Monte-Carlo method of ion implantation distribution modelling

V. G. Abdrashitov, V. V. Ryzhov

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Abstract

The TRION code simulating by Monte-Carlo method of the ion and secondary cascade transfer for the catastrophic collisions scheme is described. The effect of electron and nuclear interaction cross-sections chosen on the calculation results of main ion implantation parameters is analysed.

Original languageEnglish
Pages (from-to)22-30
Number of pages9
JournalFizika i Khimiya Obrabotki Materialov
Issue number2
Publication statusPublished - Mar 1993

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ASJC Scopus subject areas

  • Materials Science(all)

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