Monte-Carlo method of ion implantation distribution modelling

V. G. Abdrashitov, V. V. Ryzhov

Research output: Contribution to journalArticle

1 Citation (Scopus)

Abstract

The TRION code simulating by Monte-Carlo method of the ion and secondary cascade transfer for the catastrophic collisions scheme is described. The effect of electron and nuclear interaction cross-sections chosen on the calculation results of main ion implantation parameters is analysed.

Original languageEnglish
Pages (from-to)22-30
Number of pages9
JournalFizika i Khimiya Obrabotki Materialov
Issue number2
Publication statusPublished - Mar 1993

Fingerprint

Ion implantation
Monte Carlo methods
Ions
Electrons
Computer simulation

ASJC Scopus subject areas

  • Materials Science(all)

Cite this

Monte-Carlo method of ion implantation distribution modelling. / Abdrashitov, V. G.; Ryzhov, V. V.

In: Fizika i Khimiya Obrabotki Materialov, No. 2, 03.1993, p. 22-30.

Research output: Contribution to journalArticle

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