Non-isothermal model of ion implantation with combined ion beam

Abstract

The paper presents a coupling non-isothermal mathematical model of the initial stage of ion implantation into a metal surface. The model takes into account the finiteness of relaxation times of heat and mass fluxes, the presence of stresses and strains arising as a result of particle impact on the substrate surface and due to phenomena of heat and concentration expansion. The model assumes that the ion beam consists of two different components with different relaxation time and diffusion coefficients. The mathematical model was solved numerically. Some investigation results were presented.

Original language	English
Title of host publication	Advanced Materials with Hierarchical Structure for New Technologies and Reliable Structures 2016: Proceedings of the International Conference on Advanced Materials with Hierarchical Structure for New Technologies and Reliable Structures 2016
Subtitle of host publication	Proceedings of the International Conference on Advanced Materials with Hierarchical Structure for New Technologies and Reliable Structures 2016
Publisher	American Institute of Physics Inc.
Volume	1783
ISBN (Electronic)	9780735414457
DOIs	https://doi.org/10.1063/1.4966478
Publication status	Published - 10 Nov 2016
Event	International Conference on Advanced Materials with Hierarchical Structure for New Technologies and Reliable Structures 2016 - Tomsk, Russian Federation Duration: 19 Sep 2016 → 23 Sep 2016

Conference

Conference	International Conference on Advanced Materials with Hierarchical Structure for New Technologies and Reliable Structures 2016
Country	Russian Federation
City	Tomsk
Period	19.9.16 → 23.9.16

ASJC Scopus subject areas

Physics and Astronomy(all)

Access to Document

10.1063/1.4966478

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Parfenova, E. S., & Knyazeva, A. G. (2016). Non-isothermal model of ion implantation with combined ion beam. In Advanced Materials with Hierarchical Structure for New Technologies and Reliable Structures 2016: Proceedings of the International Conference on Advanced Materials with Hierarchical Structure for New Technologies and Reliable Structures 2016: Proceedings of the International Conference on Advanced Materials with Hierarchical Structure for New Technologies and Reliable Structures 2016 (Vol. 1783). [020184] American Institute of Physics Inc.. https://doi.org/10.1063/1.4966478

Non-isothermal model of ion implantation with combined ion beam. / Parfenova, E. S.; Knyazeva, A. G.

Advanced Materials with Hierarchical Structure for New Technologies and Reliable Structures 2016: Proceedings of the International Conference on Advanced Materials with Hierarchical Structure for New Technologies and Reliable Structures 2016: Proceedings of the International Conference on Advanced Materials with Hierarchical Structure for New Technologies and Reliable Structures 2016. Vol. 1783 American Institute of Physics Inc., 2016. 020184.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Parfenova, ES & Knyazeva, AG 2016, Non-isothermal model of ion implantation with combined ion beam. in Advanced Materials with Hierarchical Structure for New Technologies and Reliable Structures 2016: Proceedings of the International Conference on Advanced Materials with Hierarchical Structure for New Technologies and Reliable Structures 2016: Proceedings of the International Conference on Advanced Materials with Hierarchical Structure for New Technologies and Reliable Structures 2016. vol. 1783, 020184, American Institute of Physics Inc., International Conference on Advanced Materials with Hierarchical Structure for New Technologies and Reliable Structures 2016, Tomsk, Russian Federation, 19.9.16. https://doi.org/10.1063/1.4966478

Parfenova ES , Knyazeva AG. Non-isothermal model of ion implantation with combined ion beam. In Advanced Materials with Hierarchical Structure for New Technologies and Reliable Structures 2016: Proceedings of the International Conference on Advanced Materials with Hierarchical Structure for New Technologies and Reliable Structures 2016: Proceedings of the International Conference on Advanced Materials with Hierarchical Structure for New Technologies and Reliable Structures 2016. Vol. 1783. American Institute of Physics Inc. 2016. 020184 https://doi.org/10.1063/1.4966478

Parfenova, E. S. ; Knyazeva, A. G. / Non-isothermal model of ion implantation with combined ion beam. Advanced Materials with Hierarchical Structure for New Technologies and Reliable Structures 2016: Proceedings of the International Conference on Advanced Materials with Hierarchical Structure for New Technologies and Reliable Structures 2016: Proceedings of the International Conference on Advanced Materials with Hierarchical Structure for New Technologies and Reliable Structures 2016. Vol. 1783 American Institute of Physics Inc., 2016.

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AB - The paper presents a coupling non-isothermal mathematical model of the initial stage of ion implantation into a metal surface. The model takes into account the finiteness of relaxation times of heat and mass fluxes, the presence of stresses and strains arising as a result of particle impact on the substrate surface and due to phenomena of heat and concentration expansion. The model assumes that the ion beam consists of two different components with different relaxation time and diffusion coefficients. The mathematical model was solved numerically. Some investigation results were presented.

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