Nucleation of ultrathin silver layer by magnetron sputtering in Ar/N2 plasma

Jiří Bulíř, Michal Novotný, Ján Lančok, Ladislav Fekete, Jan Drahokoupil, Jindřich Musil

Research output: Contribution to journalArticlepeer-review

18 Citations (Scopus)

Fingerprint Dive into the research topics of 'Nucleation of ultrathin silver layer by magnetron sputtering in Ar/N<sub>2</sub> plasma'. Together they form a unique fingerprint.

Chemical Compounds

Engineering & Materials Science

Physics & Astronomy