Obtaining surface with high purity and good roughness is important for increasing the corrosion resistance and wear resistance of products working in corrosion-active environment. Installation ILUR-03 with the coaxial ion beam wide energy spectrum source for cleaning, polishing and surface doping of long cylindrical items has been developed. Upgraded installation ILUR-03 provides effective technological defects cleaning (abrasives after mechanical polishing, acid residues after chemical etching, adsorbed gases), surface polishing, film deposition by using magnetrons and surface doping by ion mixing method in one technological cycle.
ASJC Scopus subject areas
- Physics and Astronomy(all)