Non-isothermal model of ion implantation with combined ion beam

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

The paper presents a coupling non-isothermal mathematical model of the initial stage of ion implantation into a metal surface. The model takes into account the finiteness of relaxation times of heat and mass fluxes, the presence of stresses and strains arising as a result of particle impact on the substrate surface and due to phenomena of heat and concentration expansion. The model assumes that the ion beam consists of two different components with different relaxation time and diffusion coefficients. The mathematical model was solved numerically. Some investigation results were presented.

Original languageEnglish
Title of host publicationAdvanced Materials with Hierarchical Structure for New Technologies and Reliable Structures 2016: Proceedings of the International Conference on Advanced Materials with Hierarchical Structure for New Technologies and Reliable Structures 2016
Subtitle of host publicationProceedings of the International Conference on Advanced Materials with Hierarchical Structure for New Technologies and Reliable Structures 2016
PublisherAmerican Institute of Physics Inc.
Volume1783
ISBN (Electronic)9780735414457
DOIs
Publication statusPublished - 10 Nov 2016
EventInternational Conference on Advanced Materials with Hierarchical Structure for New Technologies and Reliable Structures 2016 - Tomsk, Russian Federation
Duration: 19 Sep 201623 Sep 2016

Conference

ConferenceInternational Conference on Advanced Materials with Hierarchical Structure for New Technologies and Reliable Structures 2016
CountryRussian Federation
CityTomsk
Period19.9.1623.9.16

Fingerprint

ion implantation
mathematical models
relaxation time
ion beams
metal surfaces
heat flux
diffusion coefficient
heat
expansion
coefficients

ASJC Scopus subject areas

  • Physics and Astronomy(all)

Cite this

Parfenova, E. S., & Knyazeva, A. G. (2016). Non-isothermal model of ion implantation with combined ion beam. In Advanced Materials with Hierarchical Structure for New Technologies and Reliable Structures 2016: Proceedings of the International Conference on Advanced Materials with Hierarchical Structure for New Technologies and Reliable Structures 2016: Proceedings of the International Conference on Advanced Materials with Hierarchical Structure for New Technologies and Reliable Structures 2016 (Vol. 1783). [020184] American Institute of Physics Inc.. https://doi.org/10.1063/1.4966478

Non-isothermal model of ion implantation with combined ion beam. / Parfenova, E. S.; Knyazeva, A. G.

Advanced Materials with Hierarchical Structure for New Technologies and Reliable Structures 2016: Proceedings of the International Conference on Advanced Materials with Hierarchical Structure for New Technologies and Reliable Structures 2016: Proceedings of the International Conference on Advanced Materials with Hierarchical Structure for New Technologies and Reliable Structures 2016. Vol. 1783 American Institute of Physics Inc., 2016. 020184.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Parfenova, ES & Knyazeva, AG 2016, Non-isothermal model of ion implantation with combined ion beam. in Advanced Materials with Hierarchical Structure for New Technologies and Reliable Structures 2016: Proceedings of the International Conference on Advanced Materials with Hierarchical Structure for New Technologies and Reliable Structures 2016: Proceedings of the International Conference on Advanced Materials with Hierarchical Structure for New Technologies and Reliable Structures 2016. vol. 1783, 020184, American Institute of Physics Inc., International Conference on Advanced Materials with Hierarchical Structure for New Technologies and Reliable Structures 2016, Tomsk, Russian Federation, 19.9.16. https://doi.org/10.1063/1.4966478
Parfenova ES, Knyazeva AG. Non-isothermal model of ion implantation with combined ion beam. In Advanced Materials with Hierarchical Structure for New Technologies and Reliable Structures 2016: Proceedings of the International Conference on Advanced Materials with Hierarchical Structure for New Technologies and Reliable Structures 2016: Proceedings of the International Conference on Advanced Materials with Hierarchical Structure for New Technologies and Reliable Structures 2016. Vol. 1783. American Institute of Physics Inc. 2016. 020184 https://doi.org/10.1063/1.4966478
Parfenova, E. S. ; Knyazeva, A. G. / Non-isothermal model of ion implantation with combined ion beam. Advanced Materials with Hierarchical Structure for New Technologies and Reliable Structures 2016: Proceedings of the International Conference on Advanced Materials with Hierarchical Structure for New Technologies and Reliable Structures 2016: Proceedings of the International Conference on Advanced Materials with Hierarchical Structure for New Technologies and Reliable Structures 2016. Vol. 1783 American Institute of Physics Inc., 2016.
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