On high dose nitrogen implantation of PVD titanium nitride

Abstract

A 3 × 3 matrix of samples has been ion implanted with nitrogen at low-to-high doses and low-to-high current densities (dose rates). All samples show surface exfoliation which results in a loss of the implanted nitrogen and a consequent loss of the wear-resistant properties-a condition of over-implantation reminiscent of that observed with metal ion implantation. There is an uptake of post-implantation oxygen which is believed to form an amorphous TiO₂ component in the surface leading to the well-established low frictional properties. This uptake decreases as the dose rate is increased and would lead to a loss of wear resistant properties. The work confirms that a dose of 3 × 10¹⁷ ions cm^{- 2} is optimal provided that the dose rate does not exceed the present industrial standard.

Original language	English
Pages (from-to)	5915-5920
Number of pages	6
Journal	Surface and Coatings Technology
Volume	200
Issue number	20-21
DOIs	https://doi.org/10.1016/j.surfcoat.2005.09.010
Publication status	Published - 22 May 2006

Keywords

Ion implantation
Nitrogen ions
Surface treatment
Titanium nitride

ASJC Scopus subject areas

Chemistry(all)
Condensed Matter Physics
Surfaces and Interfaces
Surfaces, Coatings and Films
Materials Chemistry

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10.1016/j.surfcoat.2005.09.010

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@article{e1848aad0f1f44f3b30dba5acb7e75a9,

title = "On high dose nitrogen implantation of PVD titanium nitride",

abstract = "A 3 × 3 matrix of samples has been ion implanted with nitrogen at low-to-high doses and low-to-high current densities (dose rates). All samples show surface exfoliation which results in a loss of the implanted nitrogen and a consequent loss of the wear-resistant properties-a condition of over-implantation reminiscent of that observed with metal ion implantation. There is an uptake of post-implantation oxygen which is believed to form an amorphous TiO2 component in the surface leading to the well-established low frictional properties. This uptake decreases as the dose rate is increased and would lead to a loss of wear resistant properties. The work confirms that a dose of 3 × 1017 ions cm- 2 is optimal provided that the dose rate does not exceed the present industrial standard.",

keywords = "Ion implantation, Nitrogen ions, Surface treatment, Titanium nitride",

author = "Sharkeev, {Yurii P.} and Bull, {Steve J.} and Perry, {Anthony J.} and Klingenberg, {Melissa L.} and Fortuna, {Sergei V.} and Markus Michler and Manory, {Rafael R.} and Shulepov, {Ivan A.}",

year = "2006",

month = may,

day = "22",

doi = "10.1016/j.surfcoat.2005.09.010",

language = "English",

volume = "200",

pages = "5915--5920",

journal = "Surface and Coatings Technology",

issn = "0257-8972",

publisher = "Elsevier",

number = "20-21",

}

TY - JOUR

T1 - On high dose nitrogen implantation of PVD titanium nitride

AU - Sharkeev, Yurii P.

AU - Bull, Steve J.

AU - Perry, Anthony J.

AU - Klingenberg, Melissa L.

AU - Fortuna, Sergei V.

AU - Michler, Markus

AU - Manory, Rafael R.

AU - Shulepov, Ivan A.

PY - 2006/5/22

Y1 - 2006/5/22

N2 - A 3 × 3 matrix of samples has been ion implanted with nitrogen at low-to-high doses and low-to-high current densities (dose rates). All samples show surface exfoliation which results in a loss of the implanted nitrogen and a consequent loss of the wear-resistant properties-a condition of over-implantation reminiscent of that observed with metal ion implantation. There is an uptake of post-implantation oxygen which is believed to form an amorphous TiO2 component in the surface leading to the well-established low frictional properties. This uptake decreases as the dose rate is increased and would lead to a loss of wear resistant properties. The work confirms that a dose of 3 × 1017 ions cm- 2 is optimal provided that the dose rate does not exceed the present industrial standard.

AB - A 3 × 3 matrix of samples has been ion implanted with nitrogen at low-to-high doses and low-to-high current densities (dose rates). All samples show surface exfoliation which results in a loss of the implanted nitrogen and a consequent loss of the wear-resistant properties-a condition of over-implantation reminiscent of that observed with metal ion implantation. There is an uptake of post-implantation oxygen which is believed to form an amorphous TiO2 component in the surface leading to the well-established low frictional properties. This uptake decreases as the dose rate is increased and would lead to a loss of wear resistant properties. The work confirms that a dose of 3 × 1017 ions cm- 2 is optimal provided that the dose rate does not exceed the present industrial standard.

KW - Ion implantation

KW - Nitrogen ions

KW - Surface treatment

KW - Titanium nitride

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U2 - 10.1016/j.surfcoat.2005.09.010

DO - 10.1016/j.surfcoat.2005.09.010

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VL - 200

SP - 5915

EP - 5920

JO - Surface and Coatings Technology

JF - Surface and Coatings Technology

SN - 0257-8972

IS - 20-21

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