This article reports on the pecularities of Cr and Cu coatings deposited by magnetron sputtering with hot and evaporative targets. There is shown the role of heat radiation from hot (evaporative) target and sublimated particle flux in energy flux density on the substrate and deposition rates. The Cr and Cu films were investigated by X-ray diffraction, scanning electron microscopy, nanoindentation, electrical conductivity and corrosion tests.
|Journal||Journal of Physics: Conference Series|
|Publication status||Published - 27 Nov 2018|
|Event||6th International Congress on Energy Fluxes and Radiation Effects 2018, EFRE 2018 - Tomsk, Russian Federation|
Duration: 16 Sep 2018 → 22 Sep 2018
ASJC Scopus subject areas
- Physics and Astronomy(all)