Multilayer Coating Formation at the Deposition from Plasma

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The numerical experiment was carried out for the process of the coating composition formation during deposition from plasma. The chemical reactions between elements are taken into account. The nonuniform composition of the coating is determined by various transfer processes, including diffusion under stress action. To find the stress field the equilibrium problem was solved numerically because all physical and mechanical properties depend on composition. Stress field has been also obtained nonuniform.

Original languageEnglish
Article number012003
JournalIOP Conference Series: Materials Science and Engineering
Issue number1
Publication statusPublished - 3 Mar 2016


ASJC Scopus subject areas

  • Engineering(all)
  • Materials Science(all)

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