher = "IOP Publishing Ltd.",

number = "3",

note = "6th International Congress on Energy Fluxes and Radiation Effects 2018, EFRE 2018 ; Conference date: 16-09-2018 Through 22-09-2018",

}

TY - JOUR

T1 - Peculiarities of metal coatings deposition using magnetron sputtering systems with hot and evaporative targets

AU - Bleykher, G. A.

AU - Sidelev, D. V.

AU - Grudinin, V. A.

AU - Krivobokov, V. P.

AU - Yuryeva, A. V.

PY - 2018/11/27

Y1 - 2018/11/27

N2 - This article reports on the pecularities of Cr and Cu coatings deposited by magnetron sputtering with hot and evaporative targets. There is shown the role of heat radiation from hot (evaporative) target and sublimated particle flux in energy flux density on the substrate and deposition rates. The Cr and Cu films were investigated by X-ray diffraction, scanning electron microscopy, nanoindentation, electrical conductivity and corrosion tests.

AB - This article reports on the pecularities of Cr and Cu coatings deposited by magnetron sputtering with hot and evaporative targets. There is shown the role of heat radiation from hot (evaporative) target and sublimated particle flux in energy flux density on the substrate and deposition rates. The Cr and Cu films were investigated by X-ray diffraction, scanning electron microscopy, nanoindentation, electrical conductivity and corrosion tests.

UR - http://www.scopus.com/inward/record.url?scp=85058238325&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=85058238325&partnerID=8YFLogxK

U2 - 10.1088/1742-6596/1115/3/032065

DO - 10.1088/1742-6596/1115/3/032065

M3 - Conference article

AN - SCOPUS:85058238325

VL - 1115

JO - Journal of Physics: Conference Series

JF - Journal of Physics: Conference Series

SN - 1742-6588

IS - 3

M1 - 032065

T2 - 6th International Congress on Energy Fluxes and Radiation Effects 2018, EFRE 2018

Y2 - 16 September 2018 through 22 September 2018

ER -

Access to Document

10.1088/1742-6596/1115/3/032065