Abstract
The elemental and phase composition of magnetron-sputtered TiN-based coatings modified by a beam of Al+ and B+ ions were investigated using the X-ray diffraction analysis, transmission electron microscopy, and secondary-ion mass spectrometry. It was shown that a complex composite TiN-based coating with regions of two types is formed by magnetron sputtering at room temperature. Ion implantation changes the coating phase composition.
| Original language | English |
|---|---|
| Pages (from-to) | 1157-1160 |
| Number of pages | 4 |
| Journal | Bulletin of the Russian Academy of Sciences: Physics |
| Volume | 70 |
| Issue number | 7 |
| Publication status | Published - 2006 |
| Externally published | Yes |
ASJC Scopus subject areas
- Physics and Astronomy(all)
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Sergeev, V. P., Fedorishcheva, M. V., Sergeev, O. V., Voronov, A. V., Popova, N. A., & Kozlov, E. V. (2006). Modification of structure and phase composition of TiN coatings using Al+ and B+ ion beams. Bulletin of the Russian Academy of Sciences: Physics, 70(7), 1157-1160.