Modification of structure and phase composition of TiN coatings using Al+ and B+ ion beams

V. P. Sergeev, M. V. Fedorishcheva, O. V. Sergeev, A. V. Voronov, N. A. Popova, E. V. Kozlov

Research output: Contribution to journalArticle

Abstract

The elemental and phase composition of magnetron-sputtered TiN-based coatings modified by a beam of Al+ and B+ ions were investigated using the X-ray diffraction analysis, transmission electron microscopy, and secondary-ion mass spectrometry. It was shown that a complex composite TiN-based coating with regions of two types is formed by magnetron sputtering at room temperature. Ion implantation changes the coating phase composition.

Original languageEnglish
Pages (from-to)1157-1160
Number of pages4
JournalBulletin of the Russian Academy of Sciences: Physics
Volume70
Issue number7
Publication statusPublished - 2006
Externally publishedYes

ASJC Scopus subject areas

  • Physics and Astronomy(all)

Fingerprint Dive into the research topics of 'Modification of structure and phase composition of TiN coatings using Al<sup>+</sup> and B<sup>+</sup> ion beams'. Together they form a unique fingerprint.

  • Cite this

    Sergeev, V. P., Fedorishcheva, M. V., Sergeev, O. V., Voronov, A. V., Popova, N. A., & Kozlov, E. V. (2006). Modification of structure and phase composition of TiN coatings using Al+ and B+ ion beams. Bulletin of the Russian Academy of Sciences: Physics, 70(7), 1157-1160.