Abstract
The elemental and phase composition of magnetron-sputtered TiN-based coatings modified by a beam of Al+ and B+ ions were investigated using the X-ray diffraction analysis, transmission electron microscopy, and secondary-ion mass spectrometry. It was shown that a complex composite TiN-based coating with regions of two types is formed by magnetron sputtering at room temperature. Ion implantation changes the coating phase composition.
Original language | English |
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Pages (from-to) | 1157-1160 |
Number of pages | 4 |
Journal | Bulletin of the Russian Academy of Sciences: Physics |
Volume | 70 |
Issue number | 7 |
Publication status | Published - 2006 |
Externally published | Yes |
ASJC Scopus subject areas
- Physics and Astronomy(all)