Modification of polycrystalline Bn, AlN, and Si3N4 surfaces by ion beams

V. V. Lopatin, A. V. Kabyshev, L. S. Bushnev

    Research output: Contribution to journalArticle

    5 Citations (Scopus)

    Abstract

    Modification of surface structure and properties of the highly dispersive polycrystalline compounds α-BN, AlN, and Si3N4 have been investigated. The ceramics prepared by a vapour-phase deposition (BN), sintering (AlN and ABN: 40% AlN + 60% BN), and hot pressing (Si3N4) present thermally stable dielectrics having low electric conduction which is negligibly changed if the temperature is increased to about 1000 K. Implantation was carried out in plasma arc accelerators. The light Li, C, and Al ions formed thermally stable coats with a small temperature coefficient of resistivity up to 1600 K. The hopping conductivity was also found to appear at the implantation-induced additional levels in wide-band (about 5 eV) nitrides. Transition to a practically non-activated conductivity during post-implantation thermal treatment was observed.

    Original languageEnglish
    JournalPhysica Status Solidi (A) Applied Research
    Volume116
    Issue number1
    Publication statusPublished - Nov 1989

    Fingerprint

    Ion beams
    implantation
    ion beams
    Hot pressing
    Nitrides
    Surface structure
    Particle accelerators
    Surface properties
    conductivity
    Sintering
    hot pressing
    Vapors
    Heat treatment
    Ions
    Plasmas
    Temperature
    plasma jets
    nitrides
    sintering
    accelerators

    ASJC Scopus subject areas

    • Electronic, Optical and Magnetic Materials
    • Condensed Matter Physics

    Cite this

    Modification of polycrystalline Bn, AlN, and Si3N4 surfaces by ion beams. / Lopatin, V. V.; Kabyshev, A. V.; Bushnev, L. S.

    In: Physica Status Solidi (A) Applied Research, Vol. 116, No. 1, 11.1989.

    Research output: Contribution to journalArticle

    Lopatin, V. V. ; Kabyshev, A. V. ; Bushnev, L. S. / Modification of polycrystalline Bn, AlN, and Si3N4 surfaces by ion beams. In: Physica Status Solidi (A) Applied Research. 1989 ; Vol. 116, No. 1.
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