The elemental and phase composition of magnetron-sputtered TiN-based coatings modified by a beam of Al+ and B+ ions were investigated using the X-ray diffraction analysis, transmission electron microscopy, and secondary-ion mass spectrometry. It was shown that a complex composite TiN-based coating with regions of two types is formed by magnetron sputtering at room temperature. Ion implantation changes the coating phase composition.
|Number of pages||4|
|Journal||Bulletin of the Russian Academy of Sciences: Physics|
|Publication status||Published - 2006|
ASJC Scopus subject areas
- Physics and Astronomy(all)