Abstract
In this paper, a novel concept of a thermo-mechanical MEMS actuator using aluminum thin-film heaters on a thermal oxide for electrical insulation is presented. The actuator is part of an universal tensile testing platform for thermo-mechanical material characterization of one dimensional materials on a micro- and nano-scopic scale under different environmental conditions, as varying temperatures, pressure, moisture or even vacuum and is realised in BDRIE technology. It is shown, that the actuator concept fulfills the requirements for the use in a tensile loading stage along with heterogeneously integrated nanofunctional elements, following a specimen centered approach in line with bottom-up self-assembly processes. Simulation and experiment agree very well in the thermal and mechanical domain and allow subsequent optimisation of the actuator performance.
| Original language | English |
|---|---|
| Pages (from-to) | 1041-1050 |
| Number of pages | 10 |
| Journal | Microsystem Technologies |
| Volume | 20 |
| Issue number | 6 |
| DOIs | |
| Publication status | Published - 1 Jan 2014 |
| Externally published | Yes |
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ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Condensed Matter Physics
- Hardware and Architecture
- Electrical and Electronic Engineering
Cite this
Numerical characterization and experimental verification of an in-plane MEMS-actuator with thin-film aluminum heater. / Meszmer, Peter; Hiller, Karla; Hartmann, Steffen; Shaporin, Alexey; May, Daniel; Rodriguez, Raul David; Arnold, Jörg; Schondelmaier, Gianina; Mehner, Jan; Zahn, Dietrich R.T.; Wunderle, Bernhard.
In: Microsystem Technologies, Vol. 20, No. 6, 01.01.2014, p. 1041-1050.Research output: Contribution to journal › Review article
}
TY - JOUR
T1 - Numerical characterization and experimental verification of an in-plane MEMS-actuator with thin-film aluminum heater
AU - Meszmer, Peter
AU - Hiller, Karla
AU - Hartmann, Steffen
AU - Shaporin, Alexey
AU - May, Daniel
AU - Rodriguez, Raul David
AU - Arnold, Jörg
AU - Schondelmaier, Gianina
AU - Mehner, Jan
AU - Zahn, Dietrich R.T.
AU - Wunderle, Bernhard
PY - 2014/1/1
Y1 - 2014/1/1
N2 - In this paper, a novel concept of a thermo-mechanical MEMS actuator using aluminum thin-film heaters on a thermal oxide for electrical insulation is presented. The actuator is part of an universal tensile testing platform for thermo-mechanical material characterization of one dimensional materials on a micro- and nano-scopic scale under different environmental conditions, as varying temperatures, pressure, moisture or even vacuum and is realised in BDRIE technology. It is shown, that the actuator concept fulfills the requirements for the use in a tensile loading stage along with heterogeneously integrated nanofunctional elements, following a specimen centered approach in line with bottom-up self-assembly processes. Simulation and experiment agree very well in the thermal and mechanical domain and allow subsequent optimisation of the actuator performance.
AB - In this paper, a novel concept of a thermo-mechanical MEMS actuator using aluminum thin-film heaters on a thermal oxide for electrical insulation is presented. The actuator is part of an universal tensile testing platform for thermo-mechanical material characterization of one dimensional materials on a micro- and nano-scopic scale under different environmental conditions, as varying temperatures, pressure, moisture or even vacuum and is realised in BDRIE technology. It is shown, that the actuator concept fulfills the requirements for the use in a tensile loading stage along with heterogeneously integrated nanofunctional elements, following a specimen centered approach in line with bottom-up self-assembly processes. Simulation and experiment agree very well in the thermal and mechanical domain and allow subsequent optimisation of the actuator performance.
UR - http://www.scopus.com/inward/record.url?scp=84901440630&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=84901440630&partnerID=8YFLogxK
U2 - 10.1007/s00542-014-2143-6
DO - 10.1007/s00542-014-2143-6
M3 - Review article
AN - SCOPUS:84901440630
VL - 20
SP - 1041
EP - 1050
JO - Microsystem Technologies
JF - Microsystem Technologies
SN - 0946-7076
IS - 6
ER -