Abstract
The paper generalizes the results of research on pulsed-periodic generation of multicomponent ion streams in sources based on vacuum arc discharge. Methods are considered for forming composition-and-energy controlled multicomponent beams for multielement ion implantation in Raduga sources. The features and laws governing the emission properties of wide-aperture ion sources with plasma generation by evaporation of a material in a cathode spot are discussed. A comparative analysis is made of the physical laws and possibilities of forming one-element or multielement ion beams during extraction from a free plasma boundary under conditions when a virtual anode exists and a positive voltage drop near the anode exists in the vacuum-arc-discharge plasma.
| Original language | English |
|---|---|
| Pages (from-to) | 230-244 |
| Number of pages | 15 |
| Journal | Russian Physics Journal |
| Volume | 37 |
| Issue number | 3 |
| DOIs | |
| Publication status | Published - Mar 1994 |
ASJC Scopus subject areas
- Physics and Astronomy(all)