Molecular dynamics simulations of vacancy generation and migration near a monocrystalline silicon surface during energetic cluster ion implantation

Guoying Liang, Haowen Zhong, Yinong Wang, Shijian Zhang, Mofei Xu, Shicheng Kuang, Jianhui Ren, Nan Zhang, Sha Yan, Xiao Yu, Gennady Efimovich Remnev, Xiaoyun Le

Research output: Contribution to journalArticle

Fingerprint Dive into the research topics of 'Molecular dynamics simulations of vacancy generation and migration near a monocrystalline silicon surface during energetic cluster ion implantation'. Together they form a unique fingerprint.

Chemical Compounds

Engineering & Materials Science

Physics & Astronomy