Modification of a disordered Ni3Fe alloy surface by 50 keV Zr ion implantation

Yurii P. Sharkeev, Anthony J. Perry, Daniel E. Geist, Alexander I. Ryabchikov, Alexei S. Tailashev, Natalya V. Girsova, Eduard V. Kozlov

Research output: Contribution to journalArticle

5 Citations (Scopus)

Abstract

It is well known that after ion implantation, microstructural changes are found at depths well beyond the range of the implanted ions. In the present work samples of a disordered Ni3Fe alloy, implanted with four doses of a multicomponent ion beam (where the principal component was zirconium) in the range 0.6-6.0 × 1017 ions cm-2, have been studied by transmission electron microscopy with subsidiary measurements being made of microhardness and residual stress in some of the samples. It is found that the implanted zone becomes increasingly amorphous and ZrO2 precipitates of increasing size appear as the implanted dose increases. These are accompanied by high internal stresses evidenced by electron micro-diffraction and confirmed by X-ray diffraction measurements. Immediately below the implanted zone, the dislocation density is increased by 2-3 times, depending on the implanted dose, and decreases monotonically down to a depth of about 10 μm. This is accompanied by corresponding increases in microhardness and residual stress which becomes increasingly tensile with the implanted dose.

Original languageEnglish
Pages (from-to)393-398
Number of pages6
JournalThin Solid Films
Volume308-309
Issue number1-4
DOIs
Publication statusPublished - 31 Oct 1997

Fingerprint

Ion implantation
ion implantation
Residual stresses
residual stress
dosage
Microhardness
microhardness
Ions
Zirconium
Ion beams
subsidiaries
Precipitates
Diffraction
diffraction
Transmission electron microscopy
precipitates
X ray diffraction
ions
Electrons
ion beams

Keywords

  • Disordered NiFe
  • Ion implantation
  • Zr ion

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Materials Chemistry

Cite this

Modification of a disordered Ni3Fe alloy surface by 50 keV Zr ion implantation. / Sharkeev, Yurii P.; Perry, Anthony J.; Geist, Daniel E.; Ryabchikov, Alexander I.; Tailashev, Alexei S.; Girsova, Natalya V.; Kozlov, Eduard V.

In: Thin Solid Films, Vol. 308-309, No. 1-4, 31.10.1997, p. 393-398.

Research output: Contribution to journalArticle

Sharkeev, YP, Perry, AJ, Geist, DE, Ryabchikov, AI, Tailashev, AS, Girsova, NV & Kozlov, EV 1997, 'Modification of a disordered Ni3Fe alloy surface by 50 keV Zr ion implantation', Thin Solid Films, vol. 308-309, no. 1-4, pp. 393-398. https://doi.org/10.1016/S0040-6090(97)00590-7
Sharkeev, Yurii P. ; Perry, Anthony J. ; Geist, Daniel E. ; Ryabchikov, Alexander I. ; Tailashev, Alexei S. ; Girsova, Natalya V. ; Kozlov, Eduard V. / Modification of a disordered Ni3Fe alloy surface by 50 keV Zr ion implantation. In: Thin Solid Films. 1997 ; Vol. 308-309, No. 1-4. pp. 393-398.
@article{d95bcc79dd07445fabcad384ac6d9edf,
title = "Modification of a disordered Ni3Fe alloy surface by 50 keV Zr ion implantation",
abstract = "It is well known that after ion implantation, microstructural changes are found at depths well beyond the range of the implanted ions. In the present work samples of a disordered Ni3Fe alloy, implanted with four doses of a multicomponent ion beam (where the principal component was zirconium) in the range 0.6-6.0 × 1017 ions cm-2, have been studied by transmission electron microscopy with subsidiary measurements being made of microhardness and residual stress in some of the samples. It is found that the implanted zone becomes increasingly amorphous and ZrO2 precipitates of increasing size appear as the implanted dose increases. These are accompanied by high internal stresses evidenced by electron micro-diffraction and confirmed by X-ray diffraction measurements. Immediately below the implanted zone, the dislocation density is increased by 2-3 times, depending on the implanted dose, and decreases monotonically down to a depth of about 10 μm. This is accompanied by corresponding increases in microhardness and residual stress which becomes increasingly tensile with the implanted dose.",
keywords = "Disordered NiFe, Ion implantation, Zr ion",
author = "Sharkeev, {Yurii P.} and Perry, {Anthony J.} and Geist, {Daniel E.} and Ryabchikov, {Alexander I.} and Tailashev, {Alexei S.} and Girsova, {Natalya V.} and Kozlov, {Eduard V.}",
year = "1997",
month = "10",
day = "31",
doi = "10.1016/S0040-6090(97)00590-7",
language = "English",
volume = "308-309",
pages = "393--398",
journal = "Thin Solid Films",
issn = "0040-6090",
publisher = "Elsevier",
number = "1-4",

}

TY - JOUR

T1 - Modification of a disordered Ni3Fe alloy surface by 50 keV Zr ion implantation

AU - Sharkeev, Yurii P.

AU - Perry, Anthony J.

AU - Geist, Daniel E.

AU - Ryabchikov, Alexander I.

AU - Tailashev, Alexei S.

AU - Girsova, Natalya V.

AU - Kozlov, Eduard V.

PY - 1997/10/31

Y1 - 1997/10/31

N2 - It is well known that after ion implantation, microstructural changes are found at depths well beyond the range of the implanted ions. In the present work samples of a disordered Ni3Fe alloy, implanted with four doses of a multicomponent ion beam (where the principal component was zirconium) in the range 0.6-6.0 × 1017 ions cm-2, have been studied by transmission electron microscopy with subsidiary measurements being made of microhardness and residual stress in some of the samples. It is found that the implanted zone becomes increasingly amorphous and ZrO2 precipitates of increasing size appear as the implanted dose increases. These are accompanied by high internal stresses evidenced by electron micro-diffraction and confirmed by X-ray diffraction measurements. Immediately below the implanted zone, the dislocation density is increased by 2-3 times, depending on the implanted dose, and decreases monotonically down to a depth of about 10 μm. This is accompanied by corresponding increases in microhardness and residual stress which becomes increasingly tensile with the implanted dose.

AB - It is well known that after ion implantation, microstructural changes are found at depths well beyond the range of the implanted ions. In the present work samples of a disordered Ni3Fe alloy, implanted with four doses of a multicomponent ion beam (where the principal component was zirconium) in the range 0.6-6.0 × 1017 ions cm-2, have been studied by transmission electron microscopy with subsidiary measurements being made of microhardness and residual stress in some of the samples. It is found that the implanted zone becomes increasingly amorphous and ZrO2 precipitates of increasing size appear as the implanted dose increases. These are accompanied by high internal stresses evidenced by electron micro-diffraction and confirmed by X-ray diffraction measurements. Immediately below the implanted zone, the dislocation density is increased by 2-3 times, depending on the implanted dose, and decreases monotonically down to a depth of about 10 μm. This is accompanied by corresponding increases in microhardness and residual stress which becomes increasingly tensile with the implanted dose.

KW - Disordered NiFe

KW - Ion implantation

KW - Zr ion

UR - http://www.scopus.com/inward/record.url?scp=0346045999&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0346045999&partnerID=8YFLogxK

U2 - 10.1016/S0040-6090(97)00590-7

DO - 10.1016/S0040-6090(97)00590-7

M3 - Article

VL - 308-309

SP - 393

EP - 398

JO - Thin Solid Films

JF - Thin Solid Films

SN - 0040-6090

IS - 1-4

ER -