Modified quadrupole mass analyzer RGA-100 for beam plasma research in forevacuum pressure range

D. B. Zolotukhin, A. V. Tyunkov, Yu G. Yushkov, E. M. Oks

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Abstract

The industrial quadrupole RGA-100 residual gas analyzer was modified for the research of electron beam-generated plasma at forevacuum pressure range. The standard ionizer of the RGA-100 was replaced by three electrode extracting unit. We made the optimization of operation parameters in order to provide the maximum values of measured currents of any ion species. The modified analyzer was successfully tested with beam plasma of argon, nitrogen, oxygen, and hydrocarbons.

Original languageEnglish
Article number123301
JournalReview of Scientific Instruments
Volume86
Issue number12
DOIs
Publication statusPublished - 1 Dec 2015

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ASJC Scopus subject areas

  • Instrumentation

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