Abstract
The paper presents a coupling non-isothermal mathematical model of the initial stage of ion implantation into a metal surface. The model takes into account the finiteness of relaxation times of heat and mass fluxes, the presence of stresses and strains arising as a result of particle impact on the substrate surface and due to phenomena of heat and concentration expansion. The model assumes that the ion beam consists of two different components with different relaxation time and diffusion coefficients. The mathematical model was solved numerically. Some investigation results were presented.
| Original language | English |
|---|---|
| Title of host publication | Advanced Materials with Hierarchical Structure for New Technologies and Reliable Structures 2016: Proceedings of the International Conference on Advanced Materials with Hierarchical Structure for New Technologies and Reliable Structures 2016 |
| Subtitle of host publication | Proceedings of the International Conference on Advanced Materials with Hierarchical Structure for New Technologies and Reliable Structures 2016 |
| Publisher | American Institute of Physics Inc. |
| Volume | 1783 |
| ISBN (Electronic) | 9780735414457 |
| DOIs | |
| Publication status | Published - 10 Nov 2016 |
| Event | International Conference on Advanced Materials with Hierarchical Structure for New Technologies and Reliable Structures 2016 - Tomsk, Russian Federation Duration: 19 Sep 2016 → 23 Sep 2016 |
Conference
| Conference | International Conference on Advanced Materials with Hierarchical Structure for New Technologies and Reliable Structures 2016 |
|---|---|
| Country | Russian Federation |
| City | Tomsk |
| Period | 19.9.16 → 23.9.16 |
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ASJC Scopus subject areas
- Physics and Astronomy(all)
Cite this
Non-isothermal model of ion implantation with combined ion beam. / Parfenova, E. S.; Knyazeva, A. G.
Advanced Materials with Hierarchical Structure for New Technologies and Reliable Structures 2016: Proceedings of the International Conference on Advanced Materials with Hierarchical Structure for New Technologies and Reliable Structures 2016: Proceedings of the International Conference on Advanced Materials with Hierarchical Structure for New Technologies and Reliable Structures 2016. Vol. 1783 American Institute of Physics Inc., 2016. 020184.Research output: Chapter in Book/Report/Conference proceeding › Conference contribution
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TY - GEN
T1 - Non-isothermal model of ion implantation with combined ion beam
AU - Parfenova, E. S.
AU - Knyazeva, A. G.
PY - 2016/11/10
Y1 - 2016/11/10
N2 - The paper presents a coupling non-isothermal mathematical model of the initial stage of ion implantation into a metal surface. The model takes into account the finiteness of relaxation times of heat and mass fluxes, the presence of stresses and strains arising as a result of particle impact on the substrate surface and due to phenomena of heat and concentration expansion. The model assumes that the ion beam consists of two different components with different relaxation time and diffusion coefficients. The mathematical model was solved numerically. Some investigation results were presented.
AB - The paper presents a coupling non-isothermal mathematical model of the initial stage of ion implantation into a metal surface. The model takes into account the finiteness of relaxation times of heat and mass fluxes, the presence of stresses and strains arising as a result of particle impact on the substrate surface and due to phenomena of heat and concentration expansion. The model assumes that the ion beam consists of two different components with different relaxation time and diffusion coefficients. The mathematical model was solved numerically. Some investigation results were presented.
UR - http://www.scopus.com/inward/record.url?scp=85005959286&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=85005959286&partnerID=8YFLogxK
U2 - 10.1063/1.4966478
DO - 10.1063/1.4966478
M3 - Conference contribution
AN - SCOPUS:85005959286
VL - 1783
BT - Advanced Materials with Hierarchical Structure for New Technologies and Reliable Structures 2016: Proceedings of the International Conference on Advanced Materials with Hierarchical Structure for New Technologies and Reliable Structures 2016
PB - American Institute of Physics Inc.
ER -