Peculiarities of metal coatings deposition using magnetron sputtering systems with hot and evaporative targets

Abstract

This article reports on the pecularities of Cr and Cu coatings deposited by magnetron sputtering with hot and evaporative targets. There is shown the role of heat radiation from hot (evaporative) target and sublimated particle flux in energy flux density on the substrate and deposition rates. The Cr and Cu films were investigated by X-ray diffraction, scanning electron microscopy, nanoindentation, electrical conductivity and corrosion tests.

Original language	English
Article number	032065
Journal	Journal of Physics: Conference Series
Volume	1115
Issue number	3
DOIs	https://doi.org/10.1088/1742-6596/1115/3/032065
Publication status	Published - 27 Nov 2018
Event	6th International Congress on Energy Fluxes and Radiation Effects 2018, EFRE 2018 - Tomsk, Russian Federation Duration: 16 Sep 2018 → 22 Sep 2018

ASJC Scopus subject areas

Physics and Astronomy(all)

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10.1088/1742-6596/1115/3/032065

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@article{14caf0822ea144abb8fffdebc742e327,

title = "Peculiarities of metal coatings deposition using magnetron sputtering systems with hot and evaporative targets",

abstract = "This article reports on the pecularities of Cr and Cu coatings deposited by magnetron sputtering with hot and evaporative targets. There is shown the role of heat radiation from hot (evaporative) target and sublimated particle flux in energy flux density on the substrate and deposition rates. The Cr and Cu films were investigated by X-ray diffraction, scanning electron microscopy, nanoindentation, electrical conductivity and corrosion tests.",

author = "Bleykher, {G. A.} and Sidelev, {D. V.} and Grudinin, {V. A.} and Krivobokov, {V. P.} and Yuryeva, {A. V.}",

year = "2018",

month = nov,

day = "27",

doi = "10.1088/1742-6596/1115/3/032065",

language = "English",

volume = "1115",

journal = "Journal of Physics: Conference Series",

issn = "1742-6588",

publisher = "IOP Publishing Ltd.",

number = "3",

note = "6th International Congress on Energy Fluxes and Radiation Effects 2018, EFRE 2018 ; Conference date: 16-09-2018 Through 22-09-2018",

}

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T1 - Peculiarities of metal coatings deposition using magnetron sputtering systems with hot and evaporative targets

AU - Bleykher, G. A.

AU - Sidelev, D. V.

AU - Grudinin, V. A.

AU - Krivobokov, V. P.

AU - Yuryeva, A. V.

PY - 2018/11/27

Y1 - 2018/11/27

N2 - This article reports on the pecularities of Cr and Cu coatings deposited by magnetron sputtering with hot and evaporative targets. There is shown the role of heat radiation from hot (evaporative) target and sublimated particle flux in energy flux density on the substrate and deposition rates. The Cr and Cu films were investigated by X-ray diffraction, scanning electron microscopy, nanoindentation, electrical conductivity and corrosion tests.

AB - This article reports on the pecularities of Cr and Cu coatings deposited by magnetron sputtering with hot and evaporative targets. There is shown the role of heat radiation from hot (evaporative) target and sublimated particle flux in energy flux density on the substrate and deposition rates. The Cr and Cu films were investigated by X-ray diffraction, scanning electron microscopy, nanoindentation, electrical conductivity and corrosion tests.

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DO - 10.1088/1742-6596/1115/3/032065

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JO - Journal of Physics: Conference Series

JF - Journal of Physics: Conference Series

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M1 - 032065

T2 - 6th International Congress on Energy Fluxes and Radiation Effects 2018, EFRE 2018

Y2 - 16 September 2018 through 22 September 2018

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