Model of the coating growth under the conditions of magnetron sputtering deposition

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2 Citations (Scopus)

Abstract

A mathematical model of a coating that grows during magnetron deposition is formulated and examined. The effect of the main technological and kinetic parameters on the coating growth dynamics is investigated.

Original languageEnglish
Pages (from-to)83-89
Number of pages7
JournalRussian Physics Journal
Volume53
Issue number1
DOIs
Publication statusPublished - 2010

Fingerprint

magnetron sputtering
coatings
mathematical models
kinetics

Keywords

  • Growing coating
  • Magnetron sputtering deposition
  • Mathematical modeling

ASJC Scopus subject areas

  • Physics and Astronomy(all)

Cite this

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title = "Model of the coating growth under the conditions of magnetron sputtering deposition",
abstract = "A mathematical model of a coating that grows during magnetron deposition is formulated and examined. The effect of the main technological and kinetic parameters on the coating growth dynamics is investigated.",
keywords = "Growing coating, Magnetron sputtering deposition, Mathematical modeling",
author = "Knyazeva, {A. G.} and Shanin, {Sergey Alexandrovich}",
year = "2010",
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volume = "53",
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AU - Shanin, Sergey Alexandrovich

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