Optical absorption peculiarities of Al-Si-N coatings produced by magnetron sputtering

A. V. Kabyshev, F. V. Konusov, A. L. Lauk, A. M. Lebedynskiy, V. N. Legostaev, E. A. Smolyanskiy

Research output: Chapter in Book/Report/Conference proceedingConference contribution

3 Citations (Scopus)

Abstract

In this paper the optical absorption characteristics of Al-Si-N coatings, deposited by magnetron sputtering on the substrates from silicon single crystals and glass were studied. The influence of conditions deposition on optical properties has been determined. The characteristics of interband and exponential absorption are determined by influence of localized states (LS) of defects continuously distributed in the band gap (BG) and reflect the influence on properties of crystalline and amorphous components material of coatings. The interband absorption is realized via the allowed indirect transitions through the optical gap 2.7-2.8 eV and direct transitions through the gap 3.8-3.96 eV. The interrelations between the parameters of interband and exponential absorption are typical for the naterials, whose properties are determined by a static and/or dynamic disordering of the crystal lattice by the defects of a different nature. Maximal average value of the BG width is 4.8-5.1 eV in the scope of semiclassical analysis applied to amorphous and strongly defective materials. The optical parameters of deposited coatings are changed in correlation with a changing of the mechanical characteristics in dependency on the nitrogen pressure.

Original languageEnglish
Title of host publicationAdvanced Materials for Technical and Medical Purpose
EditorsGeorgiy Osokin, Gennady E. Remnev, Sergey Psakhie, Valeriy Pogrebenkov, Nikolay Ratakhin
PublisherTrans Tech Publications Ltd
Pages3-8
Number of pages6
ISBN (Print)9783035710649
DOIs
Publication statusPublished - 1 Jan 2016
EventWorkshop on Advanced Materials for Technical and Medical Purpose, AMTMP-2016 - Tomsk, Russian Federation
Duration: 15 Feb 201617 Feb 2016

Publication series

NameKey Engineering Materials
Volume712
ISSN (Print)1013-9826

Conference

ConferenceWorkshop on Advanced Materials for Technical and Medical Purpose, AMTMP-2016
CountryRussian Federation
CityTomsk
Period15.2.1617.2.16

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Keywords

  • Al-Si-N coatings
  • Magnetron sputtering
  • Optical and mechanical properties

ASJC Scopus subject areas

  • Materials Science(all)
  • Mechanics of Materials
  • Mechanical Engineering

Cite this

Kabyshev, A. V., Konusov, F. V., Lauk, A. L., Lebedynskiy, A. M., Legostaev, V. N., & Smolyanskiy, E. A. (2016). Optical absorption peculiarities of Al-Si-N coatings produced by magnetron sputtering. In G. Osokin, G. E. Remnev, S. Psakhie, V. Pogrebenkov, & N. Ratakhin (Eds.), Advanced Materials for Technical and Medical Purpose (pp. 3-8). (Key Engineering Materials; Vol. 712). Trans Tech Publications Ltd. https://doi.org/10.4028/www.scientific.net/KEM.712.3