Modification of structure and phase composition of TiN coatings using Al+ and B+ ion beams

V. P. Sergeev, M. V. Fedorishcheva, O. V. Sergeev, A. V. Voronov, N. A. Popova, E. V. Kozlov

Research output: Contribution to journalArticlepeer-review

Abstract

The elemental and phase composition of magnetron-sputtered TiN-based coatings modified by a beam of Al+ and B+ ions were investigated using the X-ray diffraction analysis, transmission electron microscopy, and secondary-ion mass spectrometry. It was shown that a complex composite TiN-based coating with regions of two types is formed by magnetron sputtering at room temperature. Ion implantation changes the coating phase composition.

Original languageEnglish
Pages (from-to)1157-1160
Number of pages4
JournalBulletin of the Russian Academy of Sciences: Physics
Volume70
Issue number7
Publication statusPublished - 2006
Externally publishedYes

ASJC Scopus subject areas

  • Physics and Astronomy(all)

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