Abstract
A 3 × 3 matrix of samples has been ion implanted with nitrogen at low-to-high doses and low-to-high current densities (dose rates). All samples show surface exfoliation which results in a loss of the implanted nitrogen and a consequent loss of the wear-resistant properties-a condition of over-implantation reminiscent of that observed with metal ion implantation. There is an uptake of post-implantation oxygen which is believed to form an amorphous TiO2 component in the surface leading to the well-established low frictional properties. This uptake decreases as the dose rate is increased and would lead to a loss of wear resistant properties. The work confirms that a dose of 3 × 1017 ions cm- 2 is optimal provided that the dose rate does not exceed the present industrial standard.
Original language | English |
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Pages (from-to) | 5915-5920 |
Number of pages | 6 |
Journal | Surface and Coatings Technology |
Volume | 200 |
Issue number | 20-21 |
DOIs | |
Publication status | Published - 22 May 2006 |
Keywords
- Ion implantation
- Nitrogen ions
- Surface treatment
- Titanium nitride
ASJC Scopus subject areas
- Chemistry(all)
- Condensed Matter Physics
- Surfaces and Interfaces
- Surfaces, Coatings and Films
- Materials Chemistry