Abstract
A 3 × 3 matrix of samples has been ion implanted with nitrogen at low-to-high doses and low-to-high current densities (dose rates). All samples show surface exfoliation which results in a loss of the implanted nitrogen and a consequent loss of the wear-resistant properties-a condition of over-implantation reminiscent of that observed with metal ion implantation. There is an uptake of post-implantation oxygen which is believed to form an amorphous TiO2 component in the surface leading to the well-established low frictional properties. This uptake decreases as the dose rate is increased and would lead to a loss of wear resistant properties. The work confirms that a dose of 3 × 1017 ions cm- 2 is optimal provided that the dose rate does not exceed the present industrial standard.
| Original language | English |
|---|---|
| Pages (from-to) | 5915-5920 |
| Number of pages | 6 |
| Journal | Surface and Coatings Technology |
| Volume | 200 |
| Issue number | 20-21 |
| DOIs | |
| Publication status | Published - 22 May 2006 |
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Keywords
- Ion implantation
- Nitrogen ions
- Surface treatment
- Titanium nitride
ASJC Scopus subject areas
- Chemistry(all)
- Condensed Matter Physics
- Surfaces and Interfaces
- Surfaces, Coatings and Films
- Materials Chemistry
Cite this
On high dose nitrogen implantation of PVD titanium nitride. / Sharkeev, Yurii P.; Bull, Steve J.; Perry, Anthony J.; Klingenberg, Melissa L.; Fortuna, Sergei V.; Michler, Markus; Manory, Rafael R.; Shulepov, Ivan A.
In: Surface and Coatings Technology, Vol. 200, No. 20-21, 22.05.2006, p. 5915-5920.Research output: Contribution to journal › Article
}
TY - JOUR
T1 - On high dose nitrogen implantation of PVD titanium nitride
AU - Sharkeev, Yurii P.
AU - Bull, Steve J.
AU - Perry, Anthony J.
AU - Klingenberg, Melissa L.
AU - Fortuna, Sergei V.
AU - Michler, Markus
AU - Manory, Rafael R.
AU - Shulepov, Ivan A.
PY - 2006/5/22
Y1 - 2006/5/22
N2 - A 3 × 3 matrix of samples has been ion implanted with nitrogen at low-to-high doses and low-to-high current densities (dose rates). All samples show surface exfoliation which results in a loss of the implanted nitrogen and a consequent loss of the wear-resistant properties-a condition of over-implantation reminiscent of that observed with metal ion implantation. There is an uptake of post-implantation oxygen which is believed to form an amorphous TiO2 component in the surface leading to the well-established low frictional properties. This uptake decreases as the dose rate is increased and would lead to a loss of wear resistant properties. The work confirms that a dose of 3 × 1017 ions cm- 2 is optimal provided that the dose rate does not exceed the present industrial standard.
AB - A 3 × 3 matrix of samples has been ion implanted with nitrogen at low-to-high doses and low-to-high current densities (dose rates). All samples show surface exfoliation which results in a loss of the implanted nitrogen and a consequent loss of the wear-resistant properties-a condition of over-implantation reminiscent of that observed with metal ion implantation. There is an uptake of post-implantation oxygen which is believed to form an amorphous TiO2 component in the surface leading to the well-established low frictional properties. This uptake decreases as the dose rate is increased and would lead to a loss of wear resistant properties. The work confirms that a dose of 3 × 1017 ions cm- 2 is optimal provided that the dose rate does not exceed the present industrial standard.
KW - Ion implantation
KW - Nitrogen ions
KW - Surface treatment
KW - Titanium nitride
UR - http://www.scopus.com/inward/record.url?scp=33646471689&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=33646471689&partnerID=8YFLogxK
U2 - 10.1016/j.surfcoat.2005.09.010
DO - 10.1016/j.surfcoat.2005.09.010
M3 - Article
AN - SCOPUS:33646471689
VL - 200
SP - 5915
EP - 5920
JO - Surface and Coatings Technology
JF - Surface and Coatings Technology
SN - 0257-8972
IS - 20-21
ER -