Abstract
The paper generalizes the results of research on pulsed-periodic generation of multicomponent ion streams in sources based on vacuum arc discharge. Methods are considered for forming composition-and-energy controlled multicomponent beams for multielement ion implantation in Raduga sources. The features and laws governing the emission properties of wide-aperture ion sources with plasma generation by evaporation of a material in a cathode spot are discussed. A comparative analysis is made of the physical laws and possibilities of forming one-element or multielement ion beams during extraction from a free plasma boundary under conditions when a virtual anode exists and a positive voltage drop near the anode exists in the vacuum-arc-discharge plasma.
| Original language | English |
|---|---|
| Pages (from-to) | 230-244 |
| Number of pages | 15 |
| Journal | Russian Physics Journal |
| Volume | 37 |
| Issue number | 3 |
| DOIs | |
| Publication status | Published - Mar 1994 |
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ASJC Scopus subject areas
- Physics and Astronomy(all)
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Multicomponent vacuum-arc ion beams. / Ryabchikov, A. I.
In: Russian Physics Journal, Vol. 37, No. 3, 03.1994, p. 230-244.Research output: Contribution to journal › Article
}
TY - JOUR
T1 - Multicomponent vacuum-arc ion beams
AU - Ryabchikov, A. I.
PY - 1994/3
Y1 - 1994/3
N2 - The paper generalizes the results of research on pulsed-periodic generation of multicomponent ion streams in sources based on vacuum arc discharge. Methods are considered for forming composition-and-energy controlled multicomponent beams for multielement ion implantation in Raduga sources. The features and laws governing the emission properties of wide-aperture ion sources with plasma generation by evaporation of a material in a cathode spot are discussed. A comparative analysis is made of the physical laws and possibilities of forming one-element or multielement ion beams during extraction from a free plasma boundary under conditions when a virtual anode exists and a positive voltage drop near the anode exists in the vacuum-arc-discharge plasma.
AB - The paper generalizes the results of research on pulsed-periodic generation of multicomponent ion streams in sources based on vacuum arc discharge. Methods are considered for forming composition-and-energy controlled multicomponent beams for multielement ion implantation in Raduga sources. The features and laws governing the emission properties of wide-aperture ion sources with plasma generation by evaporation of a material in a cathode spot are discussed. A comparative analysis is made of the physical laws and possibilities of forming one-element or multielement ion beams during extraction from a free plasma boundary under conditions when a virtual anode exists and a positive voltage drop near the anode exists in the vacuum-arc-discharge plasma.
UR - http://www.scopus.com/inward/record.url?scp=34249763610&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=34249763610&partnerID=8YFLogxK
U2 - 10.1007/BF00565734
DO - 10.1007/BF00565734
M3 - Article
AN - SCOPUS:34249763610
VL - 37
SP - 230
EP - 244
JO - Russian Physics Journal
JF - Russian Physics Journal
SN - 1064-8887
IS - 3
ER -