New approach to plasma diagnostic

A. I. Ryabchikov, I. A. Ryabchikov, I. B. Stepanov, A. A. Sinebryukhov, Yury Petrovich Usov

Research output: Contribution to journalArticle

Abstract

The work is devoted to the investigation and development of innovative plasma diagnostics method based on mutual application of plasma immersion and time-of-flight approaches for ion charge state and mass measurements. It is experimentally demonstrated that despite the presence of long tails in ion current waveform measured by Faraday cup, there is a way to increase the spectrometer resolution by several times. The current pulse FWHM equal to 170 ns was reached, that gave a possibility to use this approach for ion charge state and mass measurement for plasma with any element of the Periodic Table.

Original languageEnglish
Pages (from-to)6635-6637
Number of pages3
JournalSurface and Coatings Technology
Volume201
Issue number15
DOIs
Publication statusPublished - 23 Apr 2007

Fingerprint

Plasma diagnostics
ion charge
plasma diagnostics
Ions
submerging
ion currents
Plasmas
waveforms
spectrometers
Full width at half maximum
Spectrometers
pulses

Keywords

  • Plasma diagnostic
  • Time-of-flight spectrometry

ASJC Scopus subject areas

  • Surfaces, Coatings and Films
  • Condensed Matter Physics
  • Surfaces and Interfaces

Cite this

New approach to plasma diagnostic. / Ryabchikov, A. I.; Ryabchikov, I. A.; Stepanov, I. B.; Sinebryukhov, A. A.; Usov, Yury Petrovich.

In: Surface and Coatings Technology, Vol. 201, No. 15, 23.04.2007, p. 6635-6637.

Research output: Contribution to journalArticle

Ryabchikov, A. I. ; Ryabchikov, I. A. ; Stepanov, I. B. ; Sinebryukhov, A. A. ; Usov, Yury Petrovich. / New approach to plasma diagnostic. In: Surface and Coatings Technology. 2007 ; Vol. 201, No. 15. pp. 6635-6637.
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