Modification of copper single crystals by ion and electron beams

Yu F. Ivanov, A. D. Pogrebnyak, V. I. Lavrent'yev

Research output: Contribution to journalArticle

1 Citation (Scopus)

Abstract

Investigation results of element and structure-phase analysis of near surface layers of Cu single crystals with (100)- and (111)-surface crystallographic orientation after high-dose titanium-ion implantation and subsequent high-current electron-beam irradiation are presented. A shift of the concentration maximum into the substrate depth was observed under increased implantation dose, that contradicted some experimental and theoretical results. This effect relates to the influence of a surface film of impurities (C,O) on the process of sputtering. Electron-microscopy investigations demonstrated a complex structure of an implanted copper layer including an amorphous carbon film, a titanium-carbide sublayer, deeper titanium-carbide sublayer with a second-phase δ-CuTi segregations, which was followed by a large-grain crystallite Cu layer. High-current electron-beam irradiation did not result in the formation of new phases; however, a depth of the near-surface defect-containing layer is increased due to the formation of a dislocation substructure.

Original languageEnglish
Pages (from-to)43-51
Number of pages9
JournalMetallofizika i Noveishie Tekhnologii
Volume18
Issue number9
Publication statusPublished - 1996

Fingerprint

Electron Beam
Single Crystal
Copper
Ion beams
Electron beams
titanium carbides
Titanium
Titanium carbide
ion beams
Single crystals
electron beams
Ion implantation
copper
high current
single crystals
Irradiation
Dose
dosage
irradiation
Carbon films

ASJC Scopus subject areas

  • Materials Science(all)
  • Electronic, Optical and Magnetic Materials
  • Metals and Alloys
  • Condensed Matter Physics

Cite this

Modification of copper single crystals by ion and electron beams. / Ivanov, Yu F.; Pogrebnyak, A. D.; Lavrent'yev, V. I.

In: Metallofizika i Noveishie Tekhnologii, Vol. 18, No. 9, 1996, p. 43-51.

Research output: Contribution to journalArticle

Ivanov, Yu F. ; Pogrebnyak, A. D. ; Lavrent'yev, V. I. / Modification of copper single crystals by ion and electron beams. In: Metallofizika i Noveishie Tekhnologii. 1996 ; Vol. 18, No. 9. pp. 43-51.
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