Abstract
This article reports on the results of the detailed study of erosion of Al target in magnetron discharge plasma. It was demonstrated that the combination of middle-frequency (MF) and high impulse power (HiPIMS) power supply results in the significant increase of deposition rates of Al films by changing of sputtering yield. The MF pulse assists HiPIMS discharge to transit in a high power mode.
| Original language | English |
|---|---|
| Article number | 032020 |
| Journal | Journal of Physics: Conference Series |
| Volume | 1115 |
| Issue number | 3 |
| DOIs | |
| Publication status | Published - 27 Nov 2018 |
| Event | 6th International Congress on Energy Fluxes and Radiation Effects 2018, EFRE 2018 - Tomsk, Russian Federation Duration: 16 Sep 2018 → 22 Sep 2018 |
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ASJC Scopus subject areas
- Physics and Astronomy(all)
Cite this
Operation parameters of magnetron diode for high-rate deposition of aluminum films. / Sidelev, D. V.; Grudinin, V. A.
In: Journal of Physics: Conference Series, Vol. 1115, No. 3, 032020, 27.11.2018.Research output: Contribution to journal › Conference article
}
TY - JOUR
T1 - Operation parameters of magnetron diode for high-rate deposition of aluminum films
AU - Sidelev, D. V.
AU - Grudinin, V. A.
PY - 2018/11/27
Y1 - 2018/11/27
N2 - This article reports on the results of the detailed study of erosion of Al target in magnetron discharge plasma. It was demonstrated that the combination of middle-frequency (MF) and high impulse power (HiPIMS) power supply results in the significant increase of deposition rates of Al films by changing of sputtering yield. The MF pulse assists HiPIMS discharge to transit in a high power mode.
AB - This article reports on the results of the detailed study of erosion of Al target in magnetron discharge plasma. It was demonstrated that the combination of middle-frequency (MF) and high impulse power (HiPIMS) power supply results in the significant increase of deposition rates of Al films by changing of sputtering yield. The MF pulse assists HiPIMS discharge to transit in a high power mode.
UR - http://www.scopus.com/inward/record.url?scp=85058242282&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=85058242282&partnerID=8YFLogxK
U2 - 10.1088/1742-6596/1115/3/032020
DO - 10.1088/1742-6596/1115/3/032020
M3 - Conference article
AN - SCOPUS:85058242282
VL - 1115
JO - Journal of Physics: Conference Series
JF - Journal of Physics: Conference Series
SN - 1742-6588
IS - 3
M1 - 032020
ER -