Numerical characterization and experimental verification of an in-plane MEMS-actuator with thin-film aluminum heater

Peter Meszmer, Karla Hiller, Steffen Hartmann, Alexey Shaporin, Daniel May, Raul David Rodriguez, Jörg Arnold, Gianina Schondelmaier, Jan Mehner, Dietrich R.T. Zahn, Bernhard Wunderle

Research output: Contribution to journalReview article

13 Citations (Scopus)

Abstract

In this paper, a novel concept of a thermo-mechanical MEMS actuator using aluminum thin-film heaters on a thermal oxide for electrical insulation is presented. The actuator is part of an universal tensile testing platform for thermo-mechanical material characterization of one dimensional materials on a micro- and nano-scopic scale under different environmental conditions, as varying temperatures, pressure, moisture or even vacuum and is realised in BDRIE technology. It is shown, that the actuator concept fulfills the requirements for the use in a tensile loading stage along with heterogeneously integrated nanofunctional elements, following a specimen centered approach in line with bottom-up self-assembly processes. Simulation and experiment agree very well in the thermal and mechanical domain and allow subsequent optimisation of the actuator performance.

Original languageEnglish
Pages (from-to)1041-1050
Number of pages10
JournalMicrosystem Technologies
Volume20
Issue number6
DOIs
Publication statusPublished - 1 Jan 2014
Externally publishedYes

Fingerprint

Aluminum
heaters
microelectromechanical systems
MEMS
Actuators
actuators
aluminum
Thin films
thin films
electrical insulation
Tensile testing
moisture
Self assembly
Oxides
self assembly
Insulation
Moisture
platforms
Vacuum
requirements

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Hardware and Architecture
  • Electrical and Electronic Engineering

Cite this

Numerical characterization and experimental verification of an in-plane MEMS-actuator with thin-film aluminum heater. / Meszmer, Peter; Hiller, Karla; Hartmann, Steffen; Shaporin, Alexey; May, Daniel; Rodriguez, Raul David; Arnold, Jörg; Schondelmaier, Gianina; Mehner, Jan; Zahn, Dietrich R.T.; Wunderle, Bernhard.

In: Microsystem Technologies, Vol. 20, No. 6, 01.01.2014, p. 1041-1050.

Research output: Contribution to journalReview article

Meszmer, P, Hiller, K, Hartmann, S, Shaporin, A, May, D, Rodriguez, RD, Arnold, J, Schondelmaier, G, Mehner, J, Zahn, DRT & Wunderle, B 2014, 'Numerical characterization and experimental verification of an in-plane MEMS-actuator with thin-film aluminum heater', Microsystem Technologies, vol. 20, no. 6, pp. 1041-1050. https://doi.org/10.1007/s00542-014-2143-6
Meszmer, Peter ; Hiller, Karla ; Hartmann, Steffen ; Shaporin, Alexey ; May, Daniel ; Rodriguez, Raul David ; Arnold, Jörg ; Schondelmaier, Gianina ; Mehner, Jan ; Zahn, Dietrich R.T. ; Wunderle, Bernhard. / Numerical characterization and experimental verification of an in-plane MEMS-actuator with thin-film aluminum heater. In: Microsystem Technologies. 2014 ; Vol. 20, No. 6. pp. 1041-1050.
@article{6796e003aeb24c2c86be9a251908ed12,
title = "Numerical characterization and experimental verification of an in-plane MEMS-actuator with thin-film aluminum heater",
abstract = "In this paper, a novel concept of a thermo-mechanical MEMS actuator using aluminum thin-film heaters on a thermal oxide for electrical insulation is presented. The actuator is part of an universal tensile testing platform for thermo-mechanical material characterization of one dimensional materials on a micro- and nano-scopic scale under different environmental conditions, as varying temperatures, pressure, moisture or even vacuum and is realised in BDRIE technology. It is shown, that the actuator concept fulfills the requirements for the use in a tensile loading stage along with heterogeneously integrated nanofunctional elements, following a specimen centered approach in line with bottom-up self-assembly processes. Simulation and experiment agree very well in the thermal and mechanical domain and allow subsequent optimisation of the actuator performance.",
author = "Peter Meszmer and Karla Hiller and Steffen Hartmann and Alexey Shaporin and Daniel May and Rodriguez, {Raul David} and J{\"o}rg Arnold and Gianina Schondelmaier and Jan Mehner and Zahn, {Dietrich R.T.} and Bernhard Wunderle",
year = "2014",
month = "1",
day = "1",
doi = "10.1007/s00542-014-2143-6",
language = "English",
volume = "20",
pages = "1041--1050",
journal = "Microsystem Technologies",
issn = "0946-7076",
publisher = "Springer Verlag",
number = "6",

}

TY - JOUR

T1 - Numerical characterization and experimental verification of an in-plane MEMS-actuator with thin-film aluminum heater

AU - Meszmer, Peter

AU - Hiller, Karla

AU - Hartmann, Steffen

AU - Shaporin, Alexey

AU - May, Daniel

AU - Rodriguez, Raul David

AU - Arnold, Jörg

AU - Schondelmaier, Gianina

AU - Mehner, Jan

AU - Zahn, Dietrich R.T.

AU - Wunderle, Bernhard

PY - 2014/1/1

Y1 - 2014/1/1

N2 - In this paper, a novel concept of a thermo-mechanical MEMS actuator using aluminum thin-film heaters on a thermal oxide for electrical insulation is presented. The actuator is part of an universal tensile testing platform for thermo-mechanical material characterization of one dimensional materials on a micro- and nano-scopic scale under different environmental conditions, as varying temperatures, pressure, moisture or even vacuum and is realised in BDRIE technology. It is shown, that the actuator concept fulfills the requirements for the use in a tensile loading stage along with heterogeneously integrated nanofunctional elements, following a specimen centered approach in line with bottom-up self-assembly processes. Simulation and experiment agree very well in the thermal and mechanical domain and allow subsequent optimisation of the actuator performance.

AB - In this paper, a novel concept of a thermo-mechanical MEMS actuator using aluminum thin-film heaters on a thermal oxide for electrical insulation is presented. The actuator is part of an universal tensile testing platform for thermo-mechanical material characterization of one dimensional materials on a micro- and nano-scopic scale under different environmental conditions, as varying temperatures, pressure, moisture or even vacuum and is realised in BDRIE technology. It is shown, that the actuator concept fulfills the requirements for the use in a tensile loading stage along with heterogeneously integrated nanofunctional elements, following a specimen centered approach in line with bottom-up self-assembly processes. Simulation and experiment agree very well in the thermal and mechanical domain and allow subsequent optimisation of the actuator performance.

UR - http://www.scopus.com/inward/record.url?scp=84901440630&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=84901440630&partnerID=8YFLogxK

U2 - 10.1007/s00542-014-2143-6

DO - 10.1007/s00542-014-2143-6

M3 - Review article

AN - SCOPUS:84901440630

VL - 20

SP - 1041

EP - 1050

JO - Microsystem Technologies

JF - Microsystem Technologies

SN - 0946-7076

IS - 6

ER -