Modification of structure and phase composition of TiN coatings using Al+ and B+ ion beams

Abstract

The elemental and phase composition of magnetron-sputtered TiN-based coatings modified by a beam of Al⁺ and B⁺ ions were investigated using the X-ray diffraction analysis, transmission electron microscopy, and secondary-ion mass spectrometry. It was shown that a complex composite TiN-based coating with regions of two types is formed by magnetron sputtering at room temperature. Ion implantation changes the coating phase composition.

Original language	English
Pages (from-to)	1157-1160
Number of pages	4
Journal	Bulletin of the Russian Academy of Sciences: Physics
Volume	70
Issue number	7
Publication status	Published - 2006
Externally published	Yes

ASJC Scopus subject areas

Physics and Astronomy(all)

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title = "Modification of structure and phase composition of TiN coatings using Al+ and B+ ion beams",

abstract = "The elemental and phase composition of magnetron-sputtered TiN-based coatings modified by a beam of Al+ and B+ ions were investigated using the X-ray diffraction analysis, transmission electron microscopy, and secondary-ion mass spectrometry. It was shown that a complex composite TiN-based coating with regions of two types is formed by magnetron sputtering at room temperature. Ion implantation changes the coating phase composition.",

author = "Sergeev, {V. P.} and Fedorishcheva, {M. V.} and Sergeev, {O. V.} and Voronov, {A. V.} and Popova, {N. A.} and Kozlov, {E. V.}",

year = "2006",

language = "English",

volume = "70",

pages = "1157--1160",

journal = "Bulletin of the Russian Academy of Sciences: Physics",

issn = "1062-8738",

publisher = "Allerton Press Inc.",

number = "7",

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TY - JOUR

T1 - Modification of structure and phase composition of TiN coatings using Al+ and B+ ion beams

AU - Sergeev, V. P.

AU - Fedorishcheva, M. V.

AU - Sergeev, O. V.

AU - Voronov, A. V.

AU - Popova, N. A.

AU - Kozlov, E. V.

PY - 2006

Y1 - 2006

N2 - The elemental and phase composition of magnetron-sputtered TiN-based coatings modified by a beam of Al+ and B+ ions were investigated using the X-ray diffraction analysis, transmission electron microscopy, and secondary-ion mass spectrometry. It was shown that a complex composite TiN-based coating with regions of two types is formed by magnetron sputtering at room temperature. Ion implantation changes the coating phase composition.

AB - The elemental and phase composition of magnetron-sputtered TiN-based coatings modified by a beam of Al+ and B+ ions were investigated using the X-ray diffraction analysis, transmission electron microscopy, and secondary-ion mass spectrometry. It was shown that a complex composite TiN-based coating with regions of two types is formed by magnetron sputtering at room temperature. Ion implantation changes the coating phase composition.

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M3 - Article

AN - SCOPUS:34247175504

VL - 70

SP - 1157

EP - 1160

JO - Bulletin of the Russian Academy of Sciences: Physics

JF - Bulletin of the Russian Academy of Sciences: Physics

SN - 1062-8738

IS - 7

ER -

Modification of structure and phase composition of TiN coatings using Al⁺ and B⁺ ion beams

Abstract

ASJC Scopus subject areas

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