New approach to plasma diagnostic

A. I. Ryabchikov, I. A. Ryabchikov, I. B. Stepanov, A. A. Sinebryukhov, Yury Petrovich Usov

Research output: Contribution to journalArticle

2 Citations (Scopus)

Abstract

The work is devoted to the investigation and development of innovative plasma diagnostics method based on mutual application of plasma immersion and time-of-flight approaches for ion charge state and mass measurements. It is experimentally demonstrated that despite the presence of long tails in ion current waveform measured by Faraday cup, there is a way to increase the spectrometer resolution by several times. The current pulse FWHM equal to 170 ns was reached, that gave a possibility to use this approach for ion charge state and mass measurement for plasma with any element of the Periodic Table.

Original languageEnglish
Pages (from-to)6635-6637
Number of pages3
JournalSurface and Coatings Technology
Volume201
Issue number15
DOIs
Publication statusPublished - 23 Apr 2007

Keywords

  • Plasma diagnostic
  • Time-of-flight spectrometry

ASJC Scopus subject areas

  • Surfaces, Coatings and Films
  • Condensed Matter Physics
  • Surfaces and Interfaces

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